[특허]Method for constant concentration evaporation and a device using the same

Rohm and Haas Electronic Materials, LLC

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특허 상세정보

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내보내기 페이스북 공유 트위터 공유 카카오톡 공유

Method for constant concentration evaporation and a device using the same

특허상세정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	C23C-016/448 C23C-016/44 C23C-016/455 F22B-005/00 C23C-016/06 C23C-016/22
미국특허분류(USC)	118/723VE; 118/715; 118/663; 156/345.27; 156/345.24; 156/345.37; 122/233; 122/234
출원번호	US-0687288 (2010-01-14)
등록번호	US-8555809 (2013-10-15)
발명자 / 주소	Woelk, Egbert DiCarlo, Jr., Ronald L.
출원인 / 주소	Rohm and Haas Electronic Materials, LLC
대리인 / 주소	Cantor Colburn LLP
인용정보	피인용 횟수 : 2 인용 특허 : 39

초록
▼

Disclosed herein is a device comprising an evaporator; and a heat exchanger; the heat exchanger being in fluid communication with evaporator; evaporator comprising an outer casing; and an inner casing that is disposed within the outer casing; the inner casing contacting a plate; wherein the inner casing encloses a first conduit that is operative to introduce a carrier fluid into evaporator; and a second conduit that is operative to remove carrier fluid entrained with a precursor; wherein the outer casing is detachably attached to the plate; the plate contacting a first precursor conduit that is operative to introduce the precursor into evaporator from the heat exchanger; where the heat exchanger is disposed proximate to evaporator at a distance effective to maintain the precursor in evaporator at a substantially constant temperature when the ambient temperature around the heat exchanger and evaporator fluctuates by an amount of up to about ±35° C.

대표
청구항
▼

1. A device comprising: an evaporator; anda heat exchanger; the heat exchanger being in fluid communication with the evaporator; the evaporator comprising: an outer casing; andan inner casing that is disposed within the outer casing; the inner casing contacting a plate; wherein the inner casing encloses: a first conduit that is operative to introduce a carrier fluid into the evaporator;wherein the first conduit is an inverted U-shaped conduit that has one end in fluid communication with a first port for introducing the carrier fluid into the evaporator and an opposing end in fluid communication with a sparger; and a second conduit that is operative to remove the carrier fluid entrained with a precursor; wherein the outer casing is detachably attached to the plate; the plate contacting a first precursor conduit that is operative to introduce the precursor into the evaporator from the heat exchanger; where the heat exchanger is disposed proximate to the evaporator at a distance effective to maintain the precursor in the evaporator at a substantially constant temperature when the ambient temperature around the heat exchanger and the evaporator fluctuates by an amount of up to about ±35° C. 2. The device of claim 1, wherein the second conduit is an inverted J-shaped conduit that has one end in fluid communication with a second port for removing the carrier fluid entrained with a precursor from the evaporator and an opposing end in fluid communication with a splash shield. 3. The device of claim 1, wherein the proximity of the heat exchanger to the evaporator is effective to maintain a ratio of the carrier fluid to the precursor that does not change by an amount of greater than or equal to about 0.5% when the ambient temperature around the heat exchanger and the evaporator fluctuates by an amount of up to about ±35° C. 4. The device of claim 1, wherein the proximity of the heat exchanger to the evaporator is effective to maintain a variation in temperature of the precursor in a fluid path from the heat exchanger to the evaporator to be less than or equal to about ±0.1° C. 5. The device of claim 1, wherein the inverted U-shaped conduit is disposed in the evaporator via a hole in the plate. 6. The device of claim 2, wherein the inverted J-shaped conduit is disposed in the evaporator via a hole in the plate. 7. A method comprising: heating or cooling a precursor in a heat exchanger;discharging the precursor from the heat exchanger to an evaporator; the evaporator comprising: an outer casing; andan inner casing that is disposed within the outer casing; the inner casing contacting a plate; wherein the inner casing encloses: a first conduit; wherein the first conduit is an inverted U-shaped conduit that has one end in fluid communication with a first port for introducing a carrier fluid into the evaporator and an opposing end in fluid communication with a sparger; anda second conduit; wherein the second conduit is an inverted J-shaped conduit that has one end in fluid communication with a second port for removing the carrier fluid entrained with a precursor from the evaporator and an opposing end in fluid communication with a splash shield;introducing a carrier fluid into the evaporator via the first conduit;sparging the precursor with the carrier fluid; andremoving the carrier fluid entrained with the precursor from the evaporator via the second conduit; where the proximity of the heat exchanger to the evaporator is effective to maintain the precursor in the evaporator at a substantially constant temperature when the ambient temperature around the heat exchanger and the evaporator fluctuates by an amount of up to about ±35° C. 8. The method of claim 7, further comprising circulating a fluid in a space between the outer casing and the inner casing. 9. A method for manufacturing a device comprising: disposing an inverted U-shaped conduit in a first hole, an inverted J-shaped conduit in a second hole and a first precursor conduit in a third hole on a plate; the plate being affixed with a heat exchanger; anddisposing an inner casing and an outer casing on a side of the plate that is opposed to a side where the heat exchanger contacts the plate; the inner casing being contained in the outer casing; the inner casing enclosing the inverted U-shaped conduit, the inverted J-shaped conduit and the first precursor conduit. 10. A device comprising: an evaporator; anda heat exchanger; the heat exchanger being in fluid communication with the evaporator; the evaporator comprising: an outer casing; andan inner casing that is disposed within the outer casing; the inner casing contacting a plate; wherein the inner casing encloses: a first conduit that is operative to introduce a carrier fluid into the evaporator; anda second conduit that is operative to remove the carrier fluid entrained with a precursor; wherein the outer casing is detachably attached to the plate; the plate contacting a first precursor conduit that is operative to introduce the precursor into the evaporator from the heat exchanger; where the heat exchanger is disposed proximate to the evaporator at a distance effective to maintain the precursor in the evaporator at a substantially constant temperature when the ambient temperature around the heat exchanger and the evaporator fluctuates by an amount of up to about ±35° C.; wherein the second conduit is an inverted J-shaped conduit that has one end in fluid communication with a second port for removing the carrier fluid entrained with a precursor from the evaporator and an opposing end in fluid communication with a splash shield. 11. The device of claim 10, wherein the first conduit is an inverted U-shaped conduit that has one end in fluid communication with a first port for introducing the carrier fluid into the evaporator and an opposing end in fluid communication with a sparger. 12. The device of claim 10, wherein the proximity of the heat exchanger to the evaporator is effective to maintain a ratio of the carrier fluid to the precursor that does not change by an amount of greater than or equal to about 0.5% when the ambient temperature around the heat exchanger and the evaporator fluctuates by an amount of up to about ±35° C. 13. The device of claim 10, wherein the proximity of the heat exchanger to the evaporator is effective to maintain a variation in temperature of the precursor in a fluid path from the heat exchanger to the evaporator to be less than or equal to about ±0.1° C. 14. The device of claim 10, wherein the first conduit is an inverted U-shaped conduit is disposed in the evaporator via a hole in the plate. 15. The device of claim 10, wherein the inverted J-shaped conduit is disposed in the evaporator via a hole in the plate.

이 특허에 인용된 특허 (39)

이 특허를 인용한 특허 피인용횟수: 2

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Method for constant concentration evaporation and a device using the same

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이 특허에 인용된 특허 (39)

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Method for constant concentration evaporation and a device using the same

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이 특허에 인용된 특허 (39)

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