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특허 상세정보

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Method and apparatus for controlling temperature

특허상세정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판) F25B-029/00    F28F-007/00    F28F-027/00    F28F-027/02   
미국특허분류(USC) 165/253; 165/201; 165/080.4; 165/096; 165/101; 062/086
출원번호 US-0725091 (2007-03-16)
등록번호 US-8151872 (2012-04-10)
발명자 / 주소
출원인 / 주소
대리인 / 주소
    Einschlag, Michael B.
인용정보 피인용 횟수 : 10  인용 특허 : 41
초록
▼

Apparatus to control a temperature of a device that includes: a thermal head adapted to be thermally contacted to the device; a combined path to the thermal head; a first path maintained at a first temperature and connected to the combined path; a second path maintained at a second temperature different from the first temperature and connected to the combined path; a third path connected to the combined path; a pump assembly operable to circulate thermal transfer fluid: from the thermal head, through each of the first, second and third paths, from each o...

대표
청구항
▼

1. An apparatus to control a temperature of a device, which apparatus comprises: a thermal head adapted to be thermally contacted to the device;a combined path to the thermal head;a first path maintained at a first temperature and connected to the combined path;a second path maintained at a second temperature different from the first predetermined temperature and connected to the combined path;a third path connected to the combined path;a pump assembly capable of circulating thermal transfer fluid: (i) from the thermal head, (ii) through each of the firs...

이 특허에 인용된 특허 (41)

  1. Turner, Jonathan E.. Active power monitoring using externally located current sensors. USP2003026518782.
  2. Wall, Charles B.; Barnes, Cynthia M.. Apparatus and method for controlling the temperature of an electronic device under test. USP2003126668570.
  3. Wall,Charles B.; Barnes,Cynthia M.. Apparatus and method for controlling the temperature of an electronic device under test. USP2006026993922.
  4. Wall, Charles B.; Craps, Terry; Schmidt, Charles R.; Brown, Matthew F. W.. Apparatus and method for controlling the temperature of an integrated circuit device. USP2003036526768.
  5. DiBattista, Larry; Malinoski, Mark; Shitara, Tomoya. Apparatus and method for temperature control of IC device during test. USP2003046549026.
  6. Wayburn,Lewis S.; Spearing,Ian G.; Schmidt, Jr.,Charles R.. Apparatus and method having mechanical isolation arrangement for controlling the temperature of an electronic device under test. USP2006097100389.
  7. Malinoski, Mark F.; Jones, Thomas P.; Annis, Brian; Turner, Jonathan E.. Apparatus, method and system of liquid-based, wide range, fast response temperature control of electric devices. USP2005036862405.
  8. Mark F. Malinoski ; Thomas P. Jones ; Brian Annis ; Jonathan E. Turner. Apparatus, method and system of liquid-based, wide range, fast response temperature control of electric devices. USP2002126498899.
  9. Mark F. Malinoski ; Thomas P. Jones ; Brian Annis ; Jonathan E. Turner. Apparatus, method and system of liquid-based, wide range, fast response temperature control of electronic device. USP2002056389225.
  10. Bauer, Albert. Cooling and/or heating device. USP2011118051903.
  11. Cardella Mark A.. Cooling system and method of cooling electronic devices. USP1999075918469.
  12. Umezawa Kazuhiko (Tokyo JPX). Cooling unit. USP1990084945980.
  13. Fenton ; John William ; Lee ; Jerry Stevenson ; Buist ; Richard James. Counter-flow thermoelectric heat pump with discrete sections. USP1978014065936.
  14. Neeb James Edward. Directed self-heating for reduction of system test time. USP2000126163161.
  15. Miyata Eiji (Fuchu) Sugiyama Masahiko (Nirasaki) Kohno Masahiko (Yamanashi) Hatta Masataka (Yamanashi JPX). Electric probing-test machine having a cooling system. USP1993035198752.
  16. Tozuka Tadao,JPX ; Suzuki Kozo,JPX. Electronic cooling apparatus. USP1999105964092.
  17. Kainuma Tadashi,JPX ; Masuda Noboru,JPX ; Nakajima Haruki,JPX ; Igarashi Noriyuki,JPX ; Nansai Yuichi,JPX. IC testing apparatus. USP2001076257319.
  18. Needham, Wayne M.. Method and apparatus for controlling the power and heat output in a device testing system. USP2003096617868.
  19. Weber,Richard M.. Method and apparatus for cooling with coolant at a subambient pressure. USP2006027000691.
  20. Weber,Richard Martin; Wyatt,William Gerald. Method and apparatus for cooling with coolant at a subambient pressure. USP2007087254957.
  21. Aniekan Udobot ; Ron Brager ; Larry Reed. Method and apparatus for improved aircraft environmental control system utilizing parallel heat exchanger arrays. USP2002106460353.
  22. Burward-Hoy Trevor. Method and apparatus for rapidly varying the operating temperature of a semiconductor device in a testing environment. USP1999115977785.
  23. Di Stefano, Peter T.; Di Stefano, Thomas H.. Method and apparatus for setting and controlling temperature. USP2011098025097.
  24. Jean Luc Pelissier ; Thomas P. Jones ; Jonathan E. Turner ; Mark F. Malinoski. Method and apparatus for temperature control of a device during testing. USP2002116476627.
  25. Pelissier, Jean Luc. Method and apparatus for temperature control of a device during testing. USP2003116650132.
  26. Gaasch, Thomas Francis; Trieu, Thanh. Method for controlling the temperature of an electronic component under test. USP2005056886976.
  27. Abadilla Thomas T. P. (Vallejo CA) Drake Kelly J. (Fremont CA). Micro-climate conditioning unit. USP1996105564276.
  28. Eager George (Cambridge MA) Schey Thomas J. (Woonsocket RI) Selverstone Peter (Cambridge MA). Mixing valve air source. USP1988114784213.
  29. Lutz, Robert C.; Dickson, Lloyd B.; Eddington, Ralph James. Semiconductor wafer electrical testing with a mobile chiller plate for rapid and precise test temperature control. USP2004086771086.
  30. Umezawa Kazuhiko (Tokyo JPX). Structure for temperature detection in a package. USP1990124975766.
  31. Jerry Ihor Tustaniwskyj ; James Wittman Babcock. System for regulating the temperature of IC-chips with a fluid whose temperature is controlled quickly by a slow response cooler and a fast response heater. USP2002036362944.
  32. Gaasch, Thomas Francis; Trieu, Thanh. Temperature control device for an electronic component. USP2003106636062.
  33. Thomas P. Jones ; Jonathan E. Turner ; Mark F. Malinoski. Temperature control of electronic devices using power following feedback. USP2002126489793.
  34. Tustaniwskyj Jerry Ihor ; Babcock James Wittman. Temperature control system for an electronic device in which device temperature is estimated from heater temperature and. USP1998125844208.
  35. Cardella Mark A.. Temperature control system for electronic devices. USP2001026184504.
  36. Yanagida, Akihito; Yamada, Shunji. Temperature controlling apparatus. USP2011057938174.
  37. Nakagomi Yoichi,JPX ; Furuya Kunihiro,JPX ; Tsukada Hiroshi,JPX. Temperature managing apparatus for multi-stage container. USP2001056239602.
  38. Stone, William M.. Temperature-controlled thermal platform for automated testing. USP2004066744270.
  39. Fukasawa, Yoshihito; Maiwa, Hisaaki. Test handler for semiconductor device. USP2003076593761.
  40. Feder, Jan; Beyerle, Rick; Byers, Stephen; Jones, Thomas. Thermal control of a DUT using a thermal control substrate. USP2004116825681.
  41. Feder,Jan; Beyerle,Rick; Byers,Stephen; Jones,Thomas. Thermal control of a DUT using a thermal control substrate. USP2006016985000.

