Machine having an air bearing and method for operating such a machine
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
B25B-001/22
H02K-033/00
H02P-005/00
G05B-001/06
B23Q-001/38
출원번호
US-0552852
(2012-07-19)
등록번호
US-8590875
(2013-11-26)
우선권정보
DE-10 2010 006 297 (2010-01-21)
발명자
/ 주소
Stumpp, Ernst
출원인 / 주소
Carl Zeiss Industrielle Messtechnik GmbH
대리인 / 주소
Harness, Dickey & Pierce, P.L.C.
인용정보
피인용 횟수 :
1인용 특허 :
11
초록▼
A machine has a frame structure for moving a machine head in one or more spatial directions. The frame structure comprises an actuator and an air bearing for moving the head. The machine also comprises a compressed air feed connected to the air bearing for providing a compressed air flow. A restrict
A machine has a frame structure for moving a machine head in one or more spatial directions. The frame structure comprises an actuator and an air bearing for moving the head. The machine also comprises a compressed air feed connected to the air bearing for providing a compressed air flow. A restrictor defines the compressed air flow to the air bearing. The machine has a first operating state, in which a high compressed air flow is defined and in which the actuator can be actuated. The machine has a second operating state, in which a compressed air flow lower than the high compressed air flow is defined. In the second operating state, the actuator is secured against actuation from a closed-loop position controller, while the closed-loop position controller is maintained in operation.
대표청구항▼
1. A machine comprising: a frame structure comprising at least one actuator and at least one air bearing,a head moveably arranged on said frame structure via said air bearing, said actuator being configured to move the head,a compressed air feed connected to the air bearing for providing a compresse
1. A machine comprising: a frame structure comprising at least one actuator and at least one air bearing,a head moveably arranged on said frame structure via said air bearing, said actuator being configured to move the head,a compressed air feed connected to the air bearing for providing a compressed air flow for the air bearing,a restrictor configured to define the compressed air flow to the air bearing,a control and evaluation unit configured to selectively control the restrictor in order to define a first compressed air flow in a first operating state and to define a second compressed air flow in a second operating state, with the second compressed air flow being substantially lower than the first compressed air flow, anda closed-loop position controller designed to control a position of the head by driving the actuator,wherein the control and evaluation unit is further configured to secure the actuator against actuation in the second operating state, thereby preventing the actuator from being driven by the closed-loop position controller, andwherein the closed-loop position controller is in full operation both in the first operating state and in the second operating state as well. 2. The machine of claim 1, wherein the second compressed air flow corresponds to zero. 3. The machine of claim 1, wherein the second compressed air flow is greater than zero. 4. The machine of claim 1, wherein the actuator is an electrical drive. 5. The machine of claim 4, further comprising a switching device for switching an electrical current supply to the electrical drive, wherein the current supply is connected to the electrical drive in the first operating state and wherein the current supply is separated from the electrical drive in the second operating state in order to secure the electrical drive against actuation. 6. The machine of claim 5, further comprising a power amplifier stage, wherein the switching device is arranged between the power amplifier stage and the electrical drive. 7. The machine of claim 5, further comprising a current source and a power amplifier stage, wherein the switching device is arranged between the current source and the power amplifier stage. 8. The machine of claim 1, further comprising a time control, which automatically triggers a transition from the first operating state to the second operating state. 9. The machine of claim 1, further comprising an input device, which when actuated triggers a transition from the second operating state to the first operating state. 10. The machine of claim 9, wherein the input device is a joystick for manually actuating the actuator. 11. The machine of claim 1, wherein the restrictor is a solenoid valve. 12. The machine of claim 1, wherein the compressed air feed comprises a compressed air sensor connected to the control and evaluation unit. 13. A machine comprising a frame structure on which a head is arranged, the frame structure having an actuator and an air bearing for displacing the head, comprising a compressed air feed connected to the air bearing and providing a compressed air flow for the air bearing, comprising a restrictor which defines the compressed air flow, comprising a first operating state in which a high compressed air flow is defined and in which the actuator can be actuated, comprising a control and evaluation unit designed to control the actuator, and comprising a second operating state in which a compressed air flow lower than the high compressed air flow is defined and the actuator is secured against actuation, wherein the control and evaluation unit is further designed to control the restrictor and to secure the actuator against actuation in the second operating state, and comprising a closed-loop position controller which controls a position of the head by means of the actuator, wherein the closed-loop position controller is in operation both in the first operating state and in the second operating state, and wherein securing of the actuator prevents the actuator from being actuated by an actuation attempt of the closed-loop position controller. 14. The machine of claim 13, wherein the actuator is an electrical drive. 15. The machine of claim 14, further comprising a switching device for switching an electrical current supply to the electrical drive, wherein the current supply is connected to the electrical drive in the first operating state and wherein the current supply is separated from the electrical drive in the second operating state in order to secure the electrical drive against actuation. 16. A method for operating a machine having a frame structure on which a head is moveably arranged, wherein the frame structure comprises an actuator and an air bearing for moving the head, the method comprising the steps of: providing a compressed air flow for the air bearing,establishing a first operating state, in which a first compressed air flow is defined and in which the actuator can be actuated in response to control signals from a closed-loop position controller, andestablishing a second operating state, in which a second compressed air flow is defined by means of a restrictor, said second compressed air flow being substantially lower than the first compressed air flow,wherein the actuator is secured against actuation by the closed-loop position controller in the second operating state, andwherein the closed-loop position controller is maintained in operation in the first operating state and in the second operating state as well,wherein securing of the actuator prevents the actuator from being driven by the closed-loop position controller.
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