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Method and structure of monolithically integrated IC-MEMS oscillator using IC foundry-compatible processes 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-031/036
출원번호 US-0311538 (2011-12-05)
등록번호 US-8704238 (2014-04-22)
발명자 / 주소
  • Yang, Xiao (Charles)
출원인 / 주소
  • mCube Inc.
대리인 / 주소
    Kilpatrick Townsend & Stockton LLP
인용정보 피인용 횟수 : 9  인용 특허 : 20

초록

A three-dimensional integrated circuit device includes a first substrate having a first crystal orientation comprising at least one or more PMOS devices thereon and a first dielectric layer overlying the one or more PMOS devices. The three-dimensional integrated circuit device also includes a second

대표청구항

1. A three-dimensional integrated circuit device comprising: a first substrate having a first crystal orientation, and including: at least one or more PMOS device thereon; anda first dielectric layer overlying the one or more PMOS devices;a second substrate having a second crystal orientation and in

이 특허에 인용된 특허 (20)

  1. Tafani Jean-Pierre (Paris FRX) Valter Francis (Chatenay Malabry FRX) Zeghal Slim (Paris FRX) Alexandre Jean (Paris FRX), Device for delivering a pharmacologically active principle by electrolytic pumping.
  2. Cole Barrett E. ; Higashi Robert E. ; Ridley Jeffrey A., Dual wafer attachment process.
  3. Russ, Cornelius Christian; Alvarez, David; Chatty, Kiran V.; Schneider, Jens; Gauthier, Robert; Wendel, Martin, ESD protection device and method.
  4. Lee Jian-Hsing,TWX ; Wu Yi-Hsun,TWX ; Shih Jiaw-Ren,TWX, Electro-static discharge protection structure for semiconductor devices.
  5. Gross Joseph (Moshav Mazor ILX) Zucker Shlomo (Yavne ILX), Electrochemically driven metering medicament dispenser.
  6. Gossner,Harald, Electrostatic discharge protection.
  7. Watanabe, Mikio, Image sensor and digital camera.
  8. Jack Michael D. ; Ray Michael ; Wyles Richard H., Integrated IR, visible and NIR sensor and methods of fabricating same.
  9. Buchwalter, Leena Paivikki; Chan, Kevin Kok; Dalton, Timothy Joseph; Jahnes, Christopher Vincent; Lund, Jennifer Louise; Petrarca, Kevin Shawn; Speidell, James Louis; Ziegler, James Francis, Low temperature Bi-CMOS compatible process for MEMS RF resonators and filters.
  10. Meng, Ellis; Tai, Yu-Chong; Humayun, Mark S.; Agrawal, Rajat; Lo, Ronalee; Shih, Jason; Kuwahara, Kenrick; Li, Po-Ying; Rodger, Damien; Chen, Po-Jui, MEMS device and method for delivery of therapeutic agents.
  11. Yang, Xiao (Charles), Method and structure of wafer level encapsulation of integrated circuits with cavity.
  12. Yang, Xiao (Charles), Method and structures of monolithically integrated ESD suppression device.
  13. Pedersen, Michael, Method of fabricating an acoustic transducer.
  14. Gan,Chih Kiong Terence; Agarwal,Ajay; Singh,Janak; Zhang,Xiaolin, Method of making a single-crystal-silicon 3D micromirror.
  15. Christopher W. Dyck ; James J. Allen ; Robert J. Huber, Microelectromechanical dual-mass resonator structure.
  16. Fitzgibbons Eugene T. ; Han Chien-Jih, Pixel structure having a bolometer with spaced apart absorber and transducer layers and an associated fabrication method.
  17. Yasumoto Masaaki (Tokyo JPX) Hayama Hiroshi (Tokyo JPX) Enomoto Tadayoshi (Tokyo JPX), Process of fabricating three-dimensional semiconductor device.
  18. Weigold, Jason W., Support apparatus for microphone diaphragm.
  19. Zhu, Xu; Ciferno, Raymond A., Ultrathin form factor MEMS microphones and microspeakers.
  20. Ouellet, Luc, Wafer-level MEMS packaging.

이 특허를 인용한 특허 (9)

  1. Boysel, Robert Mark; Ross, Louis, 3D MEMS device and method of manufacturing.
  2. Boysel, Robert Mark; Ross, Louis, Integrated MEMS system.
  3. Harame, David L.; Stamper, Anthony K., Integrated semiconductor devices with single crystalline beam, methods of manufacture and design structure.
  4. Harame, David L.; Stamper, Anthony K., Integrated semiconductor devices with single crystalline beam, methods of manufacture and design structure.
  5. Yang, Xiao (Charles), Method and structure of three dimensional CMOS transistors with hybrid crystal orientations.
  6. Yoo, Ilseon, Method of manufacturing microphone, microphone, and control method therefor.
  7. Reinmuth, Jochen, Microelectromechanical component and manufacturing method for microelectromechanical components.
  8. Tsai, Cheng-Wei; Lee, Chien-Hsing; Liou, Jhyy-Cheng, Microelectromechanical system (MEMS) microphone with protection film and MEMS microphonechips at wafer level.
  9. Bai, John She, Universal hermetically sealed button pressure sensor.
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