A diamond-like carbon film for sliding parts which is applied to the sliding surface of sliding parts, the diamond-like carbon film including at least two layers, one being a lower layer of diamond-like carbon (referred to as DLC hereinafter) and the other being an upper layer of DLC placed thereon,
A diamond-like carbon film for sliding parts which is applied to the sliding surface of sliding parts, the diamond-like carbon film including at least two layers, one being a lower layer of diamond-like carbon (referred to as DLC hereinafter) and the other being an upper layer of DLC placed thereon, wherein the lower layer has a hardness no lower than 20 GPa and no higher than 45 GPa, a Young's modulus no lower than 250 GPa and no higher than 450 GPa, and a thickness no smaller than 0.2 μm and no larger than 4.0 μm, and the upper layer has a hardness no lower than 5 GPa and lower than 20 GPa, a Young's modulus no lower than 60 GPa and no higher than 240 GPa, and a thickness no smaller than 1.0 μm and no larger than 10 μm. The diamond-like carbon film has both good durability and low frictional coefficient.
대표청구항▼
1. A diamond-like carbon film comprising at least two layers, one layer being a lower layer of diamond-like carbon closest to a substrate and the other layer being an upper layer of diamond-like carbon placed on the lower layer and being further from the substrate, wherein the lower layer is formed
1. A diamond-like carbon film comprising at least two layers, one layer being a lower layer of diamond-like carbon closest to a substrate and the other layer being an upper layer of diamond-like carbon placed on the lower layer and being further from the substrate, wherein the lower layer is formed by physical vapor deposition and has a hardness no lower than 20 GPa and no higher than 45 GPa,a Young's modulus no lower than 250 GPa and no higher than 450 GPa, anda thickness no smaller than 0.2 μm and no larger than 4.0 μm, andthe upper layer is formed by chemical vapor deposition and has a hardness no lower than 5 GPa and lower than 20 GPa,a Young's modulus no lower than 60 GPa and no higher than 240 GPa, anda thickness no smaller than 1.0 μm and no larger than 10 μm,and wherein said diamond-like carbon film has a plastic deformation under a load of 1000 mN of 1.58-1.87 μm. 2. A sliding part having its sliding surface coated with the diamond-like carbon film of claim 1. 3. A method for producing the sliding part according to claim 2, said method comprising forming on a sliding surface the lower layer of diamond-like carbon by physical vapor deposition and forming thereon the upper layer of diamond-like carbon by chemical vapor deposition. 4. The method for producing the sliding part according to claim 3, wherein the formation of the lower layer and the upper layer is performed continuously and in a same chamber. 5. The diamond-like carbon film according to claim 1, wherein the lower layer has a hardness no lower than 20 GPa and no higher than 40 GPa,a Young's modulus no lower than 250 GPa and no higher than 400 GPa, anda thickness no smaller than 0.3 μm and no larger than 3.5 μm, andthe upper layer has a hardness no lower than 10 GPa and no higher than 18 GPa,a Young's modulus no lower than 120 GPa and no higher than 230 GPa, anda thickness no smaller than 2.0 μm and no larger than 8 μm. 6. The diamond-like carbon film according to claim 1, wherein the film further comprises a third layer placed on the surface of the upper layer that is further from the substrate, said third layer having a hardness lower than that of the upper layer. 7. The diamond-like carbon film according to claim 1, wherein the film further comprises an intermediate layer between the lower layer and the substrate, said intermediate layer being formed from any of Cr, Ti, V, W, C and compounds thereof. 8. The diamond-like carbon film according to claim 1, wherein the formation of the lower layer and the upper layer is performed continuously and in a same chamber. 9. The diamond-like carbon film according to claim 1, wherein said diamond-like carbon film has a plastic deformation under a load of 1000 mN of 1.58-1.69 μm. 10. A method for producing the diamond-like carbon film according to claim 1, said method comprising forming on a siding part the lower layer of diamond-like carbon by physical vapor deposition and forming thereon the upper layer of diamond-like carbon by chemical vapor deposition. 11. The method for producing the diamond-like carbon film according to claim 10, wherein the formation of the lower layer and the upper layer is performed continuously and in a same chamber.
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이 특허에 인용된 특허 (8)
Veerasamy Vijayen S. ; Petrmichl Rudolph Hugo ; Thomsen Scott V., Coated article including a DLC inclusive layer(s) and a layer(s) deposited using siloxane gas, and corresponding method.
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