초록 ▼

A cryogenic refrigerator has a refrigeration cylinder and at least two displacers. Each displacer reciprocates in the refrigeration cylinder and moves refrigeration gas through the refrigeration cylinder. A regenerator cools the refrigeration gas, and gas control valves admit high pressure gas into

A cryogenic refrigerator has a refrigeration cylinder and at least two displacers. Each displacer reciprocates in the refrigeration cylinder and moves refrigeration gas through the refrigeration cylinder. A regenerator cools the refrigeration gas, and gas control valves admit high pressure gas into the refrigeration cylinder and exhaust gas from the refrigeration cylinder. The refrigerator also has linear motors operatively connected to displacers, and the linear motors drive the displacers in reciprocating movement. A position sensor is provided to determine a parameter of the displacers during reciprocation. A controller is operatively connected to the linear motors to control the linear motors. The controller controls a parameter of the two displacers during reciprocation. The parameter can be stroke length, stroke speed, stroke phase or another parameter of the displacer for temperature control of the cryogenic refrigerator. The cryogenic refrigerator may also include a device to remove vibration.

대표청구항 ▼

1. A cryogenic refrigerator comprising: a first stage;a second stage;gas control valves for admitting high pressure gas into and for exhausting the gas from the first and second stages; anda first linear motor connected to a first displacer for the first stage and a second linear motor connected to

1. A cryogenic refrigerator comprising: a first stage;a second stage;gas control valves for admitting high pressure gas into and for exhausting the gas from the first and second stages; anda first linear motor connected to a first displacer for the first stage and a second linear motor connected to a second displacer for the second stage, the first and second linear motors allowing independent control of the first and second displacers. 2. The cryogenic refrigerator of claim 1, wherein the linear motors permit (i) operating the first displacer at a first stroke in the first stage, and (ii) operating the second displacer at a second stroke in the second stage. 3. The cryogenic refrigerator of claim 1, further comprising a gas control valve for admitting high pressure gas into, and a second gas control valve for exhausting the gas from the first and second stages. 4. The cryogenic refrigerator of claim 1, wherein the linear motors permit operating the first displacer at a first stroke length in the first stage, and operating the second displacer at a second stroke length in the second stage. 5. The cryogenic refrigerator of claim 1, wherein the linear motors permit operating the first displacer at a first stroke displacement profile in the first stage, and operating the second displacer at a second stroke displacement profile in the second stage. 6. The cryogenic refrigerator of claim 1, wherein the linear motors permit operating the first displacer at a first stroke speed in the first stage, and operating the second displacer at a second stroke speed in the second stage. 7. The cryogenic refrigerator of claim 1, further comprising a damping device associated with the refrigerator to remove a vibration. 8. The cryogenic refrigerator of claim 7, wherein the damping device is active. 9. The cryogenic refrigerator of claim 1, further comprising a position sensor to measure a position of at least the first or the second displacer. 10. The cryogenic refrigerator of claim 1, further comprising a working fluid introduced to the first stage, and wherein the working fluid of the first stage is blocked from the working fluid of the second stage. 11. The cryogenic refrigerator as claimed in claim 1 wherein the first and second linear motors are electromagnetic motors. 12. The cryogenic refrigerator of claim 1, wherein the cryogenic refrigerator is a Gifford McMahon two stage refrigerator. 13. A cryogenic refrigerator comprising: a first stage refrigeration cylinder;a first displacer, reciprocating in the first stage refrigeration cylinder, that displaces refrigeration gas between opposite ends of the first stage refrigeration cylinder;a first regenerator that cools the displaced refrigeration gas of the first stage refrigeration cylinder;a first linear motor, operatively connected to the first displacer, that drives the first displacer in reciprocating movement;a second stage refrigeration cylinder;a second displacer that displaces refrigeration gas between opposite ends of the second stage refrigeration cylinder;a second regenerator that cools the refrigeration gas of the second stage refrigeration cylinder;a second linear motor, operatively connected to the second displacer, that drives the second displacer in reciprocating movement;at least one position sensor to determine a position of the first or the second displacer;gas control valves that admit high pressure gas into and exhaust the gas from the first and second stage refrigeration cylinders; anda controller, operatively connected to the at least one position sensor and to the first and the second linear motors, that controls the first and second linear motors in an independent manner. 14. The cryogenic refrigerator of claim 13, wherein the controller controls stroke parameters of the first and the second displacer during reciprocation in response to an output from the position sensor. 15. The cryogenic refrigerator of claim 13, wherein the controller independently controls stroke parameters of the first and the second displacer during reciprocation in response to an output from the position sensor. 16. The cryogenic refrigerator of claim 13, wherein the second linear motor is connected to the second displacer coaxially through the first displacer. 17. The cryogenic refrigerator of claim 13, wherein the second linear motor is connected to the second displacer by an output shaft that is arranged adjacent relative to the first displacer. 18. The cryogenic refrigerator of claim 13, wherein the controller controls temperature of a first stage by controlling the first linear motor. 19. The cryogenic refrigerator of claim 13, wherein the controller controls temperature of a second stage by controlling the second linear motor independently relative to the first stage. 20. The cryogenic refrigerator of claim 13, wherein the controller controls temperature of a second stage by controlling independently varying the stroke profile and length of the second linear motor relative to the first linear motor. 21. The cryogenic refrigerator of claim 13, further comprising a damping device to remove a vibration. 22. The cryogenic refrigerator of claim 21, wherein the damping device is active. 23. The cryogenic refrigerator of claim 13, wherein the controller varies at least one of stroke length, stroke speed, and stroke phase of the first or the second displacers. 24. The cryogenic refrigerator as claimed in claim 13 wherein the first and second linear motors are electromagnetic motors. 25. The cryogenic refrigerator of claim 24, wherein the cryogenic refrigerator is a Gifford McMahon two stage refrigerator. 26. A method of operating a two stage cryogenic refrigerator comprising: providing at least two displacers in the same or different refrigeration cylinders;valving gas into and from the at least two displacers; andcontrolling temperature by independently controlling the at least two displacers. 27. The method of claim 26, further comprising removing a vibration associated with the two stage cryogenic refrigerator. 28. The method of claim 27, further comprising actively removing the vibration. 29. The method of claim 27, further comprising passively removing the vibration. 30. The method of claim 26, further comprising independently controlling at least one displacer to vary displacer stroke parameters relative to a second displacer. 31. The method of claim 26, further comprising independently controlling at least one displacer to vary displacer speed relative to a second displacer. 32. The method of claim 26, further comprising independently controlling at least one displacer to vary displacer phase relative to a second displacer. 33. The method of claim 26, further comprising independently controlling temperature of the two stages by independently varying a reciprocation parameter of at least one displacer relative to a second displacer. 34. The method of claim 26, further comprising sensing a position of at least one of the two displacers. 35. The method of claim 34, further comprising independently controlling the two stages in response to the position of at least one of the displacers. 36. The method of claim 26 wherein the refrigerator cools cryopumping surfaces. 37. The method of claim 26 wherein the refrigerator cools a semiconductor. 38. The method of claim 26, wherein the displacers are controlled by electromagnetic motors. 39. The method of claim 26, wherein the cryogenic refrigerator is a Gifford McMahon two stage refrigerator. 40. A cryogenic refrigerator comprising: a first stage;a second stage; andmeans for independently controlling variables of the two stages, the variables comprising at least one of stroke length, cycle rate of the refrigerator, speed of displacers, and a time when valves are operated relative to a position of the displacers. 41. The cryogenic refrigerator of claim 1 wherein the first and second linear motors comprise pneumatic valves that control stroke parameters of the displacers.