초록 ▼

Improvements in a semiconductor wafer container for reducing movement of semiconductor wafers within a wafer carrier using flexible wall segments, panels or flexible inserts in the base member's main inner containment diameter. These walls allow a vertical containment surface to move and capture the

Improvements in a semiconductor wafer container for reducing movement of semiconductor wafers within a wafer carrier using flexible wall segments, panels or flexible inserts in the base member's main inner containment diameter. These walls allow a vertical containment surface to move and capture the entire stack of wafers rather than a few wafers. The surface that contacts the wafers moves uniformly inward. The wafer stack is secured by reducing or eliminating the gap between the wafer container and the wafer stack. Further improvements include the addition of a ramped engagement surfaces in the top and/or bottom cover that provides mechanical advantage for easier assembly of the top and bottom cover. This design also allows for automated loading and unloading of the wafer stack because once the top cover is removed, the flexible walls spring back outward. Thus providing a small gap in which to freely remove the wafers.

대표청구항 ▼

1. A wafer container comprising: a top housing and a bottom housing, the bottom housing having an inner cavity for storage for at least one semiconductor wafer;the top housing having a base with at least one rib that extends perpendicular from the base of the top housing in an essentially circular o

1. A wafer container comprising: a top housing and a bottom housing, the bottom housing having an inner cavity for storage for at least one semiconductor wafer;the top housing having a base with at least one rib that extends perpendicular from the base of the top housing in an essentially circular orientation;the bottom housing having a base with at least one rib that extends perpendicular from the base of the bottom housing, wherein the at least one rib on the bottom housing is arranged concentric and at a different radius from the at least one rib that extends perpendicular from the base of the top housing, the at least one rib on the bottom housing having an arc angle of <360°;wherein the at least one rib on the bottom housing further includes at least one living hinge arranged normal to the base of the bottom housing wherein the living hinge is formed from at least one movable wall segment, wherein the at least one movable wall segment is a flexible panel within the at least one rib on the bottom housing, and wherein the at least one movable wall segment is unsupported on three sides;wherein the at least one movable wall has a first panel closing ramp, andthe top housing has a second closing ramp configured to engage with the first panel closing ramp such that when the top housing is seated on the bottom housing the first closing ramp engages the second closing ramp to push the movable wall towards the inner cavity. 2. The wafer container according to claim 1 wherein a plurality of wall segments move radially to maintain the at least one semiconductor wafer concentric with the wafer container. 3. The wafer container according to claim 1 wherein the wall segments further include elastomeric inserts that are located between the wall segment and the at least one semiconductor wafer. 4. The wafer container according to claim 1 wherein the movable wall makes contact with the at least one semiconductor wafer at a location between the living hinge and the first closing ramp. 5. The wafer container according to claim 1 that includes at least two movable walls. 6. The wafer container according to claim 1 that includes at least four movable walls. 7. The wafer container according to claim 1 that includes at least eight movable walls. 8. A wafer container comprising: a top housing and a bottom housing the bottom housing having an inner cavity for storage for at least one semiconductor wafer;the top housing having a base with least one rib that extends perpendicular from the base of the top housing in an essentially circular orientation;the bottom housing having a base with at least one rib that extends perpendicular from the base of the bottom housing, wherein the at least one rib on the bottom housing is arranged concentric and at a different radius from the at least one rib that extends perpendicular from the base of the top housing, the at least one rib on the bottom housing having an arc angle of <360°;the bottom housing having at least one latch that extends essentially perpendicular from the base of the bottom housing, wherein the distance between the base of the bottom housing to the top surface of the latch is less than the distance between the base of the bottom housing and the top of the at least one rib on the bottom housing;the top housing having at least one latch well, the latch well having a bottom surface and a rim around the well, wherein the bottom surface is located below the surface of the base of the top housing, and wherein when the top housing is joined with the bottom housing, the top surface of the latch is lower than the rim around the well, and wherein the latch well comprises a notch configured to receive the at least one latch on the bottom housing;wherein the at least one rib on the bottom housing has a plurality of flexible wall segments, wherein each flexible wall segment is a flexible panel within the at least one rib on the bottom housing, and wherein the at least one movable wall segment is unsupported on three sides;each of the plurality of flexible wall segments have a first panel closing ramp;the top housing is configured to engage with the first panel closing ramp such that when said the top housing is seated on the bottom housing the at least one rib on the top housing engages on the first panel closing rib to flex the wall segments radially inward to the inner cavity. 9. The wafer container according to claim 8 wherein the rib on the top housing further includes a closing ramp that engages on the first closing ramp. 10. The wafer container according to claim 8 wherein the closing ramps are stepped. 11. The wafer container according to claim 8 wherein the wall segments further include elastomeric inserts that are located between the wall segment and the at least one semiconductor wafer. 12. The wafer container according to claim 8 wherein the movable wall makes contact with the at least one semiconductor wafer at a location between the hinge and the first closing ramp. 13. The wafer container according to claim 8 that includes at least four movable walls. 14. The wafer container according to claim 8 that includes at least eight movable walls. 15. A wafer container comprising: a top housing and a bottom housing the bottom housing having an inner cavity for storage for at least one semiconductor wafer;the top housing having a base with least one rib that extends perpendicular from the base of the top housing in an essentially circular orientation;the bottom housing having a base with at least one rib that extends perpendicular from the base of the bottom housing, wherein the at least one rib on the bottom housing is arranged concentric and at a different radius from the at least one rib that extends perpendicular from the base of the top housing, the at least one rib on the bottom housing having an arc angle of <360°;the bottom housing having at least one latch that extends essentially perpendicular from the base of the bottom housing, wherein the distance between the base of the bottom housing to the top surface of the latch is less than the distance between the base of the bottom housing and the top of the at least one rib on the bottom housing;the top housing having at least one latch well, the latch well having a bottom surface and a rim around the well, wherein the bottom surface is located below the surface of the base of the top housing, and wherein when the top housing is joined with the bottom housing, the top surface of the latch is lower than the rim around the well, and wherein the latch well comprises a notch configured to receive the at least one latch on the bottom housing;wherein the at least one rib on the bottom housing further includes at least one hinge arranged normal to the essentially planar base and at least one movable wall segment that is articulable from the hinge such that the at least one movable wall segment can hinge to make contact with the at least one semiconductor wafer, wherein each flexible wall segment is a flexible panel within the at least one rib on the bottom housing, and wherein the at least one movable wall segment is unsupported on three sides. 16. The wafer container according to claim 15 wherein a plurality of wall segments move radially to maintain the at least one semiconductor wafer concentric with the wafer container. 17. The wafer container according to claim 15 wherein the at least one movable wall is articulated when the top housing is nested on the bottom housing. 18. The wafer container according to claim 17 wherein the articulation is with complimentary ribs located on the top and the bottom housings. 19. The wafer container according to claim 18 wherein at least one of the complimentary ribs on the top or the bottom housing is stepped. 20. The wafer container according to claim 15 wherein at least one of the complimentary ribs on the top or the bottom housing is ramped.