IPC분류정보
국가/구분 |
United States(US) Patent
등록
|
국제특허분류(IPC7판) |
|
출원번호 |
US-0121043
(2009-10-09)
|
등록번호 |
US-8134714
(2012-03-13)
|
우선권정보 |
EP-08166344 (2008-10-10) |
국제출원번호 |
PCT/EP2009/063208
(2009-10-09)
|
§371/§102 date |
20110325
(20110325)
|
국제공개번호 |
WO2010/040838
(2010-04-15)
|
발명자
/ 주소 |
- Djupsjobacka, Anders
- Dahlquist, Hakan
|
출원인 / 주소 |
- Acreo AB and System 3R International AB
|
대리인 / 주소 |
|
인용정보 |
피인용 횟수 :
0 인용 특허 :
11 |
초록
▼
The invention provides a method and system for measuring the length of a reflective resonator, by analyzing an electromagnetic spectrum emitted therefrom. The emitted spectrum is used for estimating a first cavity length. This estimation is thereafter improved, by first computing at least one interf
The invention provides a method and system for measuring the length of a reflective resonator, by analyzing an electromagnetic spectrum emitted therefrom. The emitted spectrum is used for estimating a first cavity length. This estimation is thereafter improved, by first computing at least one interference number for the spectrum, adjust this value to e.g. an integer or half-integer depending on the configuration of the resonator, and thereafter re-calculating the length of the resonator using the adjusted value of the interference number. The above is an efficient way of improving the accuracy in the determination of a physical property of a resonator.
대표청구항
▼
1. A method of determining the distance between a waveguide and the surface of an object, the method comprising: providing a resonator having a first and a second reflective end surface, said second reflective end surface being the object surface, the distance to which is to be measured;transmitting
1. A method of determining the distance between a waveguide and the surface of an object, the method comprising: providing a resonator having a first and a second reflective end surface, said second reflective end surface being the object surface, the distance to which is to be measured;transmitting electromagnetic radiation (λLS) in a waveguide, and emitting said electromagnetic radiation into said resonator, wherein said electromagnetic radiation comprises at least one resonance wavelength;forming at least one resonant wave inside said resonator by means of said electromagnetic radiation (λLS);transmitting a spectrum of said radiation (SR), emitted out of said resonator, in a waveguide to a recording unit;recording said emitted spectrum (SR) by said recording unit, and providing said recorded spectrum to an analyzing unit;estimating, at said analyzing unit, at least one value of the resonator length (LEST), wherein said estimating of at least one value of the resonator length (LEST) comprises performing a Fourier transform of at least a portion of said recorded spectrum;selecting, at said analyzing unit, at least one mark wavelength (λM) of said spectrum by determining a maximum, a minimum or an inflexion point of said recorded spectrum;computing an estimated interference number (IEST), based on a ratio (2*LEST/λM) of two times said at least one value of the resonator length (LEST) and said working wavelength (λM);determining an actual interference number (ICORR) as the closest integer or half-integer to said estimated interference number (IEST); andcomputing a second value of the resonator length (LCORR) based on half the product (ICORR*λM/2) of said actual interference number (ICORR) and said working wavelength (λM). 2. A method according to claim 1, further comprising: receiving said electromagnetic radiation from a radiation source, before said electromagnetic radiation is transmitted and emitted into said resonator; andnormalizing said recorded wavelength spectrum by comparing it to a reference spectrum, and preferably to a reference spectrum of said radiation source. 3. A method according to claim 2, wherein said determining of at least one value of the resonator length (L) further comprises converting at least a portion of said wavelength spectrum to the frequency domain, before said Fourier transform is performed. 4. A method according to claim 3, wherein the band width of said electromagnetic radiation (λLS) is chosen such that that said recorded spectrum comprises at least two interference minima or at least two interference maxima. 5. A method according to claim 4, wherein said selecting of at least one mark wavelength (λM) comprises selecting further mark wavelengths by determining further different maxima and/or a minima of said spectrum. 6. A method according to claim 5, wherein said determining of an actual interference number (ICORR) further comprises providing a group of pre-determined possible interference numbers. 