Gas feed installation for machines depositing a barrier layer on containers
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
C23C-016/00
C23C-016/448
C23C-016/455
C23C-016/52
출원번호
US-0095327
(2006-11-22)
등록번호
US-8382904
(2013-02-26)
우선권정보
FR-05 53671 (2005-12-01)
국제출원번호
PCT/EP2006/068773
(2006-11-22)
§371/§102 date
20080529
(20080529)
국제공개번호
WO2007/063015
(2007-06-07)
발명자
/ 주소
Rius, Jean-Michel
출원인 / 주소
Sidel Participations
인용정보
피인용 횟수 :
0인용 특허 :
18
초록▼
The present invention relates to a gas feed installation for depositing barrier layers in a container. According to the invention, a balancing step is carried out using a start-up feed device (70) during transient states when the operation passes from a vacuum step, then to a step of depositing a pr
The present invention relates to a gas feed installation for depositing barrier layers in a container. According to the invention, a balancing step is carried out using a start-up feed device (70) during transient states when the operation passes from a vacuum step, then to a step of depositing a preparatory layer and finally a step of depositing an actual barrier layer on an injector (44) inside a container (42).
대표청구항▼
1. A gas feed installation for a machine for depositing barrier layers on the internal wall of containers by means of a cold plasma, comprising: at least a first part comprising a tank (1) filled with a liquid component, which tank (1) is temperature-regulated and pressure-regulated in order to vapo
1. A gas feed installation for a machine for depositing barrier layers on the internal wall of containers by means of a cold plasma, comprising: at least a first part comprising a tank (1) filled with a liquid component, which tank (1) is temperature-regulated and pressure-regulated in order to vaporize the liquid component so as to make it pass into the gas phase, which first part is connected via at least one gas line to the rest of the installation;at least a second part, connected via at least one gas line to the first part and comprising gas mixing means (M, M1, M2) which cooperate with a steady-flow means (E) so as to inject at least one gas mixture; andat least one injector (44) connected to said steady-flow means (E) and intended to be inserted into a container (42) to be treated, when the latter is placed in a vacuum chamber (40),wherein each gas line connected to the tank (1) is controlled by a regulating flowmeter (21, 29) and the downstream outlets of the flowmeters (21, 29) are short-circuited to the tank (1) on demand using controllable valves (17, 37) so as to rapidly bring the tank to an operating pressure. 2. The installation as claimed in claim 1, wherein the controllable valves for short-circuiting the downstream outlets of the flowmeters (21, 29) are each formed by a solenoid steady-flow valve (17), so as to rapidly bring the tank to the operating pressure. 3. The installation as claimed in claim 2, further comprising: feed operation state sensors and a first controller that includes a information element for inputting information from at least one of the feed operation state sensors and the first controller includes a processor device for executing a prerecorded control program on the basis of the input information and a signal device for producing, in response, control signals for regulating:the degree of opening of the flowmeters (21) and (29);the degree of opening of the steady-flow valves (17, 37) and/or a filling valve (7); andthe heating energy supplied to the heater (11). 4. The installation as claimed in claim 1, further comprising: feed operation state sensors and a first controller that includes a information element for inputting information from at least one of the feed operation state sensors and the first controller includes a processor device for executing a prerecorded control program on the basis of the input information and a signal device for producing, in response, control signals for regulating:the degree of opening of the flowmeters (21) and (29);the degree of opening of the steady-flow valves (17, 37) and/or a filling valve (7); andthe heating energy supplied to the heater (11). 5. The installation as claimed in claim 4, wherein the feed operation state sensors consist of at least: a sensor (5) for measuring the liquid level in the tank (1);a pressure measurement sensor (39) for measuring the gas pressure in the tank (1);a thermocouple (25; 35) for regulating the temperature of at least one of the flowmeters (21; 29);a thermocouple (13) for measuring the temperature in the tank (1); anda safety thermocouple (15) for the temperature in the liquid part of the tank (1). 6. The installation as claimed in claim 5, wherein each flowmeter (21; 29) is respectively associated with one of said thermocouple (25; 35) for regulating its temperature. 7. The installation as claimed in claim 4, further comprising a second controller associated with the second part and which includes an information inputting means, which receives the signals from a plurality of sensors, among which are: at least one flow rate sensor (62, 86) and/or at least one pressure sensor (88); and/orsensors for picking up signals corresponding to the state of at least one of the solenoid valves (58, 60, 80, 82, 64, 66, 84, 85) and of the valves (68, 90) and of the mixing heads (48, 50), as well as that of the pressure sensor (88) for controlling the vacuum level in the container (42) during treatment;the second controller moreover including a computer means which executes a prerecorded regulating program and a regulating means controlled by the computer means that finally applies signals for controlling the degree of opening of at least one of the solenoid valves (58, 60, 80, 82, 64, 66, 84, 85) for applying at least a first and/or a second layer. 8. The installation as claimed in claim 7, wherein the second controller executes a program for controlling the installation in two successive modes, namely a startup or standby mode, in which the mixing means (M1, M2) are connected to the steady-flow means (E), and then a layer deposition mode, in which, sequentially, the mixing means (M1, M2) for each layer to be deposited on the container to be treated is connected in succession to the compensation chamber (52), respectively. 9. The installation as claimed in claim 1, further comprising a distribution device (M) which comprises at least one mixing head (48, 50) connected upstream to the gas lines (54, 56, 76, 78) that correspond to it via solenoid valves (58, 60, 80, 82) and connected downstream to the injector (44) via a controlled solenoid valve (64, 84). 10. The installation as claimed in claim 9, wherein each mixing head (48, 50) is connected to the steady-flow means (E) directly via a respective solenoid valve (66, 85). 11. The installation as claimed in claim 10, wherein the steady-flow element (E) comprises a feeder (70) having a connector (72) that is connected to a vacuum pump. 12. The installation as claimed in claim 10, wherein at least one mixing head (48, 50) is connected to a compensation chamber (52). 13. The installation as claimed in claim 9, wherein the steady-flow means (E) comprises a feeder (70) having a connector (72) that is connected to a vacuum pump. 14. The installation as claimed in claim 13, wherein the steady-flow means (E) is connected to the mixing means (M) via valves (68, 90) for balancing the controllable flow rates. 15. The installation as claimed in claim 9, wherein at least one mixing head (48, 50) is connected to a compensation chamber (52). 16. The installation as claimed in claim 13, wherein the controllable solenoid valves (64, 66, 84, 85) placed at the outlet of each mixing head (48, 50) are controlled in opposition. 17. The installation as claimed in claim 16, wherein each pair of solenoid valves associated with the outlet of a mixing head is formed by a slide solenoid valve having two inlets and two outlets. 18. The installation as claimed in claim 13, wherein at least one mixing head (48, 50) is connected to a compensation chamber (52). 19. The installation as claimed in claim 9, further comprising: feed operation state sensors and a first controller that includes a information element for inputting information from at least one of the feed operation state sensors and the first controller includes a processor device for executing a prerecorded control program on the basis of the input information and a signal device for producing, in response, control signals for regulating:the degree of opening of the flowmeters (21) and (29);the degree of opening of the steady-flow valves (17, 37) and/or a filling valve (7); andthe heating energy supplied to the heater (11).
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이 특허에 인용된 특허 (18)
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