High-pressure fluidized bed reactor for preparing granular polycrystalline silicon
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
G05D-016/00
G05B-001/00
B01J-019/00
B01J-008/18
F27B-015/00
F27B-015/08
F27B-015/14
F27B-015/16
C01B-033/02
출원번호
US-0609364
(2009-10-30)
등록번호
US-8114352
(2012-02-14)
우선권정보
KR-10-2006-0011493 (2006-02-07)
발명자
/ 주소
Kim, Hee Young
Yoon, Kyung Koo
Park, Yong Ki
Choi, Won Choon
출원인 / 주소
Korea Research Institute of Chemical Technology
대리인 / 주소
Frommer Lawrence & Haug, LLP
인용정보
피인용 횟수 :
3인용 특허 :
7
초록▼
The present invention relates to a high-pressure fluidized bed reactor for preparing granular polycrystalline silicon, comprising (a) a reactor tube, (b) a reactor shell encompassing the reactor tube, (c) an inner zone formed within the reactor tube, where a silicon particle bed is formed and silico
The present invention relates to a high-pressure fluidized bed reactor for preparing granular polycrystalline silicon, comprising (a) a reactor tube, (b) a reactor shell encompassing the reactor tube, (c) an inner zone formed within the reactor tube, where a silicon particle bed is formed and silicon deposition occurs, and an outer zone formed in between the reactor shell and the reactor tube, which is maintained under the inert gas atmosphere, and (d) a controlling means to keep the difference between pressures in the inner zone and the outer zone being maintained within the range of 0 to 1 bar, thereby enabling to maintain physical stability of the reactor tube and efficiently prepare granular polycrystalline silicon even at relatively high reaction pressure.
대표청구항▼
1. A fluidized bed reactor for preparing granular poly crystalline silicon, comprising: a reactor tube;a reactor shell encompassing the reactor tube, wherein an inner zone is formed within the reactor tube and an outer zone is formed in between the reactor shell and the reactor tube and a silicon pa
1. A fluidized bed reactor for preparing granular poly crystalline silicon, comprising: a reactor tube;a reactor shell encompassing the reactor tube, wherein an inner zone is formed within the reactor tube and an outer zone is formed in between the reactor shell and the reactor tube and a silicon particle bed is formed and silicon deposition occurs in the inner zone while the silicon particle bed is not formed and silicon deposition does not occur in the outer zone; anda pressure-difference controlling part maintaining the value of |Po−Pi| within the range of 0 to 1 bar, wherein Po is an outer zone pressure and Pi is an inner zone pressure. 2. The reactor of claim 1, further comprises a fluidizing gas inlet part introducing a fluidizing gas to the silicon particle bed and a reaction gas inlet part introducing a silicon atom-containing reaction gas to the, silicon particle bed. 3. The reactor of claim 1, further comprises a silicon particle outlet part discharging polycrystalline silicon particles formed in the inner zone out of the fluidized bed reactor and a gas outlet part discharging off-gas including a fluidizing gas, a non-reacted reaction gas and a byproduct gas. 4. The reactor of claim 1, further comprises an inner pressure controlling part and an outer, pressure controlling part which are spatially connected to the inner zone and the outer zone, respectively. 5. The reactor of claim 4, wherein the inner pressure controlling part which is spatially connected to the inner zone through at least one selected from the group consisting of an inner zone connecting part, a fluidizing gas inlet part, a reaction gas inlet part, a silicon particle outlet part and a gas outlet part, which are spatially exposed to the inner zone. 6. The reactor of claim 4, wherein the outer pressure controlling part which is spatially connected to the outer zone through at least one part selected from the group consisting of an outer zone connecting part and an inert gas connecting part, which are installed on or through the reactor shell and spatially exposed directly or indirectly to the outer zone. 7. The reactor of claim 4, wherein either of the inner pressure controlling part and the outer pressure controlling part includes at least one component selected from the group consisting of (a) a connecting pipe or fitting for spatial connection;(b) a manually-operated, semi-automatic, or automatic valve;(c) a digital or analog pressure gauge or pressure-difference gauge;(d) a pressure indicator or recorder; and(e) an element constituting a controller with a signal converter or an arithmetic processor. 8. The reactor of claim 4, the inner pressure controlling part is interconnected with the outer pressure controlling part in the form of a mechanical assembly or a signal circuit. 