초록 ▼

A cassette for accommodating substrates may include a cassette body for accommodating the substrates; a door for selectively sealing the cassette body; magnetic units for primarily coupling the door to the cassette body; and latch units for secondarily coupling the door to the cassette body. Since t

A cassette for accommodating substrates may include a cassette body for accommodating the substrates; a door for selectively sealing the cassette body; magnetic units for primarily coupling the door to the cassette body; and latch units for secondarily coupling the door to the cassette body. Since the door completely contacts the cassette body, penetration of a contamination source from an external environment may be fundamentally prevented. Also, since the door is double coupled to the cassette body by the magnetic units and the latch units, firm coupling may be achieved.

대표청구항 ▼

1. A cassette for accommodating a plurality of substrates, the cassette comprising: a cassette body for accommodating the substrates;a door for selectively sealing the cassette body, and a front surface of the door comprising at least one alignment hole into which at least one alignment pin of an ex

1. A cassette for accommodating a plurality of substrates, the cassette comprising: a cassette body for accommodating the substrates;a door for selectively sealing the cassette body, and a front surface of the door comprising at least one alignment hole into which at least one alignment pin of an external tool for selectively opening and closing the door with respect to the cassette body is inserted to align the external tool on the door;magnetic units for primarily coupling the door to the cassette body; andlatch units for secondarily coupling the door to the cassette body. 2. The cassette of claim 1, wherein the cassette body forms a framed structure in which a plurality of frames are connected in a box shape, and wherein cover plates are coupled onto the frames. 3. The cassette of claim 2, further comprising a plurality of supporting units formed in the cassette body for supporting the substrates which are vertically stacked, wherein the plurality of supporting units extend from a rear side of the cassette body toward an opening of the cassette body so as to cross an inner space of the cassette body; said cassette further comprising seats for supporting side edges of the substrates protrude from side frames of the cassette body. 4. The cassette of claim 3, further comprising back stoppers connected to the frames at the rear side of the cassette body for supporting rear edges of the substrates. 5. The cassette of claim 1, wherein a sealant is formed along edges of the door facing an opening of the cassette body. 6. The cassette of claim 1, wherein the magnetic units comprise: at least one magnet formed in the door or the cassette body; andconductive plates formed in one of the cassette body and the door, and coupled to said at least one magnet due to a magnetic force. 7. The cassette of claim 6, wherein said at least one magnet is formed along edges of the door facing an opening of the cassette body; and wherein the conductive plates are formed around an opening of the cassette body so as to correspond to said at least one magnet. 8. The cassette of claim 7, further comprising magnet retainers formed outside said at least one magnet to surround at least portions of said at least one magnet. 9. The cassette of claim 1, wherein each of the latch units comprises a latch pin inserted into a door guide groove formed in door frames, and rectilinearly reciprocating toward and away from the cassette body. 10. The cassette of claim 9, wherein the latch pin comprises: a body unit selectively coupled to a latch pin coupling recess formed in the cassette body; anda pin unit formed at one end of the body unit and having a latch pin hole into which a pin of an external tool is inserted to rectilinearly reciprocate the latch pin. 11. The cassette of claim 10, wherein each of the latch units further comprises a position fixing unit for controlling motion of the latch pin. 12. The cassette of claim 11, wherein the position fixing unit comprises: a locking recess formed around the body unit of the latch pin; anda locking unit formed in the door frames and selectively coupled to the locking recess so as to fix a position of the latch pin after the latch pin moves. 13. The cassette of claim 12, wherein the locking unit comprises: a spring formed in a recess formed in the door frames; anda locking ball formed on the spring and selectively coupled to the locking recess. 14. The cassette of claim 12, wherein the locking recess and the locking unit are respectively formed in the body unit of the latch pin and in the door frames at positions where the latch pin is prevented from being replaced after the latch pin is coupled to the latch pin coupling recess. 15. The cassette of claim 12, wherein an entrance of the locking recess is curved. 16. The cassette of claim 10, wherein an open hole for inserting the pin of the external tool into the latch pin hole so as to rectilinearly move the latch pin is formed in a front surface of the door facing an opening of the cassette body. 17. The cassette of claim 10, further comprising at least one latch pin guide formed around the latch pin in the door guide groove of the door frames for preventing the latch pin from rattling when the latch pin moves. 18. The cassette of claim 17, wherein said at least one latch pin guide is formed of polymer resin. 19. The cassette of claim 1, wherein said at least one alignment hole has a size sufficient to insert said at least one alignment pin of the external tool in a thickness direction of the door. 20. The cassette of claim 1, wherein said at least one alignment hole is formed along a diagonal direction in the front surface of the door. 21. The cassette of claim 1, further comprising gas filtering units formed in the door for controlling internal pressure of the sealed cassette body. 22. The cassette of claim 1, further comprising at least one corner guide unit formed and spaced apart from each other along edges of the door facing an opening of the cassette body for allowing appropriate coupling of the door to the cassette body. 23. The cassette of claim 22, wherein portions of said at least one corner guide unit adjacent to the opening of the cassette body is tapered. 24. The cassette of claim 1, wherein regions vacuum-sucked by an external tool are formed on a front surface of the door. 25. The cassette of claim 1, wherein a sealant is formed along edges of an opening of the cassette body. 26. The cassette of claim 1, further comprising overhead hoist transport (OHT) grips formed on an upper surface of the cassette body for transporting the cassette.