Method and apparatus for mass production of graphene and carbon tubes by deposition of carbon atoms, on flat surfaces and inside walls of tubes, generated from dissociation of a carbon-containing gas stimulated by a tunable high power pulsed laser
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
H01L-021/306
C23C-016/00
C23C-016/44
C23C-016/48
C23F-001/00
출원번호
US-0807282
(2010-09-01)
등록번호
US-8795434
(2014-08-05)
발명자
/ 주소
Lin, Jaw Tian
출원인 / 주소
Lin, Jaw Tian
인용정보
피인용 횟수 :
2인용 특허 :
1
초록▼
A method and apparatus for mass production of graphene and carbon tubes is presented. A carbon-containing gas (CCG) inside a set of thin gaps formed by an array of flat plates, or small multiple bores in a cylindrical shell, is maintained under free molecular conditions at all times. A train of inte
A method and apparatus for mass production of graphene and carbon tubes is presented. A carbon-containing gas (CCG) inside a set of thin gaps formed by an array of flat plates, or small multiple bores in a cylindrical shell, is maintained under free molecular conditions at all times. A train of intermittent light pulses of a tunable high power laser beam compatible with the CCG's major absorption bands is sent through the CCG inside the gaps, or bores, to cause dissociation of the carbon atoms from the CCG molecules in said molecules' one mean free path of flight and deposition of said atoms onto the adjacent solid surfaces (plate or bore walls) during each pulse, and after a pre-determined number of pulses to form a one-atom-thick layer of hexagonal lattice of carbon atoms. Said carbon atom layers on the flat plate surfaces are graphene, those on the shell bore walls carbon tubes. Large quantity and size, and predicted high quality of products are special features of this method.
대표청구항▼
1. An apparatus for mass production of graphene, the apparatus comprising: a chamber comprising first and second built-in windows, wherein each window is located on an opposite sidewall of said chamber;a carbon containing gas source configured to deliver a carbon containing gas to said chamber throu
1. An apparatus for mass production of graphene, the apparatus comprising: a chamber comprising first and second built-in windows, wherein each window is located on an opposite sidewall of said chamber;a carbon containing gas source configured to deliver a carbon containing gas to said chamber through a carbon containing gas feedline and valve;a tunable high powered laser configured to deliver intermittent pulses of a laser beam at an absorption band compatible with the major absorption bands of the carbon containing gas;a solid substrate with an array of alternating parallel rectangular flat plates and a plurality of gaps positioned inside said chamber, wherein said windows, said tunable high powered laser, and said gaps are linearly aligned such that a laser beam pulse passes through said first window, through said gaps, and out of said chamber through said second window;wherein the size of each gap is selected such that each pulse of said laser beam dissociates carbon atoms from the carbon containing gas in free molecular conditions in said gaps to cause deposition of carbon atoms to the adjacent surfaces confining the plurality of gaps of said substrate to form graphene, and wherein the substrate materials have absorption bands different than the absorption band of the tunable high powered laser to allow full contact of laser and substrate without the possibility of the substrate overheating. 2. The apparatus of claim 1, further comprising: a nitrogen gas source configured to deliver a nitrogen gas to said chamber through a nitrogen gas feedline and valve for pre-production purging;a pumping system comprising an evacuation line and valve for exhausting said chamber. 3. The apparatus of claim 1, further comprising: a thermal mass outside the second window for absorbing the remaining power of the outgoing laser beam. 4. The apparatus of claim 1, wherein the carbon containing gas is selected from one of methane, carbon dioxide, ethanol, and ethylene. 5. The apparatus of claim 1, wherein the tunable high powered laser is selected from one of a helium-neon laser, xenon-fluoride laser, carbon-dioxide laser, hydrogen-chloride laser, and an excimer laser. 6. An apparatus for mass production of carbon tubes, the apparatus comprising: a chamber comprising first and second built-in windows, wherein each window is located on an opposite sidewall of said chamber;a carbon containing gas source configured to deliver a carbon containing gas to said chamber through a carbon containing gas feedline and valve;a tunable high powered laser configured to deliver intermittent pulses of a laser beam at an absorption band compatible with the major absorption bands of the carbon containing gas;a solid substrate with multiple bores inside a cylindrical shell positioned inside said chamber, wherein said windows, said tunable high powered laser, and said bores are linearly aligned such that a laser beam pulse passes through said first window, through said bores, and out of said chamber through said second window;wherein the size of each bore is selected such that each pulse of said laser beam dissociates carbon atoms from the carbon containing gas in free molecular conditions in said bores to cause deposition of carbon atoms to the adjacent surfaces confining the bores of said substrate to form carbon tubes, and wherein the substrate materials have absorption bands different than the absorption band of the tunable high powered laser to allow full contact of laser and substrate without the possibility of the substrate overheating. 7. The apparatus of claim 6, further comprising: a nitrogen gas source configured to deliver a nitrogen gas to said chamber through a nitrogen gas feedline and valve for pre-production purging;a pumping system comprising an evacuation line and valve for exhausting said chamber. 8. The apparatus of claim 6, further comprising: a thermal mass outside the second window for absorbing the remaining power of the outgoing laser beam. 9. The apparatus of claim 6, wherein the carbon containing gas is selected from one of methane, carbon dioxide, ethanol, and ethylene. 10. The apparatus of claim 6, wherein the tunable high powered laser is selected from one of a helium-neon laser, xenon-fluoride laser, carbon-dioxide laser, hydrogen-chloride laser, and an excimer laser.
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