초록

Methods and etchant compositions for wet etching to selectively remove a hafnium aluminum oxide (HfAlOx) material relative to silicon oxide (SiOx) are provided.

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1. A method of etching a DARC material and hafnium aluminum oxide material in the presence of exposed silicon oxide material, the DARC material overlying and in contact with the hafnium aluminum oxide material, the method comprising: applying an etchant solution to the DARC material and the hafnium

1. A method of etching a DARC material and hafnium aluminum oxide material in the presence of exposed silicon oxide material, the DARC material overlying and in contact with the hafnium aluminum oxide material, the method comprising: applying an etchant solution to the DARC material and the hafnium aluminum oxide material to selectively etch the DARC material and the hafnium aluminum oxide material at a rate greater than the silicon oxide material;wherein the etchant solution consists essentially of phosphoric acid and water and optionally a pH modifying acid such that the etchant solution has a pH of less than 2. 2. The method of claim 1, wherein a volume ratio of a total amount of the phosphoric acid to water is about 50:50 to about 90:10. 3. The method of claim 1, wherein a volume ratio of a total amount of the phosphoric acid to water is about 80:20 to about 85:15. 4. The method of claim 1, wherein the hafnium aluminum oxide material is etched at rate of about 50-400 Å/minute, and the silicon oxide material is etched at rate of about 5-400 Å/minute. 5. The method of claim 1, wherein the etchant solution has a selectivity of hafnium aluminum oxide to silicon oxide of about 2:1 to about 20:1. 6. The method of claim 1, wherein the etchant solution has a temperature of about 100° C.-185° C. 7. The method of claim 1, wherein the hafnium aluminum oxide material has a Hf:Al ratio of about 20:1 to about 4:1. 8. The method of claim 1, wherein the silicon oxide is an oxide selected from the group consisting of tetraethylorthosilicate, spin-on-glass, undoped SiO2, phosphosilicate glass, borophosphosilicate glass, and borosilicate glass. 9. The method of claim 1, wherein the hafnium aluminum oxide material is etched relative to the silicon oxide at an etch selectivity of about 8:1 to about 12:1 hafnium aluminum oxide material to silicon oxide material. 10. A method of etching a DARC material and hafnium aluminum oxide material in the presence of exposed silicon oxide material, the DARC material overlying and in contact with the hafnium aluminum oxide material, the method comprising: applying an etchant solution to the DARC material and the hafnium aluminum oxide material to etch the DARC and hafnium aluminum oxide materials at a rate greater than the silicon oxide material;wherein the etchant solution consists essentially of phosphoric acid and water. 11. The method of claim 10, wherein the hafnium aluminum oxide material is etched at rate of about 50-400 Å/minute, the DARC material is etched at rate of about 20-40 Å/minute, and the silicon oxide material is etched at rate of about 5-15 Å/minute. 12. The method of claim 10, wherein the etchant solution has a selectivity of hafnium aluminum oxide to silicon oxide of about 2:1 to about 20:1. 13. A method of forming a semiconductor device, comprising: etching a hafnium aluminum oxide layer and a DARC layer through a patterned photoresist mask to expose a silicon oxide layer, the DARC layer overlying and in contact with the hafnium aluminum oxide layer;etching the silicon oxide layer to form an opening extending to a substrate;removing the patterned photoresist mask to expose the DARC layer; andapplying an etchant solution consisting essentially of phosphoric acid and water to selectively etch the hafnium aluminum oxide and DARC layers at a rate greater than the silicon oxide. 14. A method of forming a semiconductor device, comprising: forming a hafnium aluminum oxide layer over a silicon oxide layer situated on a substrate;forming a DARC layer over the hafnium aluminum oxide layer;forming a patterned photoresist layer over the DARC layer to expose the DARC layer;etching the hafnium aluminum oxide and DARC layers through the patterned photoresist layer to expose the silicon oxide layer;etching the silicon oxide layer to form an opening extending to the substrate;removing the patterned photoresist layer to expose the DARC layer; andapplying an etchant solution consisting essentially of phosphoric acid and water to selectively remove the hafnium aluminum oxide and DARC layers at a rate greater than the silicon oxide. 15. The method of claim 14, wherein the hafnium aluminum oxide layer is formed by atomic layer deposition, and the hafnium aluminum oxide material has a Hf:Al ratio of about 20:1 to about 4:1. 16. A method of forming a semiconductor device, comprising: etching hafnium aluminum oxide and DARC layers through a patterned photoresist layer to expose a silicon oxide layer, the DARC layer overlying and in contact with the hafnium aluminum oxide layer;etching the silicon oxide layer to form an opening extending to an underlying substrate;removing the patterned photoresist layer to expose the DARC layer; andapplying an etchant solution consisting essentially of phosphoric acid and water to selectively remove the hafnium aluminum oxide and DARC layers at a rate greater than the silicon oxide. 17. A method of etching a DARC material and a hafnium aluminum oxide material in the presence of exposed silicon oxide material, the DARC material overlying and in contact with the hafnium aluminum oxide material, the method comprising: applying an etchant solution to the DARC material and the hafnium aluminum oxide material to selectively etch the DARC material and the hafnium aluminum oxide material at a rate greater than the silicon oxide material;wherein the etchant solution consists of phosphoric acid, water and a pH modifying acid. 18. The method of claim 17, wherein the pH modifying acid is selected from the group consisting of HCl, H2SO4, HNO3, HCOOH and CH3COOH. 19. The method of claim 17, wherein the phosphoric acid and water are at a ratio of about 50:50 to about 90:10 (v/v) based on the total volume of the etchant solution. 20. A method of etching a DARC material and hafnium aluminum oxide material in the presence of exposed silicon oxide material, the DARC material overlying and in contact with the hafnium aluminum oxide material, the method comprising: applying an etchant solution to the DARC material and the hafnium aluminum oxide material to etch the DARC and hafnium aluminum oxide materials at a rate greater than the silicon oxide material;wherein the etchant solution consists essentially of phosphoric acid, water and a pH modifying acid. 21. A method of forming a semiconductor device, comprising: etching a hafnium aluminum oxide layer and DARC layer through a patterned photoresist mask to expose a silicon oxide layer, the DARC layer overlying and in contact with the hafnium aluminum oxide layer;etching the silicon oxide layer to form an opening extending to a substrate;removing the patterned photoresist mask to expose the DARC layer; andapplying an etchant solution consisting essentially of phosphoric acid, water and a pH modifying acid to selectively etch the hafnium aluminum oxide and DARC layers at a rate greater than the silicon oxide. 22. The method of claim 21, further comprising, prior to etching the hafnium aluminum oxide and DARC layers, forming the hafnium aluminum oxide layer over the silicon oxide layer;forming the DARC layer over and in contact with the hafnium aluminum oxide layer; andforming the patterned photoresist mask over the DARC layer to expose the DARC layer.