The invention provides a highly reliable plasma processing apparatus having stable sealing performance. The vacuum processing apparatus comprises a vacuum vessel having its inside decompressed; an opening disposed in a wall of the vacuum vessel for communicating the inside with the outside thereof a
The invention provides a highly reliable plasma processing apparatus having stable sealing performance. The vacuum processing apparatus comprises a vacuum vessel having its inside decompressed; an opening disposed in a wall of the vacuum vessel for communicating the inside with the outside thereof and through which a sample to be processed is taken in and out; a valve body 701 disposed outside the wall for airtightly sealing or opening the opening; and a drive unit for driving the valve body to carry out the sealing or opening operation, the drive unit comprising a first member 705 coupled to an actuator 702 that moves along a substantially linear first direction as a result of operation of the actuator, a second member 706 coupled to the first member 705 that moves along a substantially linear second direction that intersects with the first direction, and the valve body 701 coupled to the second member that seals the opening as a result of the movement of the second member.
대표청구항▼
1. A valve body disposed outside a chamber, which opens and closes sealing airtightly an opening of the chamber, said opening being disposed on a wall of the chamber, comprising: a base body which moves with respect to an outer wall surface of the chamber, disposed in a periphery of the opening acco
1. A valve body disposed outside a chamber, which opens and closes sealing airtightly an opening of the chamber, said opening being disposed on a wall of the chamber, comprising: a base body which moves with respect to an outer wall surface of the chamber, disposed in a periphery of the opening according to operations of opening and closing the opening of the chamber;a seal member disposed on a surface of the base body opposing to the outer wall surface of the chamber, which comes into contact with the outer wall surrounding the opening and seals airtightly between the inside and outside of the chamber by contact when the valve body seals the opening, the seal member being comprised of an elastic material; anda cover detachably disposed in an inner periphery of the seal member on the surface of the base body, which presses at least a portion of the seal member to the surface of the base body and determines the position of the seal member,wherein the seal member further comprises:a first seal portion which is disposed in an outer periphery of the cover and surrounds the same, having a projection having a projected curved surface that is sandwiched between the outer wall surface of the chamber and the base body and comes into contact with the outer wall surface to seal airtightly between the inside and the outside of the chamber;an overhang extending towards an inner side of the seal member from the first seal portion, which is engaged with and pressed onto the surface of the base body by the cover when the cover is disposed on the surface of the base body, the overhang including a second seal portion which is sandwiched between the surface of the base body and the cover that is disposed on the surface of the base body andsealing airtightly the inside and the outside of the opening of the chamber when the valve body closes the opening. 2. The valve body according to claim 1, wherein the second seal portion is disposed in an inner circumference portion of the seal member and comes into contact with the surface of the cover by the press of the cover on the base body and sealing the inside and the outside of the opening of the chamber. 3. The valve body according to claim 1, further comprising either a substantially flat surface or a smooth curved surface on the surface of the base body opposing to the outer wall surface of the chamber, and the seal member further comprises either a flat surface or a smooth curved surface at a side facing and coming into contact with the base body surface which is either substantially flat or smooth curved. 4. The valve body according to claim 1, wherein the second seal portion is disposed in an inner circumference portion of the seal member and comes into contact with the surface of the cover by the press of the cover on the base body and sealing the inside and the outside of the opening of the chamber, and the valve body further comprises either a substantially flat surface or a smooth curved surface on the surface of the base body opposing to the outer wall surface of the chamber, and the seal member further comprises either a flat surface or a smooth curved surface at a side facing and coming into contact with the base body surface which is either substantially flat or smooth curved. 5. The valve body according to claim 1, wherein the second seal portion further comprises another projection having a projected curved surface which comes into contact with the cover by the press of the cover on the base body and sealing the inside and the outside of the chamber. 6. The valve body according to claim 1, wherein the cover further comprises a projection which is entered into the opening and a surface of which constitutes a substantially equal plane with an inner wall surface of the chamber when the opening is sealed by the valve body. 7. The valve body according to claim 1, wherein the second seal portion further comprises another projection having a projected curved surface which comes into contact with the cover by the press of the cover on the base body and sealing the inside and the outside of the chamber, and the cover further comprises a projection which is entered into the opening and a surface of which constitutes a substantially equal plane with an inner wall surface of the chamber when the opening is sealed by the valve body. 8. The valve body according to claim 1, wherein the cover includes a surface closest to the base body, the base body extending over an entirety of said surface of the cover closest thereto. 9. A valve body disposed outside a chamber, which opens and closes sealing airtightly an opening of the chamber, disposed on a wall of the chamber, comprising: a base body which has either a substantially flat or a smooth curved surface which corresponds to an outer wall surface of the chamber at an outer periphery of the opening and moves with respect to the outer wall surface according to operations of opening and closing the opening of the chamber;a seal member which is constituted by an elastic material and is detachably disposed on the substantially flat or smooth curved surface of the base body, the seal member being annularly shaped and having a central side opening in its central part, the seal member coming into contact with an outer surface of the wall surrounding the opening of the chamber and sealing between the inside and the outside of the opening when the valve body seals the opening;a cover attached in a detachable manner on the substantially flat or smooth curved surface of the base body and disposed in a central side opening of the seal member, the cover engaging and holding the seal member to determine a position of the seal member on the substantially flat or smooth curved surface of the base body, the seal member being disposed in an outer periphery of the cover and surrounding the outer periphery on the substantially flat or smooth curved surface of the base body;the seal member further comprising:(1) a first seal portion which is disposed in an outer periphery portion of the seal member and which is a projection having a projected curved surface that is sandwiched between the outer surface of the wall and the base body and comes into contact with the outer surface of the wall to seal airtightly between the inside and the outside of the chamber, and a substantially flat or smooth curved surface portion which is disposed on an opposite surface to the projection of the first seal portion and comes into contact with the substantially flat or smooth curved surface of the base body;(2) a second seal portion which is disposed in a central side of the first seal portion, and(3) a central seal portion, between the first seal portion and the second seal portion and which is engaged with an outer periphery portion of the cover when the cover is attached on the base body, the second seal portion of the seal member being sandwiched between an outer portion of the cover and the base body to seal between a central side of the base body and the surface of the cover in the outer periphery portion of the cover. 10. The valve body according to claim 9, further comprising a connecting member penetrating the valve body, which joins the cover to the valve body. 11. The valve body according to claim 9, wherein the cover is attached so as to be disposed on the substantially flat or smooth curved surface of the base body, so as to press the seal member toward the substantially flat or smooth curved surface of the base body. 12. The valve body according to claim 9, wherein the second seal portion is disposed in an inner circumference portion of the seal member. 13. The valve body according to claim 9, wherein the cover presses the central seal portion between the first seal portion and the second seal portion of the seal member. 14. The valve body according to claim 9, wherein the central seal portion of the seal member comprises a dent disposed between the first seal portion and the second seal portion, and the cover presses the dent toward the substantially flat or smooth curved surface of the base body. 15. The valve body according to claim 14, wherein the cover has a projection disposed at an outer portion thereof, which presses the dent of the seal member. 16. The valve body according to claim 15, wherein the seal member comprises an inner projection, a surface of which comprises the second seal portion contacting the surface of the cover. 17. The valve body according to claim 9, wherein the cover includes a surface closest to the base body, the base body extending over an entirety of said surface of the cover closest thereto. 18. The valve body according to claim 9, wherein the base body has the smooth curved surface.
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