Embodiments of the present invention generally provide methods for forming conductive structures on the surfaces of a solar cell. In one embodiment, conductive structures are formed on the front surface of a solar cell by depositing a sacrificial polymer layer, forming patterned lines in the sacrifi
Embodiments of the present invention generally provide methods for forming conductive structures on the surfaces of a solar cell. In one embodiment, conductive structures are formed on the front surface of a solar cell by depositing a sacrificial polymer layer, forming patterned lines in the sacrificial polymer via a fluid jet, depositing metal layers over the front surface of the solar cell, and performing lift off of the metal layers deposited over the sacrificial polymer by dissolving the sacrificial polymer with a water based solvent. In another embodiment, conductive structures are formed on the back surface of a solar cell by depositing a sacrificial polymer layer, forming patterned lines in the sacrificial polymer via a fluid jet, depositing a metal layer over the back surface of the solar cell, and performing lift off of the metal layer deposited over the sacrificial polymer by dissolving the sacrificial polymer with a water based solvent, and completing selective metallization of the remaining metal lines.
대표청구항▼
1. A method for forming a patterned conductor on a solar cell, comprising: depositing a sacrificial polymer layer over a surface of the solar cell;directing a fluid stream at the sacrificial polymer layer;removing a portion of the sacrificial polymer layer;depositing a metal containing layer over th
1. A method for forming a patterned conductor on a solar cell, comprising: depositing a sacrificial polymer layer over a surface of the solar cell;directing a fluid stream at the sacrificial polymer layer;removing a portion of the sacrificial polymer layer;depositing a metal containing layer over the solar cell;introducing a water-based solvent to the solar cell; anddissolving the remaining sacrificial polymer layer. 2. The method of claim 1, wherein the sacrificial polymer layer comprises a water soluble material. 3. The method of claim 2, wherein the fluid stream comprises a jet of water-based fluid. 4. The method of claim 3, wherein the water-based fluid is deionized water. 5. The method of claim 3, wherein removing a portion of the sacrificial polymer layer includes patterning a series of grooves in the sacrificial polymer. 6. The method of claim 3, further comprising removing a portion of an antireflective layer from the surface of the solar cell. 7. The method of claim 6, wherein the portion of the antireflective layer is removed via laser ablation. 8. The method of claim 6, further comprising removing a portion of the metal containing layer. 9. The method of claim 3, wherein the metal containing layer comprises a seed layer. 10. The method of claim 9, wherein the metal containing layer further comprises a barrier layer. 11. A method for forming a patterned conductor on a solar cell, comprising: depositing a sacrificial polymer layer over a surface of the solar cell, wherein the sacrificial polymer layer comprises a water soluble material;curing the sacrificial polymer layer to a substantially solid state;directing a water-based fluid stream at the sacrificial polymer layer;removing a portion of the sacrificial polymer layer, wherein one or more lines are formed through the sacrificial polymer layer;depositing a metal containing seed layer over the solar cell;introducing a water-based solvent to the solar cell; anddissolving the remaining sacrificial polymer layer to remove a portion of the metal containing layer deposited over the sacrificial polymer layer. 12. The method of claim 11, further comprising removing a portion of a dielectric layer deposited beneath the sacrificial polymer layer. 13. The method of claim 12, further comprising removing the portion of the dielectric layer through the one or more lines formed through the sacrificial layer. 14. The method of claim 13, wherein the water-based fluid stream consists of deionized water. 15. The method of claim 14, wherein the water-based solvent consists of deionized water. 16. The method of claim 13, further comprising depositing a barrier layer over the metal containing seed layer. 17. The method of claim 16, further comprising depositing a metal layer over the barrier layer. 18. The method of claim 17, further comprising removing a portion of each of the metal layer, the seed layer, and the barrier layer prior to introducing the water-based solvent. 19. A method for forming a patterned conductor on a solar cell, comprising: depositing a sacrificial polymer layer over an antireflective layer formed over a surface of the solar cell, wherein the sacrificial polymer layer comprises polyvinyl acetate;heating the sacrificial polymer layer to cure the polymer to a substantially solid state;directing a jet of deionized water at the sacrificial polymer layer;removing a portion of the sacrificial polymer layer by forming one or more lines through the sacrificial polymer layer;laser ablating a portion of the antireflective layer exposed by forming the lines;depositing a metal containing layer over the solar cell;introducing deionized water to the solar cell; anddissolving the remaining sacrificial polymer layer to remove a portion of the metal containing layer deposited over the sacrificial polymer layer. 20. The method of claim 19, wherein the metal containing layer comprises a seed layer, a barrier, layer, and a bulk copper layer.
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이 특허에 인용된 특허 (2)
Plaettner Rolf (Riemerling DEX), Method for the integrated series-interconnection of thick-film solar cells and method for the manufacture of tandem sola.
Minahan Joseph A. (Simi Valley CA) Ralph Eugene L. (San Gabriel CA) Dill Hans G. (Newhall CA), Process for fabricating a wraparound contact solar cell.
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