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A substrate accommodating tray for accommodating a substrate includes a frame including a pair of first frame portions facing each other and a pair of second frame portions facing each other; a plate-like support element provided in an area surrounded by the frame for supporting the substrate, the s

A substrate accommodating tray for accommodating a substrate includes a frame including a pair of first frame portions facing each other and a pair of second frame portions facing each other; a plate-like support element provided in an area surrounded by the frame for supporting the substrate, the support element having a first opening provided between the pair of first frame portions; and at least one support member provided along the first opening between the pair of first frame portions for supporting the support element. The substrate is placed on an upper surface of the plate-like support element.

대표청구항 ▼

1. A substrate accommodating tray for accommodating a substrate, the substrate accommodating tray comprising: a frame including a pair of first frame portions facing each other and a pair of second frame portions facing each other, the frame being defined by top side, bottom side, and two sides,wher

1. A substrate accommodating tray for accommodating a substrate, the substrate accommodating tray comprising: a frame including a pair of first frame portions facing each other and a pair of second frame portions facing each other, the frame being defined by top side, bottom side, and two sides,wherein each pair of first and second frame portions support a plate-like support element, in a same plane as the frame, for supporting the substrate, wherein the pair of first frame portions are the side of the frame and the pair of second frame portions are the top side and bottom side of the frame wherein the pair of first frame portions are the side of the frame and the pair of second frame portions are the top side and bottom side of the frame, the pair of first frame portion are connected with a first support member and a second support member,wherein the first support member and the second support member extend from one side of the frame to the other side of the frame and parallel to the top and bottom sides of the frame, the first support member and the second support member are separated by a first opening which extends parallel to the top and bottom sides of the frame, andwherein the first opening is located in the middle of the frame and penetrates through an entire support element from a first side of the support element to a second side of the support element opposite the first side, the first side of the support element for placing the substrate on. 2. A substrate accommodating tray according to claim 1, wherein the support element has a second opening provided between the pair of second frame portions. 3. A substrate accommodating tray according to claim 1, wherein the support element contains a foamed synthetic resin. 4. A substrate accommodating tray according to claim 1, wherein the frame and the first and second support members each contain aluminum. 5. A substrate accommodating tray according to claim 1, further comprising: at least one reinforcing member for reinforcing the support element, the at least one reinforcing member being provided in the support element. 6. A substrate accommodating tray according to claim 1, wherein the support element further has a plurality of openings respectively provided in the vicinity of a plurality of corners of the frame. 7. A substrate accommodating tray according to claim 1, wherein: the pair of first frame portions are substantially parallel to each other, the pair of first frame portions and the pair of second frame portions are substantially perpendicular to each other, and the frame is a quadrangular frame. 8. A substrate accommodating tray for accommodating a substrate, the substrate accommodating tray comprising: a frame including a pair of first frame portions facing each other and a pair of second frame portions facing each other, the frame being defined by top side, bottom side, and two sides,wherein each pair of first and second frame portions support a plate-like support element, in a same plane as the frame, for supporting the substrate, wherein the pair of first frame portions are the side of the frame and the pair of second frame portions are the top side and bottom side of the frame wherein the pair of first frame portions are the side of the frame and the pair of second frame portions are the top side and bottom side of the frame, the pair of first frame portion are connected with a first support member and a second support member,wherein the first support member and the second support member extend from one side of the frame to the other side of the frame and parallel to the top and bottom sides of the frame, the first support member and the second support member are separated by a first opening which extends parallel to the top and bottom sides of the frame,wherein the first opening is located in the middle of the frame and penetrates through an entire support element from a first side of the support element to a second side of the support element opposite the first side, the first side of the support element for placing the substrate on, andwherein the first support member and the second support member are provided so as not to project over an upper surface of the support element. 9. A substrate accommodating tray for accommodating a substrate, the substrate accommodating tray comprising: a frame including a pair of first frame portions facing each other and a pair of second frame portions facing each other, the frame being defined by top side, bottom side, and two sides,wherein each pair of first and second frame portions support a plate-like support element, in a same plane as the frame, for supporting the substrate, wherein the pair of first frame portions are the side of the frame and the pair of second frame portions are the top side and bottom side of the frame wherein the pair of first frame portions are the side of the frame and the pair of second frame portions are the top side and bottom side of the frame, the pair of first frame portion are connected with a first support member and a second support member,wherein the first support member and the second support member extend from one side of the frame to the other side of the frame and parallel to the top and bottom sides of the frame, the first support member and the second support member are separated by a first opening which extends parallel to the top and bottom sides of the frame, andwherein the first opening is located in the middle of the frame and penetrates through an entire support element from a first side of the support element to a second side of the support element opposite the first side, the first side of the support element for placing the substrate on,at least one reinforcing member for reinforcing the support element, the at least one reinforcing member being provided in the support element,wherein the at least one reinforcing member is provided in the support element so as not to be exposed to the first surface of the support element. 