A pump for one or more different process fluids is provided including a pumping chamber having a process fluid inlet and outlet coupled to a process fluid valve on each pumping chamber for selectively preventing and allowing flow of process fluid through the pumping chamber. An actuation mechanism f
A pump for one or more different process fluids is provided including a pumping chamber having a process fluid inlet and outlet coupled to a process fluid valve on each pumping chamber for selectively preventing and allowing flow of process fluid through the pumping chamber. An actuation mechanism for pumping actuating fluid to actuating fluid chambers is provided that is in communication with the actuating fluid chambers to permit flow into each actuating fluid chamber of incompressible actuating fluid. A diaphragm separates each pumping chamber from an associated actuating fluid chamber for separating process fluid from actuating fluid. The actuation mechanism is removable by a quick disconnect that provides for disconnection of the activation mechanism without affecting process fluid. Operation of the actuation mechanism to displace actuating fluid causes actuating fluid to flow only into each actuating fluid chamber having an opened process fluid valve, resulting in pumping.
대표청구항▼
1. A pump for use in handling one or more different process fluids, comprising: a plurality of pumping chambers, each pumping chamber adapted to independently pump one of the plurality of different process fluids, each pumping chamber including a process fluid inlet and a process fluid outlet, and a
1. A pump for use in handling one or more different process fluids, comprising: a plurality of pumping chambers, each pumping chamber adapted to independently pump one of the plurality of different process fluids, each pumping chamber including a process fluid inlet and a process fluid outlet, and a process fluid valve associated with each pumping chamber, the process fluid outlet coupled to the process fluid valve for selectively preventing and allowing the flow of process fluid through the pumping chamber;an actuation mechanism for selectively pumping substantially incompressible actuating fluid to and from a plurality of actuating fluid chambers, wherein the actuation mechanism is in fluid communication with the plurality of actuating fluid chambers, the actuation mechanism selectively actuatable in a first direction to force actuating fluid into one of the plurality of actuating fluid chambers when dispensing one of the plurality of different process fluids and selectively actuatable in a second direction to draw actuating fluid out of one of the plurality of actuating fluid chambers thereby drawing one of the plurality of different process fluids into one of the plurality of pumping chambers, wherein the actuating fluid is in a closed system such that substantially no actuating fluid is removed from the system;at least one diaphragm separating each pumping chamber from an associated actuating fluid chamber, for separating process fluid from actuating fluid;wherein the actuation mechanism is removable by a quick disconnect connection that provides for disconnection of the actuation mechanism without affecting process fluid in the process fluid inlet, process fluid outlet, process fluid valve, or process fluid in each pumping chamber, wherein the actuation mechanism comprises a piston translated by a screw turned by a motor;whereby operation of the actuation mechanism to displace actuating fluid causes actuating fluid to flow only into each of the plurality of actuating fluid chambers having an opened process fluid valve, resulting in pumping of process fluid. 2. The pump of claim 1, wherein the actuation mechanism is mounted within a body, and each of the plurality of pumping chambers is at least partially formed by a removable pump head structure supported on the body. 3. The pump of claim 1, further comprising a plurality of pump head structures, the plurality of pump head structures being arrayed around the body. 4. The pump of claim 1, including a plurality of isolation valves, each isolation valve located between the actuating mechanism and one of the plurality of actuating fluid chambers for selectively preventing and allowing the flow of actuating fluid between the actuating mechanism and one or more selected actuating fluid chambers. 5. The pump of claim 4, wherein each isolation valve is a proportional control valve to enable dispensing out of more than one pumping head simultaneously, at least one flow rate using only one actuating mechanism. 