[특허]Carbon nanotube MEMS assembly

Carbon nanotube MEMS assembly 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	H02N-001/00 H02N-010/00
출원번호	US-0239302 (2008-09-26)
등록번호	US-8736138 (2014-05-27)
발명자 / 주소	Davis, Robert C. Vanfleet, Richard R. Hutchison, David N.
출원인 / 주소	Brigham Young University
인용정보	피인용 횟수 : 0 인용 특허 : 181

초록 ▼

A carbon nanotube MEMS assembly comprises a plurality of carbon nanotubes oriented into a patterned frame, the patterned frame defining at least two components of a MEMS device. An interstitial material at least partially binds adjacent carbon nanotubes one to another. At least one component of the

대표청구항 ▼

1. A carbon nanotube MEMS assembly, comprising: a plurality of carbon nanotubes oriented in a generally linear orientation into a patterned frame, the plurality of nanotubes extending vertically from a base of the frame to a face of the frame, the patterned frame defining at least two components of a MEMS device, the frame comprising one or more passages;an interstitial material, at least partially binding adjacent carbon nanotubes one to another;at least one component of the frame being fixed and at least one component of the frame being movable relative to the fixed component;wherein the nanotubes oriented into the frame define in the frame one or more interstitial material access holes, wherein each of the interstitial material access holes extends from the face of the frame to the base of the frame and is substantially devoid of nanotubes;wherein the one or more passages are substantially devoid of nanotubes coated with the interstitial material, andwherein the size of the one or more passages is greater than the size of the one or more interstitial material access holes. 2. The MEMS assembly of claim 1, wherein the at least one fixed component is attached to a substrate. 3. The MEMS assembly of claim 1, wherein the size of the interstitial material access holes is greater than the size of interstices between adjacent nanotubes. 4. The MEMS assembly of claim 3, wherein adjacent nanotubes are interlocked one with another. 5. The MEMS assembly of claim 3, wherein the size of the one or more passages is 10 microns or greater and the size of the one or more interstitial material access holes is from about 3 to about 20 microns. 6. The MEMS assembly of claim 5, wherein the interstitial material access holes have a size larger than an interstice between adjacent nanotubes. 7. The MEMS assembly of claim 1, wherein the assembly comprises a thermomechanical in-plane microactuator. 8. The MEMS assembly of claim 1, wherein the assembly comprises a comb drive. 9. The MEMS assembly of claim 1, wherein the assembly comprises a bistable mechanism. 10. The MEMS assembly of claim 1, wherein the interstitial material comprises a material applied by a vapor deposition process. 11. The MEMS assembly of claim 10, wherein the interstitial material floor layer in areas adjacent to movable components is removed to enable the release etch. 12. The MEMS assembly of claim 11, wherein the floor layer adjacent to the movable parts is removed via Reactive Ion Etching. 13. The MEMS assembly of claim 1, wherein each of the plurality of carbon nanotubes extends substantially linearly from the base of the frame to the face of the frame.

이 특허에 인용된 특허 (181)

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Parker William J. (7016 Vicky Ave. West Hills CA 91307) Parker Earl R. (862 W. Hillsdale Blvd. San Mateo CA 94403), X-ray micro-tube and method of use in radiation oncology.
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Davis, Robert C.; Vanfleet, Richard R.; Hutchison, David N., X-ray radiation window with carbon nanotube frame.
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Aoki, Nobutada; Kakutani, Akiko; Sugawara, Tsuyoshi; Miyoshi, Motosuke, X-ray source.
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Skillicorn Brian (Saratoga CA) Fellingham George H. (San Jose CA) Loeffler Peter E. (Los Gatos CA), X-ray source.
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Dinsmore, Mark, X-ray source for materials analysis systems.
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Oettinger Peter E. (Action MA) Harte Kenneth J. (Carlisle MA), X-ray source with flexible probe.
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Smith Donald O. (Lexington MA) Sliski Alan P. (Lincoln MA) Harte Kenneth J. (Carlisle MA) Dinsmore Mark T. (Sudbury MA), X-ray source with shaped radiation pattern.
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Kenji Suzuki JP; Tadaoki Matsushita JP; Tutomu Inazuru JP, X-ray tube.
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Lenz Eberhard (Erlangen DEX), X-ray tube.
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Ozaki Hidemichi (Yokohama JPX), X-ray tube.
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Tanaka Akira (Katsuta JPX) Shimada Satoshi (Hitachi JPX) Yamada Kazuji (Hitachi JPX) Nakagawa Yusaku (Hitachi JPX) Nishihara Motohisa (Katsuta JPX) Miyoshi Tadahiko (Hitachi JPX) Baba Noboru (Hitachi, X-ray tube and method for generating X-rays in the X-ray tube.
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IPC	Description
A	생활필수품
A62	인명구조; 소방(사다리 E06C)
A62B	인명구조용의 기구, 장치 또는 방법(특히 의료용에 사용되는 밸브 A61M 39/00; 특히 물에서 쓰이는 인명구조 장치 또는 방법 B63C 9/00; 잠수장비 B63C 11/00; 특히 항공기에 쓰는 것, 예. 낙하산, 투출좌석 B64D; 특히 광산에서 쓰이는 구조장치 E21F 11/00)
A62B-1/08	.. 윈치 또는 풀리에 제동기구가 있는 것

내보내기 구분	파일저장 인쇄 메일전송
구성항목	기본정보 상세정보 관리번호, 국가코드, 자료구분, 상태, 출원번호, 출원일자, 공개번호, 공개일자, 등록번호, 등록일자, 발명명칭(한글), 발명명칭(영문), 출원인(한글), 출원인(영문), 출원인코드, 대표IPC 관리번호, 국가코드, 자료구분, 상태, 출원번호, 출원일자, 공개번호, 공개일자, 공고번호, 공고일자, 등록번호, 등록일자, 발명명칭(한글), 발명명칭(영문), 출원인(한글), 출원인(영문), 출원인코드, 대표출원인, 출원인국적, 출원인주소, 발명자, 발명자E, 발명자코드, 발명자주소, 발명자 우편번호, 발명자국적, 대표IPC, IPC코드, 요약, 미국특허분류, 대리인주소, 대리인코드, 대리인(한글), 대리인(영문), 국제공개일자, 국제공개번호, 국제출원일자, 국제출원번호, 우선권, 우선권주장일, 우선권국가, 우선권출원번호, 원출원일자, 원출원번호, 지정국, Citing Patents, Cited Patents
저장형식	Text(ASCII format) Excel format PIAS분석(.xls)
메일정보	받는사람 (필수) @ 보내는사람 (선택) @ 제목 내용 KISTI 검색결과 이메일 서비스
안내	총 건의 자료가 검색되었습니다. 다운받으실 자료의 인덱스를 입력하세요. (1-10,000) 검색결과의 순서대로 최대 10,000건 까지 다운로드가 가능합니다. 데이타가 많을 경우 속도가 느려질 수 있습니다.(최대 2~3분 소요) 다운로드 파일은 UTF-8 형태로 저장됩니다. 파일의 내용이 제대로 보이지 않을실 때는 웹브라우저 상단의 보기 -> 인코딩 -> 자동선택 여부를 확인하십시오. ~ Text(ASCII format) Excel format

연합인증

Carbon nanotube MEMS assembly 원문보기

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연합인증

Carbon nanotube MEMS assembly 원문보기

초록 ▼

대표청구항 ▼

연구과제 타임라인

전체(0) 논문(0) 특허(0) 보고서(0)

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