9. The reactor of claim 8, wherein either of the inner pressure controlling part and the outer pressure controlling part is partially or completely integrated with a control system selected from the group consisting of a central control system, a distributed control system and a local control system. 10. The reactor of claim 8, wherein either of the inner pressure controlling part and the outer pressure controlling part is partially or completely integrated with a means for measuring or controlling a parameter selected from the group consisting of flow rate, temperature, gas component and particle concentration. 11. The reactor of claim 8, wherein either of the inner pressure controlling part and the outer pressure controlling part comprises a filter or a scrubber for separating particles, or a container for buffering pressure. 12. The reactor of claim 4, wherein the pressure difference, i.e., ΔP=|Po−Pi| is measured by interconnecting the inner pressure controlling part and the outer pressure controlling part, whereby the pressure-difference controlling part maintains the value of ΔP within the range of 0 to 1 bar by controlling the inner pressure controlling part and/or the outer pressure controlling part in a manual, semi-automatic or automatic way. 13. The reactor of claim 4, the pressure-difference controlling part comprises an equalizing line that spatially interconnects a first connecting pipe and a second connecting pipe, which are comprised in the inner pressure controlling part and the outer pressure controlling part, respectively. 14. The reactor of claim 13, the equalizing line comprises at least one selected from the group consisting of a check valve, a pressure equalizing valve, a 3-way valve, a filter for separating particles, a damping container, a packed bed, a piston, an assistant control fluid and a pressure compensation device using separation membrane. 15. The reactor of claim 1, further comprises an inert gas connecting part maintaining a substantially inert gas atmosphere in the outer zone. 16. The reactor of claim 15, wherein the inert gas is at least one gas selected from the group consisting of hydrogen, nitrogen, argon and helium. 17. The reactor of claim 1, wherein the reactor tube is made of at least one material selected from the group consisting of quartz, silica, silicon nitride, boron nitride, silicon carbide, graphite, silicon, and glassy carbon. 18. The reactor of claim 17, wherein the reactor tube is of one-layered or multi-layered structure in the thickness direction, each layer of which is made of a different material. 19. The reactor of claim 1, wherein at least one heating part is installed in the inner zone and/or the outer zone. 20. The reactor of claim 19, wherein the heating part is electrically connected to an electric, energy supplying part installed on or through the reactor shell. 21. The reactor of claim 1, wherein the heating part is installed within the silicon particle bed. 22. The reactor of claim 21, wherein the heating part is positioned lower than a reaction gas inlet part introducing a reaction gas to into the silicon particle bed. 23. The reactor of claim 1, wherein the inner. zone pressure and the outer zone pressure are in the range of 1-15 bar, respectively. 24. The reactor of claim 23, wherein the outer zone pressure is controlled in the range of between maximum and minimum pressure values measurable in the inner zone. 25. The reactor of claim 1, wherein the pressure-difference controlling part comprises at least one selected from the group consisting of a connecting pipe, a manually-operated valve, an automatic valve, a pressure gauge, a pressure indicator, a signal converter, a controller with an arithmetic processor and a filter for separating particles. 26. The reactor of claim 1, wherein the pressure-difference controlling part maintains the inner zone pressure (Pi) and the outer zone pressure (Po) at predetermined values of pressure, i.e. Pi* and Po*, respectively, satisfying the requirement of |Po*−Pi*|≦bar.
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이 특허에 인용된 특허 (7)
Van Slooten Richard A. (E. Aurora NY) Prasad Ravi (E. Amherst NY), Annular heated fluidized bed reactor.
Kim Hee Y. (Daejeon KRX) Song Yong M. (Daejeon KRX) Jeon Jong Y. (Daejeon KRX) Kwon Dae H. (Daejeon KRX) Lee Kang M. (Daejeon KRX) Lee Jae S. (Daejeon KRX) Park Dong S. (Daejeon KRX), Fluidized bed reactor heated by microwaves.
Yoon Poong (Seoul KRX) Song Yongmok (Chungnam KRX), Fluidized bed reactor with microwave heating system for preparing high-purity polycrystalline silicon.
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