초록 ▼

A semiconductor workpiece processing apparatus having a first chamber, a transport vehicle, and another chamber. The first chamber is capable of being isolated from an outside atmosphere. The transport vehicle is located in the first chamber and is movably supported from the first chamber for moving

A semiconductor workpiece processing apparatus having a first chamber, a transport vehicle, and another chamber. The first chamber is capable of being isolated from an outside atmosphere. The transport vehicle is located in the first chamber and is movably supported from the first chamber for moving linearly relative to the first chamber. The transport vehicle includes a base, and an integral semiconductor workpiece transfer arm movably mounted to the base and capable of multi-access movement relative to the base. The other chamber is communicably connected to the first chamber via a closable opening of the first chamber. The opening is sized to allow the transport vehicle to transit between the first chamber and the other chamber through the opening.

대표청구항 ▼

1. A substrate processing apparatus comprising: a transport chamber capable of holding a sealed atmosphere sealed off from atmosphere exterior to the transport chamber;at least one substrate holding module for holding a substrate, the at least one holding module being communicably connected to the t

1. A substrate processing apparatus comprising: a transport chamber capable of holding a sealed atmosphere sealed off from atmosphere exterior to the transport chamber;at least one substrate holding module for holding a substrate, the at least one holding module being communicably connected to the transport chamber for allowing transfer of the substrate between the at least one holding module and transport chamber;a transport vehicle movably mounted in the transport chamber, the vehicle having a base and a substrate transfer arm that is movably jointed and movably mounted to the base; andanother module capable of holding the substrate and communicably connected to the transport chamber for transferring the substrate therebetween,wherein the transport chamber defines a linear travel slot for the transport vehicle, the at least one holding module being located on one side of the slot, and the arm having articulation for moving a substrate to opposite sides of the slot allowing the other module to be selectably connected to the transport chamber on either side of the slot, wherein the substrate processing system includes a drive section having drive elements, that generate a force impinging on the transport vehicle, that is common to both driving the transport vehicle along the linear travel slot and effecting articulation of the arm where the transport vehicle can effect transfer of the substrate between the transport chamber and both the at least one holding module and the other module. 2. The apparatus according to claim 1, wherein the at least one holding module is a substrate processing chamber module, and the other module is a load lock chamber module. 3. The apparatus according to claim 1, wherein the at least one holding module is a load lock chamber module, and the other module is another load lock chamber module. 4. The apparatus according to claim 1, wherein the at least one holding module is a substrate processing chamber module, and the other module is another substrate processing chamber module. 5. The apparatus according to claim 1, wherein the other module can be connected to an end of the transport chamber. 6. The apparatus according to claim 1, wherein the transport chamber extends between the at least one holding module and the other module, when the other module is connected on an opposite side of the slot from the at least one holding module. 7. The apparatus according to claim 1, wherein the arm is rotatable relative to the base of the transport vehicle. 8. The apparatus according to claim 1, wherein the drive section comprises a linear motor connected to the transport chamber for driving the transport vehicle. 9. The apparatus according to claim 8, wherein the linear motor is connected to the arm for rotating the arm relative to the base and articulating the arm in opposite directions. 10. A substrate processing apparatus comprising: a transport chamber capable of holding a sealed atmosphere sealed off from atmosphere exterior to the transport chamber;the transport chamber having a plurality of sealable ports distributed along sides of the transport chamber, the plurality of sealable ports being configured to communicably connect the transport chamber to at least one substrate holding module for allowing transfer of the substrate between the at least one substrate holding module and the transport chamber;a transport vehicle movably mounted in the transport chamber, the vehicle having a base and a substrate transfer arm that is movably jointed and movably mounted to the base; andanother module capable of holding the substrate and communicably connected to the transport chamber for transferring the substrate therebetween,wherein the transport chamber defines a linear travel slot for the transport vehicle, and the arm having articulation for moving a substrate to opposite sides of the slot allowing the other module to be selectably connected to the transport chamber on either side of the slot, wherein the substrate processing system includes a drive section having drive elements, that generate a force impinging on the transport vehicle, that is common to both driving the transport vehicle along the linear travel slot and effecting articulation of the arm where the transport vehicle can effect transfer of the substrate between the transport chamber and both the at least one holding module and the other module. 11. The substrate processing apparatus according to claim 10, wherein the arm is rotatable relative to the base of the transport vehicle. 12. The substrate processing apparatus according to claim 10, wherein the drive section comprises a linear motor connected to the transport chamber for driving the transport vehicle. 13. The substrate processing apparatus according to claim 12, wherein the linear motor is connected to the arm for rotating the arm relative to the base and articulating the arm in opposite directions.