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[미국특허] Methods of fabricating transistors including dielectrically-supported gate electrodes and related devices 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-029/66
출원번호 US-0724656 (2010-03-16)
등록번호 US8049252 (2011-10-17)
발명자 / 주소
  • Smith, Richard Peter
  • Sheppard, Scott T.
출원인 / 주소
  • Cree, Inc.
대리인 / 주소
    Myers Bigel Sibley & Sajovec, P.A.
인용정보 피인용 횟수 : 71  인용 특허 : 130

초록

Transistors are fabricated by forming a protective layer having a first opening extending therethrough on a substrate, forming a dielectric layer on the protective layer having a second opening extending therethrough that is wider than the first opening, and forming a gate electrode in the first and

대표청구항

That which is claimed: 1. A transistor, comprising:a protective layer having a first opening extending therethrough, wherein the protective layer comprises a high-purity nitride (HPN) layer;a dielectric layer on the protective layer, the dielectric layer having a second opening extending therethroug

이 특허에 인용된 특허 (130) 인용/피인용 타임라인 분석

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  • 이 특허를 인용한 특허 (71) 인용/피인용 타임라인 분석

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    38. Mishra, Umesh; Lal, Rakesh K.; Keller, Stacia; Chowdhury, Srabanti, III-nitride transistor including a p-type depleting layer.
    39. Mishra, Umesh; Lal, Rakesh K.; Keller, Stacia; Chowdhury, Srabanti, III-nitride transistor including a p-type depleting layer.
    40. Honea, James; Wu, Yifeng, Inductive load power switching circuits.
    41. Honea, James; Wu, Yifeng, Inductive load power switching circuits.
    42. Honea, James; Wu, Yifeng, Inductive load power switching circuits.
    43. Honea, James; Wu, Yifeng, Inductive load power switching circuits.
    44. Honea, James; Wu, Yifeng, Inductive load power switching circuits.
    45. Dora, Yuvaraj, Method for making semiconductor diodes with low reverse bias currents.
    46. Lal, Rakesh K.; Coffie, Robert; Wu, Yifeng; Parikh, Primit; Dora, Yuvaraj; Mishra, Umesh; Chowdhury, Srabanti; Fichtenbaum, Nicholas, Method of forming electronic components with increased reliability.
    47. Lal, Rakesh K.; Coffie, Robert; Wu, Yifeng; Parikh, Primit; Dora, Yuvaraj; Mishra, Umesh; Chowdhury, Srabanti; Fichtenbaum, Nicholas, Method of forming electronic components with increased reliability.
    48. Chu, Rongming; Mishra, Umesh; Lal, Rakesh K., Methods of forming reverse side engineered III-nitride devices.
    49. Chu, Rongming; Mishra, Umesh; Lal, Rakesh K., Methods of forming reverse side engineered III-nitride devices.
    50. Mishra, Umesh; Chowdhury, Srabanti; Neufeld, Carl Joseph, N-polar III-nitride transistors.
    51. Mishra, Umesh; Chowdhury, Srabanti; Neufeld, Carl Joseph, N-polar III-nitride transistors.
    52. Kikkawa, Toshihide; Kiuchi, Kenji; Hosoda, Tsutomu; Kanamura, Masahito; Mochizuki, Akitoshi, Recessed ohmic contacts in a III-N device.
    53. Chu, Rongming; Mishra, Umesh; Lal, Rakesh K., Reverse side engineered III-nitride devices.
    54. Takada, Yoshiharu, Semiconductor device and method of manufacturing the same.
    55. Chu, Rongming; Coffie, Robert, Semiconductor devices with field plates.
    56. Chu, Rongming; Coffie, Robert, Semiconductor devices with field plates.
    57. Chu, Rongming; Coffie, Robert, Semiconductor devices with field plates.
    58. Chu, Rongming; Coffie, Robert, Semiconductor devices with field plates.
    59. Chu, Rongming; Coffie, Robert, Semiconductor devices with field plates.
    60. Chu, Rongming; Coffie, Robert, Semiconductor devices with field plates.
    61. Mishra, Umesh; Chowdhury, Srabanti; Dora, Yuvaraj, Semiconductor devices with guard rings.
    62. Mishra, Umesh; Chowdhury, Srabanti; Dora, Yuvaraj, Semiconductor devices with guard rings.
    63. Mishra, Umesh; Chowdhury, Srabanti; Ben-Yaacov, Ilan, Semiconductor devices with integrated hole collectors.
    64. Mishra, Umesh; Chowdhury, Srabanti; Ben-Yaacov, Ilan, Semiconductor devices with integrated hole collectors.
    65. Dora, Yuvaraj, Semiconductor diodes with low reverse bias currents.
    66. Wu, Yifeng; Chu, Rongming; Parikh, Primit; Mishra, Umesh; Ben-Yaacov, Ilan; Shen, Likun, Semiconductor heterostructure diodes.
    67. Wu, Yifeng; Mishra, Umesh; Parikh, Primit; Ben-Yaacov, Ilan, Semiconductor heterostructure diodes.
    68. Wu, Yifeng; Mishra, Umesh; Parikh, Primit; Chu, Rongming; Ben-Yaacov, Ilan; Shen, Likun, Semiconductor heterostructure diodes.
    69. Mishra, Umesh; Chowdhury, Srabanti, Transistors with isolation regions.
    70. Mishra, Umesh; Chowdhury, Srabanti, Transistors with isolation regions.
    71. Mishra, Umesh; Chowdhury, Srabanti, Transistors with isolation regions.

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