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Method of manufacturing a resonating structure 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H04R-031/00
  • G01P-015/09
  • G01P-015/097
  • H03H-009/02
  • H01F-003/04
  • H01L-041/04
출원번호 US-0186428 (2011-07-19)
등록번호 US-8689426 (2014-04-08)
발명자 / 주소
  • Thalmayr, Florian
  • Kuypers, Jan H.
  • Schoepf, Klaus Juergen
출원인 / 주소
  • Sand 9, Inc.
대리인 / 주소
    Guntin & Gust, PLC
인용정보 피인용 횟수 : 5  인용 특허 : 57

초록

Aspects of the subject disclosure include, for example, obtaining a mechanical resonating structure comprising a compensating structure, where the compensating structure comprises one or more materials having an adaptive stiffness that reduces a variance in a resonating frequency of the mechanical r

대표청구항

1. A method, comprising: constructing a mechanical resonating structure by applying an active layer on a surface of a compensating structure, wherein the compensating structure comprises: a first layer having a stiffness that adapts to a change in temperature over a first temperature range;a third l

이 특허에 인용된 특허 (57)

  1. Higuchi, Takamitsu; Ono, Yasuhiro, Acceleration sensor incorporating a piezoelectric device.
  2. Nakamura Takeshi (Uji JPX), Acceleration sensor with compensation for ambient temperature change.
  3. John Dwight Larson, III, Acoustic wave resonator and method of operating the same to maintain resonance when subjected to temperature variations.
  4. Wang, Li-Peng; Dibattista, Michael; Fortuna, Seth; Ma, Qing; Rao, Valluri, Adjusting the frequency of film bulk acoustic resonators.
  5. DeFreese Jeffrey A. (Mount Prospect IL) Lind Theodore E. (Lombard IL), Apparatus and method for adjusting the frequency of a resonator by laser.
  6. Ma, Qing; Berlin, Andy, Apparatus for adjusting the resonance frequency of a microelectromechanical (MEMS) resonator using tensile/compressive strain and applications thereof.
  7. Kasai Yoshihiko (Yokohama JPX) Hayashi Tsunenori (Kawasaki JPX), Automatic frequency adjusting method for mechanical resonators.
  8. Robert,Philippe; Ancey,Pascal; Caruyer,Gr챕gory, Bulk acoustic resonator with matched resonance frequency and fabrication process.
  9. Apostolos John T., Bulk acoustic wave device with lamb wave mode selection.
  10. Piazza, Gianluca; Stephanou, Philip J.; Pisano, Albert P., Contour-mode piezoelectric micromechanical resonators.
  11. Piazza,Gianluca; Stephanou,Philip J.; Pisano,Albert P., Contour-mode piezoelectric micromechanical resonators.
  12. Mohanty,Pritiraj; Badzey,Robert L.; Gaidarzhy,Alexei; Zolfagharkhani,Guiti, Controllable nanomechanical memory element.
  13. Paros, Jerome M.; Schaad, Theo P., Digital angular rate and acceleration sensor.
  14. Woodruff, James R.; Hesketh, Peter J., Electrostatic drive for accelerometer.
  15. Larson, III, John D.; Choy, John; Lee, Donald E.; Grannen, Kevin J.; Feng, Hongjun; Rogers, Carrie A.; Sridharan, Urupattur C., Film bulk acoustic resonator (FBAR) devices with temperature compensation.
  16. Partridge,Aaron; Lutz,Markus, Frequency and/or phase compensated microelectromechanical oscillator.
  17. Wanuga Stephen (Liverpool NY) Kong Wendell M. T. (Liverpool NY) Stearns Cleo M. (Jamesville NY), Frequency trimming of saw resonators.
  18. Cross Peter S. (Palo Alto CA) Shreve William R. (Sunnyvale CA), Frequency trimming of surface acoustic wave devices.
  19. Shih, Wen-Ching; Wang, Hui-Min, High frequency surface acoustic wave device and the substrate thereof.
  20. Chan Tsiu Chiu ; DeSilva Melvin Joseph ; Sunkara Syama Sundar, Integrated released beam oscillator and associated methods.
  21. Ogami, Takashi; Yamamoto, Kansho; Kadota, Michio, Lamb wave device.
  22. Tai, Tomoyoshi; Sakai, Masahiro; Ohsugi, Yukihisa, Lamb wave device.
  23. Belot, Didier; Cathelin, Andreia; Shirakawa, Alexandre Augusto; Pham, Jean-Marie; Jary, Pierre; Kerherve, Eric, Lamb wave resonator.
  24. Tanaka, Satoru, Lamb wave type high frequency device.
  25. Tanaka,Satoru, Lamb-wave high-frequency resonator.
  26. John T. Williams, Low radiation capture cross-section electrode material for prompt radiation environments.
  27. Duwel,Amy E.; Carter,David J.; Mescher,Mark J.; Varghese,Mathew; Antkowiak,Bernard M.; Weinberg,Marc S., MEMS piezoelectric longitudinal mode resonator.
