초록 ▼

A thin flange for insertion between two ultra-high vacuum flanges includes opposing, parallel sealing surfaces. The sealing surfaces can be surrounded by mounting surfaces having mounting holes therein alignable with holes in the flanges. Forces applied by bolts inserted through the aligned holes ar

A thin flange for insertion between two ultra-high vacuum flanges includes opposing, parallel sealing surfaces. The sealing surfaces can be surrounded by mounting surfaces having mounting holes therein alignable with holes in the flanges. Forces applied by bolts inserted through the aligned holes are distributed by the flanges so that the thin flange is subjected only to symmetric, compressive forces. Since no deforming forces are applied to the thin flange, the thickness of the thin flange can be less than previously attained, and can be less than 15% of its diameter, or even less than 6.5%. The thickness of the thin flange can be less than 0.28 inches or less than 0.16 inches. Knife edges on the sealing surfaces pressed against soft metal gaskets can form vacuum seals. The thin flange can include a feature such as an inward-facing mounting groove, a threaded mounting bore, and/or an electrical feed-through.

대표청구항 ▼

1. An ultra-high vacuum system configured for creating an ultra-high vacuum in a vacuum space, the ultra-high vacuum system comprising: a first soft metal gasket and a second soft metal gasket, said first and second soft metal gaskets being annular;a first thick flange, said first thick flange being

