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Fluid storage and dispensing systems, and fluid supply processes comprising same 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B01D-053/02
출원번호 US-0149666 (2011-05-31)
등록번호 US-8282023 (2012-10-09)
발명자 / 주소
  • Olander, W. Karl
  • McManus, James V.
  • Hultquist, Steven J.
  • Arno, Jose I.
  • Van Buskirk, Peter C.
출원인 / 주소
  • Advanced Technology Materials, Inc.
대리인 / 주소
    Hultquist, PLLC
인용정보 피인용 횟수 : 1  인용 특허 : 48

초록

Fluid storage and dispensing systems, and processes for supplying fluids for use thereof. Various arrangements of fluid storage and dispensing systems are described, involving permutations of the physical sorbent-containing fluid storage and dispensing vessels and internal regulator-equipped fluid s

대표청구항

1. A fluid supply system, comprising: a sorbent-based and/or internal pressure regulator-equipped supply vessel holding fluid;a dispensing assembly coupled with the fluid supply vessel, wherein the coupled fluid supply vessel and dispensing assembly are adapted to contain the fluid in the supply ves

이 특허에 인용된 특허 (48)

  1. Nakanoya Tsutomu,JPX ; Shibsawa Yuji,JPX ; Hasumi Kazuhiro,JPX ; Ishimori Koji,JPX ; Ibaraki Satoshi,JPX ; Takauchi Akira,JPX, Activated carbon for adsorptive storage of gaseous compound.
  2. Dahlgren Andrew Christian ; Rogers Robert Murray, Adsorbent construction; and, method.
  3. Wang, Luping; Neugold, Doug, Adsorbents for low vapor pressure fluid storage and delivery.
  4. Peng,Wenfeng; Green,David C.; Stewart,Robert G., Apparatus and method for generating calibration gas.
  5. Arno, Jose; Sturm, Edward; Wang, Luping; Dietz, James, Apparatus and method for inhibiting decomposition of germane.
  6. Tom Glenn M. ; Kirlin Peter S. ; McManus James V., Apparatus and process for manufacturing semiconductor devices, products and precursor structures utilizing sorbent-based fluid storage and dispensing system for reagent delivery.
  7. Restive, Mario J., Aspiration sprayer.
  8. McManus James V. ; Brestovansky Dennis F. ; Kirlin Peter S., Bulk storage and dispensing system for fluids.
  9. Tom, Glenn M.; Hultquist, Steven J., Channelized sorbent media, and methods of making same.
  10. McCombs Norman R. (Tonawanda NY) Schlaechter John (Kenmore NY), Compact oxygen concentrator.
  11. Bruat, Josyane; L'Heveder, Clarisse, Device for storing and mixing two gases.
  12. McManus James V., Ex situ degassing and sorbate loading system for manufacture of sorbent-based fluid storage and dispensing apparatus.
  13. Tom Glenn M. ; McManus James V. ; Olander W. Karl, Fluid storage and delivery system comprising high work capacity physical sorbent.
  14. Tom Glenn M. ; McManus James V. ; Olander W. Karl, Fluid storage and delivery system utilizing carbon sorbent medium.
  15. Wang, Luping; Salsbury, Joseph, Fluid storage and delivery system utilizing low heels carbon sorbent medium.
  16. Wang Luping ; Tom Glenn M., Fluid storage and dispensing system.
  17. Wang Luping ; Tom Glenn M., Fluid storage and dispensing system.
  18. Olander, W. Karl; McManus, James V.; Hultquist, Steven J.; Arno, Jose I.; Van Buskirk, Peter C., Fluid storage and dispensing systems, and fluid supply processes comprising same.
  19. Tom Glenn M. ; Brown Duncan W., Fluid storage and dispensing vessel with modified high surface area solid as fluid storage medium.
  20. Glenn M. Tom ; James V. McManus, Gas cabinet assembly comprising sorbent-based gas storage and delivery system.
  21. Tom, Glenn M.; McManus, James V., Gas cabinet assembly comprising sorbent-based gas storage and delivery system.