  28. Tada,Masahiro, MEMS type oscillator, process for fabricating the same, filter, and communication unit.
  29. Nguyen, Clark T.-C., Method and apparatus for generating a signal having at least one desired output frequency utilizing a bank of vibrating micromechanical devices.
  30. Lutz,Markus; Partridge,Aaron, Method for adjusting the frequency of a MEMS resonator.
  31. Huang,Xiangxiang; MacDonald,James D.; Hsu,Wan Thai, Method for frequency tuning of a micro-mechanical resonator.
  32. Tanski William J. (Maynard MA), Method for post fabrication frequency trimming of surface acoustic wave devices.
  33. Dworsky Lawrence N. (Northbrook IL) Weisman Douglas H. (North Lauderdale FL) Ninh Loi Q. (Lauderhill FL), Method for tuning piezoelectric resonators.
  34. Kihara,Ryuji; Nakajima,Takuya; Furuhata,Makoto, Micromechanical electrostatic resonator.
  35. Hsu, Wan-Thai; Nguyen, Clark T. C., Micromechanical resonator device.
  36. Arimura Hiroyuki,JPX ; Kawano Kimonori,JPX, Multiple-mode piezoelectric filter with acoustic and electromagnetic separation between stages.
  37. Adams Scott G. ; Wang Yongmei Cindy ; Macdonald Noel C. ; Thorp James S., Multistable tunable micromechanical resonators.
  38. Mohanty, Pritiraj; Badzey, Robert L., Nano electromechanical integrated-circuit bank and switch.
  39. Ayazi, Farrokh; Abdolvand, Reza, Piezo-on-diamond resonators and resonator systems.
  40. Ayazi, Farrokh; Piazza, Gianluca; Abdolvand, Reza; Ho, Gavin Kar-Fai; Humad, Shweta, Piezoelectric on semiconductor-on-insulator microelectromechanical resonators.
  41. Nakamura Takeshi (Nagaokakyo JPX) Kaneko Takayuki (Nagaokakyo JPX), Piezoelectric vibrator and acceleration sensor using the same.
  42. Mattila,Tomi; Oja,Aarne; Jaakkola,Olli; Seppā,Heikki, Reference oscillator frequency stabilization.
  43. Roessig Trey ; Howe Roger T. ; Pisano Albert P., Resonant accelerometer with flexural lever leverage system.
  44. Bradley, Paul D.; Lee, Donald; Figueredo, Domingo A., Resonator with seed layer.
  45. Andres Donald (Foxboro MA) Parker Thomas E. (Framingham MA), Saw device and method of manufacture.
  46. Lakin,Kenneth Meade, Single-port multi-resonator acoustic resonator device.
  47. Quevy,Emmanuel P.; Howe,Roger T., Temperature compensated oscillator including MEMS resonator for frequency control.
  48. Lutz,Markus; Partridge,Aaron, Temperature compensation for silicon MEMS resonator.
  49. Giousouf, Metin; K?ck, Heinz; Platz, Rainer, Temperature compensation mechanism for a micromechanical ring resonator.
  50. Lutz,Markus; Partridge,Aaron, Temperature controlled MEMS resonator and method for controlling resonator frequency.
  51. Giousouf, Metin; Kück, Heinz; Platz, Rainer, Time base comprising an integrated micromechanical tuning fork resonator.
  52. Clark, William W.; Wang, Qing-Ming, Tunable piezoelectric micro-mechanical resonator.
  53. Woodruff James R. (Redmond WA) Robinson Michael J. (Mukilteo WA), Two-port electromagnetic drive for a double-ended tuning fork.
  54. Feng, Xiao-Li; White, Christopher J.; Hajimiri, Seyed Ali; Roukes, Michael L., Ultra-high frequency self-sustaining oscillators, coupled oscillators, voltage-controlled oscillators, and oscillator arrays based on vibrating nanoelectromechanical resonators.
  55. Badillo, Dean A.; Rebel, Reimund; Schoepf, Klaus Juergen, Variable phase amplifier circuit and method of use.
  56. Yu,Lianzhong, Vibrating beam accelerometer.
  57. Heinouchi Yoshiaki,JPX, Vibrator.

이 특허를 인용한 특허 (5)

  1. Flewitt, Andrew; Milne, William; Garcia-Gancedo, Luis; Luo, Jack, Measurement method using a sensor; sensor system and sensor.
  2. Thalmayr, Florian; Kuypers, Jan H.; Schoepf, Klaus Juergen, Method of manufacturing a mechanical resonating structure.
  3. Olsson, Roy H.; Friedmann, Thomas A.; Jensen Homeijer, Sara; Wiwi, Michael; Hattar, Khalid Mikhiel; Clark, Blythe; Bauer, Todd; Van Deusen, Stuart B., Single crystal micromechanical resonator.
  4. Olsson, Roy H.; Friedmann, Thomas A.; Homeijer, Sara Jensen; Wiwi, Michael; Hattar, Khalid Mikhiel; Clark, Blythe; Bauer, Todd; Van Deusen, Stuart B., Single crystal micromechanical resonator and fabrication methods thereof.
  5. Hoffberg, Steven M., Steerable rotating projectile.
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