[특허]Method of manufacturing magnetoresistive element, magnetoresistive element, magnetic head assembly and magnetic recording apparatus

[미국특허] Method of manufacturing magnetoresistive element, magnetoresistive element, magnetic head assembly and magnetic recording apparatus 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	G11B-005/39
출원번호	US-0585623 (2009-09-18)
등록번호	US-8274765 (2012-09-25)
우선권정보	JP-2008-249977 (2008-09-29)
발명자 / 주소	Fuke, Hiromi Hashimoto, Susumu Takagishi, Masayuki Iwasaki, Hitoshi
출원인 / 주소	Kabushiki Kaisha Toshiba
대리인 / 주소	Nixon & Vanderhye, P.C.
인용정보	피인용 횟수 : 1 인용 특허 : 86

초록 ▼

A method of manufacturing a magnetoresistive element includes forming a metal layer on a first ferromagnetic layer, oxidizing the metal layer to form an oxide layer in which unoxidized metal is remained and a magnetic conduction column penetrating the oxide layer in a thickness direction and including at least a part of constituent elements of the first ferromagnetic layer, annealing a resultant structure at a higher temperature than a temperature at which the oxide layer is formed to convert at least a part of a periphery of the magnetic conduction column into a magnetic oxide including a part of constituent elements of the oxide layer and at least a part of constituent elements of the magnetic conduction column, and forming a second ferromagnetic layer.

대표청구항 ▼

1. A method of manufacturing a magnetoresistive element comprising: forming a metal layer on a first ferromagnetic layer;oxidizing the metal layer at a temperature to form an oxide layer in which unoxidized metal remains and a magnetic conduction column penetrating the oxide layer in a thickness direction and comprising at least a part of constituent elements of the first ferromagnetic layer;annealing a resultant structure at a higher temperature than the temperature at which the oxide layer is formed to convert at least a part of a periphery of the magnetic conduction column into a magnetic oxide comprising a part of constituent elements of the oxide layer and at least a part of constituent elements of the magnetic conduction column; andforming a second ferromagnetic layer. 2. The method according to claim 1, wherein oxidizing the metal layer to form the oxide layer and the magnetic conduction column comprises applying an ion beam or RF plasma of a rare gas to the metal layer while supplying an oxidizing gas. 3. The method according to claim 1, wherein oxidizing the metal layer to form the oxide layer and the magnetic conduction column comprises applying an ion beam or RF plasma of a rare gas to the metal layer while supplying an oxidizing gas and further comprising applying the ion beam or RF plasma of the rare gas to the oxidized metal layer without supplying the oxidizing gas. 4. A magnetoresistive element comprising: a stacked film comprising first and second ferromagnetic layers, a magnetization direction of one of which ferromagnetic layers is substantially pinned in a direction and a magnetization direction of the other of which ferromagnetic layers is varied depending on an external magnetic field, and an intermediate layer between the first and second ferromagnetic layers; anda pair of electrodes provided on a bottom and a top of the stacked film and configured to pass a current perpendicularly to a film plane of the stacked film,the intermediate layer comprising: an oxide layer; a magnetic conduction column penetrating the oxide layer in a thickness direction; and a magnetic oxide covering at least a part of a periphery of the magnetic conduction column and comprising a part of constituent elements of the oxide layer and at least a part of constituent elements of the magnetic conduction column. 5. The magnetoresistive element according to claim 4, wherein the first and second ferromagnetic layers comprise at least one element selected from the group consisting of Fe, Co and Ni. 6. The magnetoresistive element according to claim 4, wherein the oxide layer comprises Al as a metal element. 7. A magnetic head assembly comprising the magnetoresistive element according to claim 4. 8. A magnetic recording apparatus comprising a magnetic recording medium and the magnetic head assembly according to claim 7. 9. The method according to claim 1, wherein the magnetic oxide covers the periphery of the magnetic conduction column. 10. The magnetoresistive element according to claim 4, wherein the magnetic oxide covers the periphery of the magnetic conduction column.

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IPC	Description
A	생활필수품
A62	인명구조; 소방(사다리 E06C)
A62B	인명구조용의 기구, 장치 또는 방법(특히 의료용에 사용되는 밸브 A61M 39/00; 특히 물에서 쓰이는 인명구조 장치 또는 방법 B63C 9/00; 잠수장비 B63C 11/00; 특히 항공기에 쓰는 것, 예. 낙하산, 투출좌석 B64D; 특히 광산에서 쓰이는 구조장치 E21F 11/00)
A62B-1/08	.. 윈치 또는 풀리에 제동기구가 있는 것

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[미국특허] Method of manufacturing magnetoresistive element, magnetoresistive element, magnetic head assembly and magnetic recording apparatus 원문보기

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[미국특허] Method of manufacturing magnetoresistive element, magnetoresistive element, magnetic head assembly and magnetic recording apparatus 원문보기

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