초록 ▼

A continuously electrically-conductive container contains an electrically-insulating support for holding an electric-field-sensitive article, such as a reticle, so that the article is shielded from external electric fields and is not in electrical contact with a conductive container wall. A SMIF pod

A continuously electrically-conductive container contains an electrically-insulating support for holding an electric-field-sensitive article, such as a reticle, so that the article is shielded from external electric fields and is not in electrical contact with a conductive container wall. A SMIF pod comprises an electrically conductive container for holding an electric-field-sensitive article. A system has boundary walls that form a chamber for a controlled environment. The system includes a load port for receiving a SMIF pod and an end effector made of insulating material for moving a field-sensitive article within the chamber to and from the SMIF pod. An ionizer neutralizes electric charges on the field-sensitive article.

대표청구항 ▼

What is claimed as new and desired to be protected by Letters Patent of the United States is: 1. A system for handling a field-sensitive article, said system having boundary walls, a chamber defined by said boundary walls, a load port for holding and operating a SMIF pod, a SMIF pod, and an effector

What is claimed as new and desired to be protected by Letters Patent of the United States is: 1. A system for handling a field-sensitive article, said system having boundary walls, a chamber defined by said boundary walls, a load port for holding and operating a SMIF pod, a SMIF pod, and an effector for moving an article within said chamber to or from an open SMIF pod, wherein:said SMIF pod comprises a conductive container and an electrically-insulating support located within said conductive container, said electrically-insulating support configured for supporting a field-sensitive article without the field-sensitive article making electrical contact to said conductive container; andsaid effector being an electrically-insulating effector configured for moving a field-sensitive article.