[특허]X-ray detector for electron microscope

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	H01J-037/256 H01J-037/24 G01N-023/04
출원번호	US-0312689 (2011-12-06)
등록번호	US-8410439 (2013-04-02)
발명자 / 주소	Von Harrach, Hanno Sebastian Freitag, Bert Dona, Pleun
출원인 / 주소	PEI Company
대리인 / 주소	Scheinberg & Associates, PC
인용정보	피인용 횟수 : 8 인용 특허 : 31

초록 ▼

Multiple detectors arranged in a ring within a specimen chamber provide a large solid angle of collection. The detectors preferably include a shutter and a cold shield that reduce ice formation on the detector. By providing detectors surrounding the sample, a large solid angle is provided for improv

Multiple detectors arranged in a ring within a specimen chamber provide a large solid angle of collection. The detectors preferably include a shutter and a cold shield that reduce ice formation on the detector. By providing detectors surrounding the sample, a large solid angle is provided for improved detection and x-rays are detected regardless of the direction of sample tilt.

대표청구항 ▼

1. A method of determining three-dimensional positional and compositional information about a microscopic specimen, comprising: scanning an electron beam across the sample;detecting x-rays characteristic of the material in the sample using multiple x-ray angularly spaced around the sample, the x-ray

1. A method of determining three-dimensional positional and compositional information about a microscopic specimen, comprising: scanning an electron beam across the sample;detecting x-rays characteristic of the material in the sample using multiple x-ray angularly spaced around the sample, the x-rays caused to be emitted from the sample by the impact of the electron beam;determining from the difference in the x-ray signals detected by the multiple detectors the position of the source of the x-rays along the beam direction; andimproving the accuracy of compositional information by means of the difference in attenuation of the x-ray signal detected by the multiple detectors. 2. The method of claim 1 in which determining from the difference in the x-ray signals detected by the multiple detectors the position of the source of the x-rays in the beam direction includes determining the position of the source of X-rays from the different attenuation of the x-ray signal caused by different path lengths through the sample of the x-rays detected by different detectors. 3. A method of determining three-dimensional positional and compositional information about a microscopic specimen, comprising: scanning an electron beam across the sample;detecting x-rays characteristic of the material in the sample using multiple x-ray angularly spaced around the sample, the x-rays caused to be emitted from the sample by the impact of the electron beam; anddetermining from the difference in the x-ray signals detected by the multiple detectors the position of the source of the x-rays along the beam direction. 4. The method of claim 3 in which determining from the difference in the x-ray signals detected by the multiple detectors the position of the source of the x-rays in the beam direction includes determining the position of the source of X-rays from the different attenuation of the x-ray signal caused by different path lengths through the sample of the x-rays detected by different detectors. 5. A method of determining characteristics of a material, comprising: directing an electron beam to impact the surface of a sample;detecting x-rays caused to be emitted from the sample by the impact of the electron beam and characteristic of the material in the sample using at least two x-ray detectors angularly spaced around the sample and within the lens of a transmission electron microscope;cooling a cold shield at least partly surrounding the detector; andproviding heat to maintain the detector at a higher temperature than the cold shield. 6. The method of claim 5 in which detecting x-rays using at least two x-ray detectors supported within the lens of a transmission electron microscope comprises detecting x-rays using at least two x-ray detectors supported by a pole piece of the transmission electron microscope. 7. The method of claim 5 further comprising maintaining a shutter moveable between an open position and a closed position for protecting the detector when it is not in use, at a temperature colder than that of the detector. 8. The method of claim 5 in which detecting x-rays using at least two x-ray detectors comprises detecting x-rays using at least two x-ray detectors positioned to receive x-rays having takeoff angles extending from less than 20 degrees to greater than 30 degrees. 9. The method of claim 5 in which detecting x-rays using at least two x-ray detectors comprises detecting x-rays using at least two SDD x-ray detectors, each SDD x-ray detector having an active area of greater than 10 mm2. 10. The method of claim 5 in which detecting x-rays using at least two x-ray detectors comprises detecting x-rays using at least two x-ray detectors having active areas that together subtend a solid angle of greater than about 0.3 sr. 11. The method of claim 5 in which providing heat to maintain the detector at a higher temperature than the cold shield comprises providing heat from a resistive heater. 12. The method of claim 5 further comprising reducing the transmission of vibration between the detectors and the pole piece by mounting the detectors on a mount that includes a floating portion that supports the detectors. 13. The method of claim 12 in which the floating portion comprises multiple leaf springs. 14. The method of claim 5 further comprising maintaining a thermally resistive thermal connection between the cold shield and the detector. 15. The method of claim 5 in which cooling a cold shield at least partly surrounding the detector comprises providing a single cold source connected to the cold shield to cool the cold shield and the detector. 16. The method of claim 5 in which detecting x-rays using at least two x-ray detectors comprises detecting x-rays using four x-ray detectors. 17. The method of claim 5 further comprising reducing detection of x-rays that do not derive from the location of the electron beam impact with the sample using a collimator. 18. The method of claim 5 in which cooling the cold shield includes cooling a portion of the mount that comprises the cold shield. 19. The method of claim 5 further comprising reducing detection of x-rays that do not derive from the location of the electron beam impact using a portion of the mount as a collimator. 20. The method of claim 5 further comprising providing a thin window positioned in front of the detectors. 21. The method of claim 5 in which directing an electron beam includes directing an electron beam within a transmission electron microscope, a scanning transmission electron microscope, or a scanning electron microscope.

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이 특허에 인용된 특허 (31) 인용/피인용 타임라인 분석

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Dube William P. ; Albert Richard ; Siewert Thomas A. ; Fitting Dale W., Method and apparatus for diffraction measurement using a scanning x-ray source.
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Shichi, Hiroyasu; Ishitani, Tohru; Koike, Hidemi; Umemura, Kaoru; Seya, Eiichi; Tokuda, Mitsuo; Tomimatsu, Satoshi; Kashima, Hideo; Fukuda, Muneyuki, Method and apparatus for specimen fabrication.
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Radley, Ian; Bievenue, Thomas J.; Burdett, Jr., John H.; Gallagher, Brian W.; Shakshober, Stuart M.; Chen, Zewu, Method and device for cooling and electrically insulating a high voltage, heat-generating component such as an x-ray tube for analyzing fluid streams.
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Brown Roy W. ; Kim Chul-Sung, Method for identification of unknown substances.
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Bardash Michael J. (Brooklyn NY), Three dimensional imaging system using laser generated ultrashort x-ray pulser.
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Kumakhov Muradin A. (Moscow SUX), Use of a Kumakhov lens in analytic instruments.
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Bertozzi, William; Ledoux, Robert J., Use of nearly monochromatic and tunable photon sources with nuclear resonance fluorescence in non-intrusive inspection of containers for material detection and imaging.
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Damento, Michael A.; Garvey, Hugh F., X-ray window and resistive heater.
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