  22. Tom Glenn M. ; McManus James V., Gas source and dispensing system.
  23. Tom Glenn M. ; McManus James V., Gas source and dispensing system with in situ monitoring of pressure and temperature.
  24. Carruthers, J. Donald, Gas storage and dispensing system with monolithic carbon adsorbent.
  25. Carruthers, J. Donald, Gas storage and dispensing system with monolithic carbon adsorbent.
  26. Carruthers,J. Donald, Gas storage and dispensing system with monolithic carbon adsorbent.
  27. Tom Glenn M., High capacity gas storage and dispensing system.
  28. Tom Glenn M., High capacity gas storage and dispensing system.
  29. Brandes George R. ; Tom Glenn M. ; McManus James V., Laser system utilizing sorbent-based gas storage and delivery system.
  30. Tom Glenn M., Low concentration gas delivery system utilizing sorbent-based gas storage and delivery system.
  31. Olander W. Karl, Low pressure gas source and dispensing apparatus with enhanced diffusive/extractive means.
  32. Olander W. Karl ; McManus James V., Manufacturing process for gas source and dispensing systems.
  33. Watanabe, Tadaharu; Torres, Jr., Robert; Vininski, Joseph, Method and system for supplying high purity fluid.
  34. Alperine Serge (Paris FRX) Josso Pierre (Issy Les Moulineaux FRX), Method for producing an adherent metal deposit on carbon, and mirror obtained by this method.
  35. Mondragon Fanor (Medellin COX) Fernandez John (Medellin COX) Jaramillo Alfredo (Medellin COX) Quintero Gustavo (Medellin COX), Process for making activated charcoal.
  36. Jones Jack A. (Los Angeles CA) Yavrouian Andre H. (Glendale CA), Process for producing an activated carbon adsorbent with integral heat transfer apparatus.
  37. Tom Glenn M. ; McManus James V., Process system with integrated gas storage and delivery unit.
  38. Brestovansky,Dennis; Wodjenski,Michael J.; Arno,Jose I.; Carruthers,J. Donald, Rectangular parallelepiped fluid storage and dispensing vessel.
  39. Yokota Hisaaki (Chigasaki JPX) Yoshiguchi Tadashi (Kamakura JPX) Kamimatsuse Hitoshi (Kamakura JPX), Solvent adsorber and solvent recovery system.
  40. Tom Glenn M. ; McManus James V., Sorbent-based fluid storage and dispensing system with high efficiency sorbent medium.
  41. Tom Glenn M., Sorbent-based fluid storage and dispensing vessel with enhanced heat transfer means.
  42. Tischler Michael A. ; Kirlin Peter S., Sorbent-based fluid storage and dispensing vessel with replaceable sorbent cartridge members.
  43. Tom, Glenn M.; McManus, James V.; Wang, Luping; Olander, W. Karl, Sorbent-based gas storage and delivery system.
  44. Hultquist Steven J. ; Tom Glenn M. ; Kirlin Peter S. ; McManus James V., Sorbent-based gas storage and delivery system for dispensing of high-purity gas, and apparatus and process for manufacturing semiconductor devices, products and precursor structures utilizing same.
  45. Tom Glenn M. ; McManus James V., Storage and delivery system for gaseous compounds.
  46. Tom Glenn M. (New Milford CT) McManus James V. (Danbury CT), Storage and delivery system for gaseous hydride, halide, and organometallic group V compounds.
  47. Olander, W. Karl, Sub-atmospheric pressure delivery of liquids, solids and low vapor pressure gases.
  48. Dietz James ; McManus James V., Throughflow gas storage and dispensing system.

이 특허를 인용한 특허 (1)

  1. Tseng, Huan-Hsiung; Tung, Cheng-Hsiang; Yu, Ming-Sheng, Gas-assisted hydrogen desorption method and apparatus for hydrogen storage material.
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