6. A pump for use in handling one or more different process fluids, comprising: a plurality of pumping chambers and a like plurality of actuating fluid chambers, forming a plurality of pairs of pumping chambers and actuating fluid chambers, each pair having one of the pumping chambers adjacent one of the actuating fluid chambers, each pumping chamber including at least one process fluid inlet and at least one process fluid outlet, and at least one process fluid valve associated with each pumping chamber, the at least one process fluid outlet on each pumping chamber coupled to at least one process fluid valve associated with each pumping chamber for selectively preventing and allowing the flow of process fluid through the pumping chamber;an actuation mechanism for selectively pumping substantially incompressible actuating fluid to and from a plurality of actuating fluid chambers, wherein the actuation mechanism is in fluid communication with the plurality of actuating fluid chambers, the actuation mechanism selectively actuatable in a first direction to force actuating fluid into one of the plurality of actuating fluid chambers when dispensing one of the plurality of different process fluids and selectively actuatable in a second direction to draw actuating fluid out of one of the plurality of actuating fluid chambers thereby drawing one of the plurality of different process fluids into one of the plurality of pumping chambers, wherein the actuating fluid is in a closed system such that substantially no actuating fluid is removed from the system; wherein the actuation mechanism is removable by a quick disconnect connection that provides for disconnection of the actuation mechanism without affecting process fluid in the process fluid inlet, process fluid outlet, process fluid valve, or process fluid in each pumping chamber, wherein the actuation mechanism comprises a piston translated by a screw turned by a motor;a diaphragm associated with each pair, located between each pumping chamber and actuating fluid chamber, for separating process fluid from actuating fluid;each actuating fluid chamber in fluid communication with the actuation mechanism permitting flow into the actuating fluid chamber of actuating fluid;whereby operation of the actuation mechanism to displace actuating fluid causes actuating fluid to flow only into each of the plurality of actuating fluid chambers having an opened process fluid valve, resulting in pumping of process fluid. 7. The pump of claim 6, wherein unrestricted flow of actuating fluid from any actuating fluid chamber into the actuation mechanism is provided. 8. The pump of claim 6, wherein the actuation mechanism is mounted within a body, and each of the plurality of pumping chambers is at least partially formed by a removable pump head structure supported on the body. 9. The pump of claim 6, further comprising a plurality of pump head structures, the plurality of pump head structures being arrayed around the body. 10. The pump of claim 6, comprised of a plurality of actuation mechanisms, wherein a number of the plurality of pumping chambers exceeds a number of the actuation mechanisms. 11. The pump of claim 6, including a plurality of isolation valves, each isolation valve located between the actuating mechanism and one of the plurality of actuating fluid chambers for selectively preventing and allowing the flow of actuating fluid between the actuating mechanism and one or more selected actuating fluid chambers. 12. The pump of claim 11, wherein each isolation valve is a proportional control valve to enable dispensing out of more than one pumping head simultaneously, at least one flow rate using only one actuating mechanism. 13. A pump for use in handling one or more different process fluids comprising: an actuation mechanism for pumping actuating fluid, wherein the actuation mechanism is removable by a quick disconnect connection that provides for disconnection of the activation mechanism without affecting process fluid in the process fluid inlet, process fluid outlet, process fluid valve, or process fluid in each pumping chamber, wherein the actuation mechanism is comprised of a piston translated by a screw turned by a stepper motor;a plurality of pumping chambers and a like plurality of actuating fluid chambers, forming a plurality of pairs, each pair having one of the pumping chambers adjacent one of the actuating fluid chambers, each pumping chamber including at least one process fluid inlet and at least one process fluid outlet;a diaphragm associated with each pair, located between the pumping chamber and actuating fluid chamber, for separating process fluid from actuating fluid;each actuating fluid chamber in fluid communication with the actuation mechanism to provide for flow into each actuating fluid chamber of substantially incompressible actuating fluid;the process fluid inlet on a first one of the pumping chambers in communication with a source of process fluid, the process fluid outlet on the first one of the pumping chambers in communication with the process fluid inlet on a second one of the pumping chambers, the process fluid outlet on the second one of the pumping chambers in fluid communication with a dispense point;each pumping chamber coupled to at least one process fluid valve on each pumping chamber for selectively preventing and allowing the flow of process fluid through the pumping chamber;whereby operation of the actuation mechanism to displace actuating fluid causes actuating fluid to flow only into each of the plurality of actuating fluid chambers having an opened process fluid valve, resulting in pumping process fluid. 14. The pump of claim 13, including a valve between the actuating mechanism and the actuating fluid chamber in the first one of the pumping chambers and a valve between the actuating mechanism and an inlet of the actuating fluid chamber in the second one of pumping chambers. 