이 특허를 인용한 특허 피인용횟수: 10

  1. Tian, Baoxia; Lee, Steven Tianxiao; Liu, Yingbin; Guo, Quanyong. Apparatus and method for controlling heating of base within chemical vapour deposition chamber. USP2017129851151.
  2. Di Stefano, Thomas H.. Apparatus to control device temperature utilizing multiple thermal paths. USP2015109151551.
  3. Di Stefano, Thomas H.. Apparatus to control device temperature utilizing multiple thermal paths. USP20181110119776.
  4. Harji, Bashir. Heating and cooling apparatus. USP20180910065162.
  5. Moilala, Kari; Gasik, Michael. Phase change material heat exchanger. USP2013098522859.
  6. Mercz, József; Szabó, András; Tóth, Gyula. Switchable waste gas exchanger. USP2013028365813.
  7. Lopez, Christopher A.; Davis, Rick A.. Thermal clutch for thermal control unit and methods related thereto. USP2018039921265.
  8. Tani, Tony Mitsuaki; Stuckey, Larry Ray. Thermal controller for electronic devices. USP2014098844612.
  9. Campbell, Levi A.; Chu, Richard C.; David, Milnes P.; Ellsworth, Jr., Michael J.; Iyengar, Madhusudan K.; Schmidt, Roger R.; Simons, Robert E.. Thermostat-controlled coolant flow within a heat sink. USP2016039291281.
  10. Campbell, Levi A.; Chu, Richard C.; David, Milnes P.; Ellsworth, Jr., Michael J.; Iyengar, Madhusudan K.; Schmidt, Roger R.; Simons, Robert E.. Thermostat-controlled coolant flow within a heat sink. USP2016039285050.

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