[특허]Probe card analysis system and method

[미국특허] Probe card analysis system and method 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	G01R-001/067
출원번호	US-0862375 (2010-08-24)
등록번호	US-8466703 (2013-06-18)
발명자 / 주소	Endres, Eric Strom, John T. Kuwasaki, Christian McLaughlin, Christopher
출원인 / 주소	Rudolph Technologies, Inc.
대리인 / 주소	Dicke, Billig & Czaja, PLLC
인용정보	피인용 횟수 : 0 인용 특허 : 20

초록 ▼

A system and method for evaluating wafer test probe cards under real-world wafer test cell condition integrates wafer test cell components into the probe card inspection and analysis process. Disclosed embodiments may utilize existing and/or modified wafer test cell components such as, a head plate, a test head, a signal delivery system, and a manipulator to emulate wafer test cell dynamics during the probe card inspection and analysis process.

대표청구항 ▼

1. A system comprising: a probe card comprising an array of probes;an actuator mechanism operably coupled to the probe card to apply forces thereto independent of forces placed on the array of probes to emulate physical characteristics of a wafer test cell; anda sensor measuring deflection of the probe card based on the applied forces. 2. The system of claim 1, wherein the actuator mechanism is coupled to a probe card interface. 3. The system of claim 1, wherein the actuator mechanism is coupled to a probe card analyzer module. 4. The system of claim 1, wherein the actuator mechanism is configured to place forces on the probe array in pitch, roll and yaw directions. 5. The system of claim 1, wherein the actuator mechanism is configured to alter a shape of the probe card. 6. The system of claim 1, wherein the actuator mechanism is configured to alter a shape of a probe card analyzer module that engages tips of the probe card. 7. The system of claim 1, wherein the sensor is coupled to a processor that models the applied forces to estimate a spring constant associated with the probe card. 8. A method for inspecting and analyzing wafer test probe arrays, said method comprising: mounting a probe card having a probe array to an emulation system;emulating forces on the probe card in the emulation system independent of forces placed on the probe array indicative of physical characteristics of a wafer test cell; andmeasuring deflection of the probe card based on the emulated forces. 9. The method of claim 8 further comprising altering a shape of the probe card. 10. The method of claim 8 further comprising altering a shape of a probe card analyzer module engaging tips of the probe card. 11. The method of claim 8, further comprising: estimating a spring constant of the probe card based on the emulated forces.

이 특허에 인용된 특허 (20) 인용/피인용 타임라인 분석

Miller, Charles A.; Hreish, Emad B., Apparatus and method for electromechanical testing and validation of probe cards.
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Suzuki, Masaru, Apparatus for measuring properties of probe card and probing method.
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Strom, John T, Apparatus for obtaining planarity measurements with respect to a probe card analysis system.
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Canella Robert L. (Meridian ID) Farnworth Warren M. (Nampa ID), Diced semiconductor device handler.
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Hembree David R., Method and apparatus for aligning and connecting semiconductor components to substrates.
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Stewart John P. (King County WA) Seubert Ronald C. (King County WA) Snow Donald B. (King County WA), Method and apparatus for inspecting integrated circuit probe cards.
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Stewart John P. (Seattle WA) Seubert Ronald C. (Issaquah WA) Snow Donald B. (Mercer Island WA), Method and apparatus for inspecting integrated circuit probe cards.
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Yamaguchi Masao (Tokyo JPX), Method of identifying probe position and probing method in prober.
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Eldridge Benjamin N. ; Grube Gary W. ; Khandros Igor Y. ; Mathieu Gaetan L., Method of planarizing tips of probe elements of a probe card assembly.
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Khoury Theodore Andrew ; Goode Raun L. ; Bustos Larry J., Method of testing a semiconductor device by automatically measuring probe tip parameters.
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Hershel, Ron; Campbell, Rich; Killeen, Timothy S.; Snow, Donald B., Methods and apparatus for determining the relative positions of probe tips on a printed circuit board probe card.
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Quarre Steven C. ; Stewart John P., Probe card array check plate with transition zones.
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Kitahata, Hideki, Prober and apparatus for semiconductor chip analysis.
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Bary,R챕nate, Seismic data acquisition system using acquisition stations set on the sea bottom.
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Snow,Donald B.; Kraft,Raymond H.; Strom,John T., Stereoscopic three-dimensional metrology system and method.
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Harris, Michael P., System and method for evaluating the planarity and parallelism of an array of probe tips.
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Strom,John T., System and method of mitigating effects of component deflection in a probe card analyzer.
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Strom,John T., System and method of mitigating effects of component deflection in a probe card analyzer.
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Strid Eric W. (Portland OR) Schappacher Jerry B. (Portland OR) Carlton Dale E. (Portland OR) Gleason K. Reed (Portland OR), System for evaluating probing networks.
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Yu-Hsin Liu TW, Wafer prober for in-line cleaning probe card.
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[미국특허] Probe card analysis system and method 원문보기