15. The pump of claim 13, including a valve between an outlet of the actuating fluid chamber in the first one of the pumping chambers and a fluid treatment unit. 16. The pump of claim 13, further comprising a one-way check valve coupled with the process fluid outlet of each of the plurality of pumping chambers for allowing fluid to flow only in one direction out of the pumping chamber, and a one-way check valve coupled with the process fluid inlet of each of the plurality of pumping chambers for allowing fluid to flow only in one direction into the pumping chamber. 17. The pump of claim 13, wherein the actuation mechanism is mounted within a body, and each of the plurality of pumping chambers is at least partially formed on the body. 18. The pump of claim 13, further comprising a plurality of pump head structures, the plurality of pump head structures being arrayed around the body. 19. The pump of claim 13, further comprising a plurality of pump head structures, the pump head structures being remote from the body. 20. The pump of claim 13 comprised of a plurality of actuation mechanisms, wherein a number of the plurality of pumping chambers exceeds a number of the actuation mechanisms and wherein each of the actuation mechanisms is removable by a quick disconnect connection that provides for disconnection of the activation mechanism. 21. The pump of claim 13, including a plurality of isolation valves, each isolation valve located between the actuating mechanism and one of the plurality of actuating fluid chambers for selectively preventing and allowing the flow of actuating fluid between the actuating mechanism and one or more selected actuating fluid chambers. 22. The pump of claim 21, wherein each isolation valve is a proportional control valve to enable dispensing out of more than one pumping head simultaneously, at least one flow rate using a single one of the actuating mechanism. 23. A pump for use in handling one or more different process fluids, comprising: a plurality of pumping chambers, each pumping chamber adapted to independently pump one of the plurality of different process fluids, each pumping chamber including a process fluid inlet and a process fluid outlet, and a process fluid valve associated with each pumping chamber, the process fluid outlet coupled to the process fluid valve for selectively preventing and allowing the flow of process fluid through the pumping chamber;an actuation mechanism for selectively pumping substantially incompressible actuating fluid to and from a plurality of actuating fluid chambers, wherein the actuation mechanism is in fluid communication with the plurality of actuating fluid chambers, the actuation mechanism selectively actuatable in a first direction to force actuating fluid into one of the plurality of actuating fluid chambers when dispensing one of the plurality of different process fluids and selectively actuatable in a second direction to draw actuating fluid out of one of the plurality of actuating fluid chambers thereby drawing one of the plurality of different process fluids into one of the plurality of pumping chambers, wherein the actuating fluid is in a closed system such that substantially no actuating fluid is removed from the system, wherein the actuation mechanism is comprised of a piston translated by a screw turned by a stepper motor;at least one diaphragm separating each pumping chamber from an associated actuating fluid chamber, for separating process fluid from actuating fluid;a plurality of isolation valves, each isolation valve for selectively preventing and allowing the flow of actuating fluid;whereby operation of the actuation mechanism to displace actuating fluid causes actuating fluid to flow only into each of the plurality of actuating fluid chambers having an opened process fluid valve, resulting in pumping of process fluid. 24. The pump of claim 23, wherein the actuation mechanism is mounted within a body, and each of the plurality of pumping chambers is at least partially formed by a removable pump head structure supported on the body. 25. The pump of claim 23, further comprising a plurality of pump head structures, the plurality of pump head structures being arrayed around the body. 26. The pump of claim 23, wherein each isolation valve is a proportional control valve to enable dispensing out of more than one pumping head simultaneously, at least one flow rate using only one actuating mechanism.
연구과제 타임라인
LOADING...
LOADING...
LOADING...
LOADING...
LOADING...
이 특허에 인용된 특허 (31)
Gibson Gregory M., Apparatus and method for pumping high viscosity fluid.
Bowers William F. (Topsfield MA) Hunt Stephen G. (N. Billerica MA), Integrated system for filtering and dispensing fluid having fill, dispense and bubble purge strokes.
Hayes William F. (Gloucester CAX) Tanney ; deceased John W. (Nepean CAX by Dorothy Tanney ; legal representative), Primary fluid actuated, secondary fluid propelling system.
Manzarek, Donovan K.; Vines, John C.; Laessle, John, Apparatus and method for the remote monitoring, viewing and control of a semiconductor process tool.
Vines, John C.; Laessle, John, Pump having an automated gas removal and fluid recovery system and method using a gas removal reservoir having an internal partition.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.