7. A system for determining a distance between a waveguide and the surface of an object, comprising: a resonator having a first and a second reflective end surface, said second reflective end surface being the object surface, the distance to which is to be measured; a first set of radiation transmitters arranged to transmit electromagnetic radiation (λLS) to said resonator;a recorder operative to record an electromagnetic spectrum (SR);a second set of radiation transmitters arranged to transmit radiation from said resonator to said recording means; andanalyzer operative to determine a length (L) of said resonator by:estimating at least one value of the resonator length (LEST), wherein said estimating of at least one value of the resonator length (LEST) comprises performing a Fourier transform of at least a portion of said recorded spectrum;selecting at least one mark wavelength (λM) of said spectrum by estimating a maxima, minima or an inflexion point of said recorded spectrum;computing an estimated interference number (IEST), based on a ratio (2*LEST/λM) of two times said at least one value of the resonator length (LEST) and said working wavelength (λM); determining an actual interference number (ICORR) as the closest integer or half-integer to said estimated interference number (IEST); andcomputing a second value of the resonator length (LCORR) based on half the product (ICORR*λM/2) of said actual interference number (ICORR) and said working wavelength (λM). 8. A system according to claim 7, wherein an optical fiber is arranged in said first end surface, and said second end surface is of metal. 9. A system according to claim 7, wherein the resonator is formed by a first and a second surface of a work-head unit, wherein said work-head unit preferably comprises a first and a second part, which are separable, wherein said first surface is a surface of said first part and said second surface is a surface of said second part. 10. A system according to claim 7, wherein said resonator comprises two reflecting, substantially parallel surfaces for forming resonating waves of said electromagnetic radiation. 11. A system according to claim 7, wherein said resonator is a resonator selected from a group comprising Fabry-Perot interferometers, Fizeau interferometers, Gires-Tournois etalons, Michelson interferometers and circular resonators. 12. A system according to claim 7, wherein said radiation transmitting means comprises a waveguide and preferably an optical fibre. 13. A system according to claim 7, wherein said resonator is arranged to contain a fluid. 14. A computer program carrying physical media capable of storing a computer program for controlling a system according to claim 7 and to program a programmable processing apparatus to become operable to perform a method for determining a distance between a waveguide and the surface of an object comprising: receiving a recorded electromagnetic spectrum (SR) modified by a resonator (1) having a reflective end surface being the object surface, the distance to which is to be measured;estimating at least one value of the resonator length (LEST), wherein said estimating of at least one value of the resonator length (LEST) comprises performing a Fourier transform of at least a portion of said recorded spectrum;selecting a mark wavelength (λM) of said spectrum by determining a maxima, minima or an inflexion point of said recorded spectrum;computing an estimated interference number (IEST), based on a ratio (2*LEST/λM) of two times said at least one value of the resonator length (LEST) and said mark wavelength (λM);determining an actual interference number (ICORR) as the closest integer or half integer to said estimated interference number (IEST); andcomputing a second value of the resonator length (LCORR) using half the product (ICORR*λM/2) of said actual interference number (ICORR) and said mark wavelength (λM). 15. A computer program carrying physical media capable or storing a computer program for controlling a system according to claim 8 and to program a programmable processing apparatus to become operable to perform a method for determining a distance between a waveguide and the surface of an object comprising: receiving a recorded electromagnetic spectrum (SR) modified by a resonator having a reflective end surface being the object surface, the distance to which is to be measured;estimating at least one value of the resonator length (LEST), wherein said estimating of at least one value of the resonator length (LEST) comprises performing a Fourier transform of at least a portion of said recorded spectrum;selecting a mark wavelength (λM) of said spectrum by determining a maxima, minima or an inflexion point of said recorded spectrum;computing an estimated interference number (IEST), based on a ratio (2*LEST/λM) of two times said at lest one value of the resonator length (LEST) and said mark wavelength (λM);determining an actual interference number (ICORR) as the closest integer or half integer to said estimated interference number (IEST); and computing a second value of the resonator length (LCORR) using half the product (ICORR*λM/2) of said actual interference number (ICORR) and said mark wavelength (λM).
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