10. A substrate accommodating tray for accommodating tray comprising: a frame including a pair of first frame portions facing each other and a pair of second frame portions facing each other, the frame being defined by top side, bottom side, and two sides,wherein each pair of first and second frame portions support a plate-like support element for supporting the substrate, wherein the pair of first frame portion are the side of the frame and the pair of second frame portion are the top side and bottom side of the frame wherein the pair of first frame portions are the side of the frame and the pair of second frame portions are the top side and bottom side of the frame, the pair of first frame portion are connected with a first support member and a second support member,wherein the first support member and the second support member extend from one side of the frame to the other side of the frame and parallel to the top and bottom sides of the frame, the first support member and the second support member are separated by a first opening which extends parallel to the top and bottom sides of the frame,wherein the first opening is located in the middle of the frame and penetrates through an entire support element from a first side of the support element to a second side of the support element opposite the first side, the first side of the support element for placing the substrate on, andat least one reinforcing member for reinforcing the support element, the at least one reinforcing member being provided in the support element,wherein the at least one reinforcing member includes an aluminum pipe. 11. A substrate accommodating tray for accommodating a substrate, the substrate accommodating tray comprising: a frame including a pair of first frame portions facing each other and a pair of second frame portions facing each other, the frame being defined by top side, bottom side, and two sides,wherein each pair of first and second frame portions support a plate-like support element, in a same plane as the frame, for supporting the substrate, wherein the pair of first frame portions are the side of the frame and the pair of second frame portions are the top side and bottom side of the frame wherein the pair of first frame portions are the side of the frame and the pair of second frame portions are the top side and bottom side of the frame, the pair of first frame portion are connected with a first support member and a second support member,wherein the first support member and the second support member extend from one side of the frame to the other side of the frame and parallel to the top and bottom sides of the frame, the first support member and the second support member are separated by a first opening which extends parallel to the top and bottom sides of the frame, andwherein the first opening is located in the middle of the frame and penetrates through an entire support element from a first side of the support element to a second side of the support element opposite the first side, the first side of the support element for placing the substrate on,wherein the first and second support members include:a straight beam like support body portion;a first upper flange portion provided at an upper position on one side of the support body portion;a first upper flange portion provided at an upper position on the other side of the support body portion; anda first lower flange portion provided at a lower position on the other side of the support body portion,wherein the first upper flange portion and the first lower flange portion have a space therebetween. 12. A substrate accommodating tray according to claim 11, wherein the support body portion has a trapezoidal cross-section. 13. A substrate accommodating tray according to claim 11, wherein the support body portion is hollow. 14. A substrate accommodating tray according to claim 13, wherein the first and second support members further include a reinforcing rib provided in the support body portion substantially vertically to a planar direction of the support element. 15. A substrate accommodating tray according to claim 11, wherein the first and second support members further include: a second upper flange portion provided at an upper position on the other side of the support body portion; and a second lower flange portion provided at a lower position on the other side of the support body portion, wherein the second upper flange portion and the second lower flange portion have a space therebetween. 16. A substrate accommodating tray according to claim 15, wherein the support body portion has a trapezoidal cross-section. 17. A substrate accommodating tray according to claim 15, wherein the support body portion is hollow. 18. A substrate accommodating tray according to claim 17, wherein the first and second support members further include a reinforcing rib provided in the support body portion substantially vertically to a planar direction of the support element. 19. A substrate accommodating tray for accommodating a substrate, the substrate accommodating tray comprising: a frame including a pair of first frame portions facing each other and a pair of second frame portions facing each other, and the frame portion being defined by top side, bottom side, and two sides,wherein each pair of first and second frame portions supports a plate-like support element, in a same plane as the frame, for supporting the substrate, wherein the pair of first frame portions are the side of the frame and the pair of second frame portions are the top side and bottom side of the frame wherein the pair of first frame portions are the side of the frame and the pair of second frame portions are the top side and bottom side of the frame, the pair of first frame portions are connected with a first support member a second support member, wherein the first support member and second support member extend from one of the first pair of first frame portions to the other of the pair of first frame portions and parallel to the top and bottom sides of the pair of second frame portions, the first support member and the second support member are divided by first opening which extends parallel to the top and bottom sides and of the pair of second frame portions and wherein the first opening is located in the middle of the frame,wherein the first opening penetrates through the entire support element from a first side of the support element to a second side of the support element opposite the first side, the first side of the support element for placing the substrate on.