IPC분류정보
국가/구분 |
United States(US) Patent
등록
|
국제특허분류(IPC7판) |
|
출원번호 |
US-0744142
(2007-05-03)
|
등록번호 |
US-8357999
(2013-01-22)
|
발명자
/ 주소 |
- Robinson, Marc E.
- Vindasius, Alfons
- Almen, Donald
- Jacobsen, Larry
|
출원인 / 주소 |
- Vertical Circuits (Assignment for the Benefit of Creditors), LLC
|
인용정보 |
피인용 횟수 :
13 인용 특허 :
108 |
초록
▼
The present invention provides an apparatus for vertically interconnecting semiconductor die, integrated circuit die, or multiple die segments. Metal rerouting interconnects which extend to one or more sides of the die or segment can be optionally added to the die or multi die segment to provide edg
The present invention provides an apparatus for vertically interconnecting semiconductor die, integrated circuit die, or multiple die segments. Metal rerouting interconnects which extend to one or more sides of the die or segment can be optionally added to the die or multi die segment to provide edge bonding pads upon the surface of the die for external electrical connection points. After the metal rerouting interconnect has been added to the die on the wafer, the wafer is optionally thinned and each die or multiple die segment is singulated from the wafer by cutting or other appropriate singulation method. After the die or multiple die segments are singulated or cut from the wafer, insulation is applied to all surfaces of the die or multiple die segments, openings are made in the insulation above the desired electrical connection pads, and the die or multiple die segments are placed on top of one another to form a stack. Vertically adjacent segments in the stack are electrically interconnected by attaching a short flexible bond wire or bond ribbon to the exposed electrical connection pad at the peripheral edges of the die which protrudes horizontally from the die and applying electrically conductive polymer, or epoxy, filaments or lines to one or more sides of the stack.
대표청구항
▼
1. A semiconductor die assembly, comprising a die stack comprising a first die mounted on a substrate and at least one additional die stacked over said first die mounted on said substrate, said first die and each said additional die having a plurality of peripheral electrical connection arrayed in a
1. A semiconductor die assembly, comprising a die stack comprising a first die mounted on a substrate and at least one additional die stacked over said first die mounted on said substrate, said first die and each said additional die having a plurality of peripheral electrical connection arrayed in a row near and generally parallel to a peripheral edge of said die, and a conducting element electrically connected to at least one of said peripheral electrical connection sites on at least one of said die and extending from said at least one peripheral electrical connection site toward said peripheral die edge on said at least one of said die;and the substrate having an electrical connection land at a die mount side thereof, whereinsaid at least one of said peripheral electrical connection sites is electrically connected to said electrical connection land on said substrate by an electrically conductive polymer element applied to a side of said die stack adjacent said peripheral die edge, said electrically conductive polymer element contacting said conducting element and being electrically connected to said land. 2. The assembly of claim 1 wherein said conducting element extends into the electrically conductive polymer element. 3. The assembly of claim 1, said additional die and said first die mounted on said substrate comprising a plurality of die; wherein said at least one interconnection site on at least a first one of said plurality of die is electrically connected to said at least one interconnection site on at least a second one of said plurality of die by an electrically conductive polymer element applied to a side of said die stack adjacent said peripheral edge, said electrically conductive polymer element contacting a said conducting element electrically connected to said at least one interconnection site on each of said plurality of die. 4. The assembly of claim 1 wherein said peripheral interconnection site on any one of more of said die comprises an original peripheral die pad. 5. The assembly of claim 1 wherein any one of more of said die is rerouted to connect original die pads to peripheral interconnection sites. 6. The assembly of claim 1, further comprising an electrical insulator between any one of more of said die and the electrically conductive polymer element. 7. The assembly of claim 6 wherein the electrical insulator comprises a conformal coating. 8. The assembly of claim 7 wherein the insulating coating has openings above selected ones of the interconnection sites. 