1. An ultra-high vacuum system configured for creating an ultra-high vacuum in a vacuum space, the ultra-high vacuum system comprising: a first soft metal gasket and a second soft metal gasket, said first and second soft metal gaskets being annular;a first thick flange, said first thick flange being annular, said first thick flange being penetrated by a first plurality of bolt holes arranged about its periphery, said first thick flange including a third metal knife edge configured for pressing into the first soft metal gasket when the first soft metal gasket is pressed against the first thick flange;a second thick flange, said second thick flange being annular, said second thick flange being penetrated by a second plurality of bolt holes, corresponding bolt holes of said first and second pluralities of bolt holes being alignable so as to permit insertion of bolts through the aligned bolt holes, said second thick flange including a fourth metal knife edge configured for pressing into the second soft metal gasket when the second soft metal gasket is pressed against the second thick flangea thin flange, said thin flange being annular, a first face of the thin flange having a first substantially flat sealing surface surrounded by a substantially flat, planar first clamping surface, the first sealing surface being bounded by a first inner sealing perimeter and a first outer sealing perimeter, the first sealing surface including a first metal knife edge configured for pressing into the first soft metal gasket when the first soft metal gasket is compressed between the first sealing surface and the first thick flange, said first soft metal gasket having an outer diameter that is not larger than the first outer sealing perimeter, said first knife edge being a single annulus surrounding the first inner sealing perimeter;a second face of the thin flange being opposed to and substantially parallel to the first face, the second face having a substantially flat second sealing surface surrounded by a substantially flat planar second clamping surface, the second sealing surface being bounded by a second inner sealing perimeter and a second outer sealing perimeter, the second sealing surface including a second metal knife edge configured for pressing into the second soft metal gasket when the second soft metal gasket is compressed between the second sealing surface and the second thick flange, said second soft metal gasket having an outer diameter that is not larger than the second outer sealing perimeter, said second knife edge being a single annulus surrounding the second inner sealing perimeter, the second clamping surface being in at least partly overlapping relationship with the first clamping surface, the first clamping surface and the second clamping surface being separated by a clamping thickness that is thinner than said first thick flange and said second thick flange;the thin flange being locatable between the thick flanges such that it does not interfere with alignment of the corresponding bolt holes of the thick flanges, so that bolts can be inserted through the aligned bolt holes and tightened, thereby clamping the thick flanges together, the thin flange being sandwiched there between, so that all clamping forces applied by the bolts to the thick flanges are distributed by the two thick flanges and are applied only as a symmetric, compressive force to the thin flange; andsaid ultra-high vacuum system being configured to maintain an internal vacuum having a residual pressure of less than 10-6 Torr. 2. The thin flange according to claim 1 comprising at least one mounting feature disposed within at least one of the inner sealing perimeters, said mounting feature being oriented substantially parallel to said first and second faces of said thin flange. 3. The thin flange according to claim 2 wherein the at least one mounting feature comprises at least one groove formed in an inward facing surface of the thin flange. 4. The thin flange according to claim 2 wherein the at least one mounting feature comprises at least one threaded bore. 5. The thin flange according to claim 2 wherein the at least one mounting feature includes an electrical feed-through configured to provide electrical but not gas communication between a region outside of the vacuum space and a region inside of the vacuum space without making electrical contact with any other metal included in the thin flange. 6. The thin flange according to claim 1 wherein the clamping thickness is less than 15% of an outer diameter of the thin flange. 7. The thin flange according to claim 1 wherein the clamping thickness is less than 6.5% of an outer diameter of the thin flange. 8. The thin flange according to claim 1 wherein the clamping thickness is less than 0.75 inches. 9. The thin flange according to claim 1 wherein the clamping thickness is less than 0.28 inches. 10. The thin flange according to claim 1 wherein the clamping thickness is less than 0.16 inches. 11. The thin flange according to claim 1, wherein an outer diameter of the thin flange is less than five inches. 12. The thin flange according to claim 1, wherein the thin flange further comprises a plurality of mounting holes, each of the mounting holes penetrating the thin flange through both the first clamping surface and the second clamping surface, each of the mounting holes being alignable with a corresponding bolt hole disposed in the first thick flange and with a corresponding bolt hole disposed in the second thick flange, such that when the thin flange is disposed between the two thick flanges bolts can be installed and tightened through the aligned holes so as to apply a symmetric, compressive force to the thin flange. 13. A method for mounting a structure within a vacuum space of an ultra-high vacuum system or providing access for a penetrating item to penetrate from outside the vacuum space into the vacuum space, the method comprising: providing an ultra-high vacuum system having a first soft metal gasket and a second soft metal gasket, said first and second soft metal gaskets being annular, and a first thick flange and a second thick flange, the first thick flange and the second thick flange being annular and being alignable so as to enable alignment of corresponding bolt holes in the first and second thick flanges, the first thick flange including a third metal knife edge configured for pressing into the first soft metal gasket when the first soft metal gasket is pressed against the first thick flange, the second thick flange including a fourth metal knife edge configured for pressing into the second soft metal gasket when the second soft metal gasket is pressed against the second thick flange;providing a thin flange, said thin flange being annular, the thin flange including a first face having a substantially flat first sealing surface surrounded by a substantially flat planar first clamping surface, the first sealing surface being bounded by a first inner sealing perimeter and a first outer sealing perimeter, the thin flange further including a second face opposed to and substantially parallel to the first face, the second face having a second substantially flat sealing surface surrounded by a substantially flat planar second clamping surface, the second sealing surface being bounded by a second inner sealing perimeter and a second outer sealing perimeter, the first sealing surface including a first metal knife edge configured for pressing into the first soft metal gasket compressed between the first sealing surface and the first thick flange, said first soft metal gasket having an outer diameter that is not larger than the first outer sealing perimeter, said first knife edge being a single annulus surrounding the first inner sealing perimeter, the second sealing surface including a second metal knife edge configured for pressing into the second soft metal gasket compressed between the second sealing surface and the second thick flange, said second soft metal gasket having an outer diameter that is not larger than the second outer sealing perimeter, said second knife edge being a single annulus surrounding the second inner sealing perimeter, the second clamping surface being in at least partly overlapping relationship with the first clamping surface, the first clamping surface and the second clamping surface being separated by a clamping thickness that is thinner than said first thick flange and said second thick flange, the thin flange being insertable between the thick flanges so as to permit alignment of the corresponding bolt holes and insertion of bolts through the aligned holes;locating the thin flange between the first thick flange and the second thick flange;locating the first soft metal gasket between the first sealing face and the first thick flange;locating the second soft metal gasket between the second sealing face and the second thick flange;aligning the holes in the first thick flange with the holes in the second thick flange;installing bolts through the aligned holes; andtightening the bolts so as to apply forces which compress the thick flanges together and press the knife edges into the soft metal gaskets, the clamping surfaces of the thin flange being sandwiched between the thick flanges, the thick flanges thereby distributing the forces applied by the bolts in a symmetric manner which applies only a compressive force to the clamping surfaces of the thin flange, thereby forming seals between the thin flange and the thick flanges that are able to maintain an internal vacuum in the ultra-high vacuum system having a residual pressure of less than 10-6 Torr. 14. The method of claim 13, wherein at least one of the holes in the thick flanges is a threaded hole, and tightening the bolts includes threading a bolt into the threaded hole. 15. The method of claim 13, wherein inserting the bolts includes passing at least one of the bolts completely through holes in the thick flanges and the thin flange, so that a threaded end of the bolt extends beyond one of the thick flanges, and tightening the bolts includes tightening a nut onto the extending threaded end of the bolt. 16. The method according to claim 13, wherein the thin flange includes at least one mounting feature disposed within at least one of the inner sealing perimeters, said mounting feature being oriented substantially parallel to said first and second faces of said thin flange. 17. The method according to claim 16 wherein the at least one mounting feature includes at least one groove formed in an inward facing surface of the thin flange. 18. The method according to claim 16 wherein the at least one mounting feature comprises at least one threaded bore. 19. The method according to claim 16 wherein the at least one mounting feature includes at least one electrical feed-through configured to provide electrical but not gas communication between a region outside of the vacuum space and a region inside of the vacuum space without making electrical contact with any other metal included in the thin flange. 20. The method according to claim 13 wherein the clamping thickness of the thin flange is less than 15% of an outer diameter of the thin flange. 21. The method according to claim 13 wherein the clamping thickness of the thin flange is less than 6.5% of an outer diameter of the thin flange. 22. The method according to claim 13 wherein the clamping thickness of the thin flange is less than 0.75 inches. 23. The method according to claim 13 wherein the clamping thickness of the thin flange is less than 0.28 inches. 24. The method according to claim 13 wherein the clamping thickness of the thin flange is less than 0.16 inches. 25. The method according to claim 13, wherein an outer diameter of the thin flange is less than five inches. 26. The method of claim 13, wherein the thin flange further includes a plurality of mounting holes, each of the mounting holes penetrating the thin flange through both the first clamping surface and the second clamping surface, each of the mounting holes being alignable with corresponding bolt holes disposed in the first and second thick flanges, and the method further includes: aligning the mounting holes in the thin flange with the aligned bolt holes in the first and second thick flanges so as to permit installation of bolts through the aligned holes.