The present invention provides a method of recycling a water-based wire saw cutting slurry waste fluid comprising abrasive particles and waste solids in a water-based carrier. The method comprises the steps of (a) separating the waste fluid into a first fraction and a second fraction, the first frac
The present invention provides a method of recycling a water-based wire saw cutting slurry waste fluid comprising abrasive particles and waste solids in a water-based carrier. The method comprises the steps of (a) separating the waste fluid into a first fraction and a second fraction, the first fraction comprising recovered abrasive particles, and the second fraction comprising waste solids and a portion of the water-based carrier; (b) optionally, separating the second fraction to separate the waste solids from the water-based carrier to form a waste solids portion and a recovered water-based carrier portion; (c) optionally, drying the first fraction from step (a) and separating the resulting dried abrasive particles from smaller waste particles to produce a purified recovered abrasive fraction; and (d) suspending particles of the first fraction from step (a), the purified recovered abrasive fraction from step (c), or both, in a suspending medium comprising at least a portion of the recovered water-based carrier from step (b), to generate a recycled water-based wire saw cutting slurry.
대표청구항▼
1. A method of recycling a water-based wire saw cutting slurry waste fluid comprising abrasive particles and waste solids in an aqueous carrier, the process comprising the steps of: (a) providing the water-based wire saw cutting slurry waste fluid, wherein the aqueous carrier has a water content of
1. A method of recycling a water-based wire saw cutting slurry waste fluid comprising abrasive particles and waste solids in an aqueous carrier, the process comprising the steps of: (a) providing the water-based wire saw cutting slurry waste fluid, wherein the aqueous carrier has a water content of about 75 wt. % or greater, a polymer having an average molecular weight of greater than about 2000 Da, and free of at least one preconditioning agent selected from the group consisting of oxidizing agents, pH adjusters, coagulants, and surfactants;(b) separating the water-based wire saw cutting slurry waste fluid into a first fraction and a second fraction, the first fraction being enhanced for the abrasive particles, and the second fraction being enhanced for the waste solids and said water-based carrier;(c) optionally, separating the second fraction from step (b) to form a waste solids portion and a recovered water-based carrier portion; and(d) suspending particles from the first fraction of step (b) in an aqueous suspending medium to generate a recycled water-based wire saw cutting slurry, wherein the process further comprises a preconditioning step prior to step (b), the preconditioning step comprising adding at least one preconditioning agent selected from the group consisting of oxidizing agents, pH adjusters, coagulants, and surfactants to the waste fluid. 2. The method of claim 1, wherein the aqueous suspending medium comprises at least a portion of the recovered water-based carrier portion from step (c). 3. The method of claim 1, wherein step (b) is performed using at least one device selected from the group consisting of a filtration unit, a centrifuge, a battery of centrifuges, a hydrocyclone, and a battery of hydrocyclones. 4. The method of claim 1, wherein the water-based wire saw cutting slurry waste fluid is diluted with water prior to step (a). 5. The method of claim 1, wherein the abrasive particles comprise particles selected from the group consisting of silicon carbide, diamond and boron carbide. 6. The method of claim 1, including the additional step of drying the first fraction from step (b) and separating the resulting dried abrasive particles from smaller waste particles to produce a purified recovered abrasive fraction; and suspending at least a portion of the purified recovered abrasive fraction in the aqueous suspending medium to generate the recycled water-based wire saw cutting slurry. 7. The method of claim 6, wherein the dried abrasive particles are separated using one or more apparatus selected from the group consisting of a cyclone, a particle classifier, and a grinder classifier. 8. A recycled water-based cutting slurry prepared by the method of claim 1.
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이 특허에 인용된 특허 (18)
Gary L. Corlett ; Edward T. Ferri, Jr. ; J. Tobin Geatz, Apparatus and process for separation and recovery of liquid and slurry abrasives used for polishing.
Costantini Michael A. ; Talbott Jonathan A. ; Chandra Mohan ; Prasad Vishwanath ; Caster Allison ; Gupta Kedar P. ; Leyvraz Philippe, Method and apparatus for improved wire saw slurry.
Corlett Gary L. ; Roberson ; Jr. Glenn A., Method and apparatus for recovery of water and slurry abrasives used for chemical and mechanical planarization.
Corlett Gary L. ; Roberson ; Jr. Glenn A., Method and apparatus for recovery of water and slurry abrasives used for chemical and mechanical planarization.
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