9. The assembly of claim 7 wherein the conformal coating comprises a polymer. 10. The assembly of claim 9 wherein the conformal coating comprises parylene. 11. The assembly of claim 1 wherein the electrically conductive polymer element comprises a filament. 12. The assembly of claim 1 wherein the electrically conductive polymer element comprises a line. 13. The assembly of claim 1 wherein the electrically conductive polymer element is oriented generally perpendicular to the die mount side of the substrate. 14. The assembly of claim 1 wherein the electrically conductive polymer element comprises a conductive epoxy. 15. The assembly of claim 1 wherein the electrically conductive polymer element comprises a filled epoxy. 16. The assembly of claim 1 wherein the electrically conductive polymer element comprises a silver filled epoxy. 17. The assembly of claim 1 wherein the electrically conductive polymer element comprises a gold filled epoxy. 18. The assembly of claim 1 wherein adjacent die in the stack are laminated one to another using an electrically insulating material. 19. The assembly of claim 18 wherein the electrically insulating material comprises a thermally conductive material. 20. The assembly of claim 18 wherein the electrically insulating material comprises a polymer. 21. The assembly of claim 18 wherein the electrically insulating material comprises an epoxy. 22. The assembly of claim 18 wherein the electrically insulating material comprises an epoxy preform. 23. The assembly of claim 18 wherein the electrically insulating material includes spacers. 24. The assembly of claim 18 wherein the electrically insulating material includes spherical spacers. 25. The assembly of claim 23 wherein the spacers comprise one of: glass, ceramic, plastic, Teflon, a polymer, quartz, and combinations thereof. 26. The assembly of claim 20 wherein the electrically insulating material further comprises spacers. 27. The assembly of claim 26 wherein the spacers comprise spheres. 28. The assembly of claim 26 wherein the spacers comprise one of: glass, ceramic, plastic, Teflon, a polymer, quartz, and combinations thereof. 29. The assembly of claim 21 wherein the electrically insulating material further comprises spacers. 30. The assembly of claim 29 wherein the spacers comprise spheres. 31. The assembly of claim 30 wherein the spacers comprise one of: glass, ceramic, plastic, Teflon, a polymer, quartz, and combinations thereof. 32. The assembly of claim 30 wherein the epoxy preform comprises spacers. 33. The assembly of claim 32 wherein the spacers comprise spheres. 34. The assembly of claim 33 wherein the spacers comprise one of: glass, ceramic, plastic, Teflon, a polymer, quartz, and combinations thereof. 35. The assembly of claim 1 wherein said conducting element comprises a bond wire. 36. The assembly of claim 1 wherein said conducting element comprises a bond ribbon. 37. The assembly of claim 1 wherein said conducting element comprises a metal. 38. The assembly of claim 1 wherein said conducting element comprises one of gold, aluminum, copper and palladium, and a combination thereof. 39. The assembly of claim 1 wherein said electrically conductive polymer element is connected to said substrate by an electrically conductive material between said electrically conductive polymer element and substrate. 40. The assembly of claim 39 wherein said electrically conductive material comprises an electrically conductive polymer. 41. The assembly of claim 1, further comprising an underfill between said first die and said substrate. 42. The assembly of claim 41 wherein the underfill comprises an electrically insulating material. 43. The assembly of claim 3 wherein said electrically conductive polymer element is connected to said substrate by an electrically conductive material between said electrically conductive polymer element and said substrate. 44. The assembly of claim 43 wherein said electrically conductive material comprises an electrically conductible polymer. 45. The assembly of claim 3 further comprising an underfill between said first die and said substrate. 46. The assembly of claim 45 wherein the underfill comprises an electrically insulating material. 47. The assembly of claim 1 wherein said first die is affixed to said substrate using an adhesive. 48. The assembly of claim 1 wherein said first die is affixed to said substrate using an electrically insulating adhesive. 49. The assembly of claim 1 wherein said die stack is affixed to said substrate using an adhesive. 50. The assembly of claim 1 wherein said die stack is affixed to said substrate using an electrically insulating adhesive. 