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특허 상세정보

Method for constant concentration evaporation and a device using the same

특허상세정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판) C23C-016/448    C23C-016/44    C23C-016/455    F22B-005/00    C23C-016/06    C23C-016/22   
미국특허분류(USC) 118/723VE; 118/715; 118/663; 156/345.27; 156/345.24; 156/345.37; 122/233; 122/234
출원번호 US-0687288 (2010-01-14)
등록번호 US-8555809 (2013-10-15)
발명자 / 주소
출원인 / 주소
대리인 / 주소
    Cantor Colburn LLP
인용정보 피인용 횟수 : 2  인용 특허 : 39
초록

Disclosed herein is a device comprising an evaporator; and a heat exchanger; the heat exchanger being in fluid communication with evaporator; evaporator comprising an outer casing; and an inner casing that is disposed within the outer casing; the inner casing contacting a plate; wherein the inner casing encloses a first conduit that is operative to introduce a carrier fluid into evaporator; and a second conduit that is operative to remove carrier fluid entrained with a precursor; wherein the outer casing is detachably attached to the plate; the plate con...

대표
청구항

1. A device comprising: an evaporator; anda heat exchanger; the heat exchanger being in fluid communication with the evaporator; the evaporator comprising: an outer casing; andan inner casing that is disposed within the outer casing; the inner casing contacting a plate; wherein the inner casing encloses: a first conduit that is operative to introduce a carrier fluid into the evaporator;wherein the first conduit is an inverted U-shaped conduit that has one end in fluid communication with a first port for introducing the carrier fluid into the evaporator a...

이 특허에 인용된 특허 (39)

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