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A process for producing spherical inorganic particles which have high flowability, can be incorporated in a high proportion, and are useful as a filler for composite substrates such as printed wiring boards and encapsulating materials. Also provided is a process for producing spherical inorganic par

A process for producing spherical inorganic particles which have high flowability, can be incorporated in a high proportion, and are useful as a filler for composite substrates such as printed wiring boards and encapsulating materials. Also provided is a process for producing spherical inorganic particles which have high flowability and can be incorporated in a high proportion and which are useful as a filler for encapsulating materials and give an encapsulating material having high electrical insulating properties. One of the processes for producing spherical inorganic particles comprises: (a1) pulverizing a silicate-containing inorganic material to form a pulverization product; (b1) heating the pulverization product in an atomized state to form the pulverization product into spherical particles; (c1) spraying water over the spherical particles to cool them while maintaining the atomized state of the spherical particles; and (d1) collecting the spherical particles. The other process, which is for producing spherical glass particles, comprises: a pulverization step in which a silicate-containing vitreous material is pulverized to form a pulverization product; an acid treatment step in which the pulverization product is contacted with an acid; and a sphering step in which the pulverization product is heated in a suspended state and formed into spherical particles.

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1. A process for producing spherical inorganic particles, comprising the following steps: (a1) pulverizing an inorganic material containing silicate to form a pulverization product;(b1) heating the pulverization product in a floated state to turn the pulverization product into spherical particles;(c

1. A process for producing spherical inorganic particles, comprising the following steps: (a1) pulverizing an inorganic material containing silicate to form a pulverization product;(b1) heating the pulverization product in a floated state to turn the pulverization product into spherical particles;(c1) spraying water containing an organosilane compound onto the spherical particles to cool the spherical particles while maintaining the floated state of the spherical particles, wherein the organosilane compound is a silane coupling agent; and(d1) collecting the cooled spherical particles. 2. The process according to claim 1, wherein the inorganic material containing silicate is vitreous. 3. The process according to claim 2, wherein the vitreous material is in the form of fibers. 4. The process according to claim 3, wherein the inorganic material containing silicate is not covered with a coating agent. 5. The process according to claim 1, wherein the silane coupling agent is represented by the following formula: R4-n—Si—(OR′)n wherein, R is an organic group; R′ is methyl, ethyl or propyl group; and n is an integer of 1 to 3. 6. A process for producing spherical glass particles, comprising the following steps: (a3) contacting a silicate-containing vitreous material containing an alkali metal oxide at 1.0% by mass or less with an acid to form silicate-containing vitreous material surface-treated with the acid,(b3) pulverizing the surface-treated silicate-containing vitreous material to form a pulverization product; and(c3) heating the pulverization product in a floated state to turn the pulverization product into the spherical particles; and then(d3) spraying water containing an organosilane compound onto the spherical particles to cool the spherical particles while maintaining the floated state of the spherical particles, wherein the organosilane compound is a silane coupling agent. 7. The process for producing spherical glass particles according to claim 6, wherein the silicate-containing vitreous material is in the form of glass fibers. 8. A process for producing spherical glass particles, comprising the following steps: (a4) pulverizing a silicate-containing vitreous material containing an alkali metal oxide at 1.0% by mass or less to form a pulverization product;(b4) contacting the pulverization product with an acid to form pulverization product surface-treated with the acid, and(c4) heating the surface-treated pulverization product in a floated state to turn the surface-treated pulverization product into spherical particles; and then(d4) spraying water containing an organosilane compound onto the spherical particles to cool the spherical particles while maintaining the floated state of the spherical particles, wherein the organosilane compound is a silane coupling agent. 9. The process for producing spherical glass particles according to claim 8, wherein the silicate-containing vitreous material is in the form of glass fibers. 10. The process according to claim 1, wherein the inorganic material containing silicate is not covered with a coating agent. 11. The process according to claim 2, wherein the inorganic material containing silicate is not covered with a coating agent.