51. The assembly of claim 1 wherein said substrate comprises at least one electrically conductive layer and at least one dielectric layer. 52. The assembly of claim 1 wherein said substrate comprises a multi-layer substrate. 53. The assembly of claim 1 wherein said substrate comprises a least two electrically conductive layers and at least one insulating layer. 54. The assembly of claim 52 wherein said substrate comprises a ground plane. 55. The assembly of claim 52 wherein said substrate comprises a power plane. 56. The assembly of claim 1 wherein said substrate comprises a heat sink layer. 57. The assembly of claim 1 wherein said substrate is a land grid array substrate, having lands on a side opposite the die mount side. 58. The assembly of claim 1 wherein said substrate is a ball grid array substrate, having solder balls attached on a side opposite the die mount side. 59. The assembly of claim 1 wherein at least one said die is oriented such that the active side of the die faces away from the substrate. 60. The assembly of claim 1 wherein at least one of said die is oriented such that the active side of the die faces toward the substrate. 61. The assembly of claim 1 wherein at least two said die are oriented such that the active side of the die faces in the same direction in relation to the substrate. 62. The assembly of claim 41 wherein the underfill extends past an edge of said first die. 63. The assembly of claim 41 wherein the underfill forms a fillet between said first die and the substrate. 64. The assembly of claim 63 wherein the fillet extends above the substrate to a side of said first die. 65. The assembly of claim 45 wherein the underfill extends past an edge of said first die. 66. The assembly of claim 46 wherein the underfill forms a fillet between a side of said die stack and said substrate. 67. The assembly of claim 66 wherein the fillet extends above said substrate to a side of said first die. 68. The assembly of claim 66 wherein the fillet extends above said substrate to a side of an additional die in said die stack. 69. The assembly of claim 66 wherein the fillet extends above said substrate to a side of said die stack. 70. The assembly of claim 66 wherein the fillet extends above said substrate to a surface of said die stack. 71. The assembly of claim 1 wherein said assembly is overmolded. 72. The assembly of claim 71, the overmolding material situated between a first said die and the die mount surface of the substrate. 73. The assembly of claim 71, the overmolding material covering a side of any one or more of said die and at least a portion of said electrically conductive polymer element. 74. The assembly of claim 71, the overmolding material covering all of said die. 75. The assembly of claim 71, the overmolding leaving a surface of a said die exposed. 76. The assembly of claim 1 wherein said assembly is encapsulated. 77. The assembly of claim 76, the encapsulating material extending between a first said die and the die mount surface of the substrate. 78. The assembly of claim 76, the encapsulating material covering a side of any one or more of said die and at least a portion of said electrically conductive polymer element. 79. The assembly of claim 76, the encapsulating material covering all of said die. 80. The assembly of claim 76, the encapsulation leaving a surface of a said die exposed. 81. The assembly of claim 3 wherein said assembly is overmolded. 82. The assembly of claim 81, the overmolding material situated between said first die and the die mount surface of the substrate. 83. The assembly of claim 81, the overmolding material covering a side of said die stack and at least a portion of said electrically conductive polymer element. 84. The assembly of claim 81, the overmolding material covering all of said die in said die stack. 85. The assembly of claim 81, the overmolding leaving a surface of a said die stack exposed. 86. The assembly of claim 3 wherein said assembly is encapsulated. 87. The assembly of claim 86, the encapsulating material extending between said first die and the die mount surface of the substrate. 88. The assembly of claim 86, the encapsulating material covering a side of said die stack and at least a portion of said electrically conductive polymer element. 89. The assembly of claim 86, the encapsulating material covering all of said die in said die stack. 90. The assembly of claim 86, the encapsulation leaving a surface of a said die exposed. 91. The assembly of claim 1, further comprising a conformal assembly coating. 92. The assembly of claim 3, further comprising a conformal assembly coating.
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