[특허]Large area, atmospheric pressure plasma for downstream processing

[미국특허] Large area, atmospheric pressure plasma for downstream processing 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	C23C-016/00 H01L-021/00
출원번호	US-0752001 (2013-01-28)
등록번호	US-8800485 (2014-08-12)
발명자 / 주소	Selwyn, Gary S.
출원인 / 주소	Apjet, Inc.
대리인 / 주소	Freund, Samuel M.
인용정보	피인용 횟수 : 0 인용 특허 : 29

초록 ▼

An arcless, atmospheric-pressure plasma generating apparatus capable of producing a large-area, temperature-controlled, stable discharge at power densities between about 0.1 W/cm3 and about 200 W/cm3, while having an operating gas temperature of less than 50° C., for processing materials outside of the discharge, is described. The apparatus produces active chemical species, including gaseous metastables and radicals which may be used for polymerization (either free radical-induced or through dehydrogenation-based polymerization), surface cleaning and modification, etching, adhesion promotion, and sterilization, as examples. The invention may include either a cooled rf-driven electrode or a cooled ground electrode, or two cooled electrodes, wherein active components of the plasma may be directed out of the plasma and onto an external workpiece without simultaneously exposing a material to the electrical influence or ionic components of the plasma.

대표청구항 ▼

1. An atmospheric-pressure plasma discharge apparatus comprising in combination: a first electrode having a cylindrical inner surface and a first axis of symmetry;a plurality of parallel tubes forming a second cylindrical electrode interior to said first electrode and having a second axis of symmetry co-axial with the first axis of symmetry, each tube of said plurality of tubes having an outer surface spaced apart a first chosen distance from the inner cylindrical surface of said first electrode, the outer surface of each tube of said plurality of tubes further being spaced apart a second chosen distance from the outer surface of an adjacent tube thereto;an rf power supply in electrical contact with either of said first electrode or each tube of said plurality of tubes for providing rf power to said first electrode or said second electrode, the unpowered electrode of said first electrode or each tube of said plurality of tubes being placed in electrical contact with a ground electrical potential; means for cooling each tube of said plurality of tubes to a chosen temperature; andmeans for flowing a gas into the annular space between said first electrode and said second electrode and out of the annular space between said first electrode and said second electrode between the spaced-apart outer surfaces of each tube of said plurality of tubes;whereby an atmospheric pressure plasma is generated between said first electrode and said second electrode. 2. The plasma discharge apparatus of claim 1, wherein a hollow cathode effect is produced between the spaced-apart outer surfaces of adjacent tubes of said plurality of tubes. 3. The plasma discharge apparatus of claim 1, wherein each tube of said plurality of tubes is placed in electrical contact with a ground electrical potential. 4. The plasma discharge apparatus of claim 1, wherein each tube of said plurality of tubes has a circular or oval cross section. 5. The plasma discharge apparatus of claim 1, wherein the gas flows through the surface of said first electrode before entering the space between said first electrode and said second electrode. 6. The plasma discharge apparatus of claim 5, wherein at least one open channel is provided in the surface of said first electrode out of which the gas exits the inner surface of said first electrode, dimensions of the at least one open channel being chosen such that no electric discharge takes place in the region of the at least one open channel and said second electrode. 7. The plasma discharge apparatus of claim 1, wherein means are provided for cooling said first electrode to a chosen temperature such that the gas temperature is less than 50° C. 8. The plasma discharge apparatus of claim 1, wherein the gas comprises between approximately 85% and approximately 100% of helium. 9. The plasma discharge apparatus of claim 1, further comprising means for moving a material at a third chosen distance from and concentric with said second electrode on the opposite side thereto from the inner surface of said first electrode.

이 특허에 인용된 특허 (29) 인용/피인용 타임라인 분석

Jariwala, Chetan P.; Eggleston, James D.; Yandrasits, Michael A.; Dams, Rudolf J., Alkylated fluorochemical oligomers and use thereof in the treatment of fibrous substrates.
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Jariwala,Chetan P.; Eggleston,James D.; Yandrasits,Michael A.; Dams,Rudolf; Coppens,Dirk M., Alkylated fluorochemical oligomers and use thereof in the treatment of fibrous substrates.
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Sando, Yoshikazu; Goto, Tokuju; Tanaka, Itsuo; Ishidoshiro, Hiroshi; Minakata, Matsuo, Apparatus for low-temperature plasma treatment of a textile product.
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Sando Yoshikazu (Wakayama JPX) Ishidoshiro Hiroshi (Wakayama JPX) Minakata Matsuo (Wakayama JPX) Goto Tokuju (Nara JPX), Apparatus for treating a textile product with the use of low-temperature plasma.
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Herrmann Hans W. ; Selwyn Gary S., Atmospheric-pressure plasma decontamination/sterilization chamber.
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Selwyn Gary S., Atmospheric-pressure plasma jet.
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Mikhael, Michael G.; Yializis, Angelo; Ellwanger, Richard E., Barrier coatings produced by atmospheric glow discharge.
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Lumb Douglas (Methuen MA) Rock Moshe (Andover MA), Composite sweatshirt fabric.
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Boye, Philippe, Composite textile material for protecting the human body against heat.
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Karl H. Schoenbach ; Wojciech W. Byszewski ; Frank E. Peterkin ; Amin N. Dharamsi, Discharge device having cathode with micro hollow array.
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Schoenbach Karl H. ; Byszewski Wojciech W. ; Peterkin Frank E. ; Dharamsi Amin N., Discharge device having cathode with micro hollow array.
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Ohta, Tatsuo; Nakano, Satoshi; Muramatsu, Yumi, Half mirror film producing method and optical element comprising a half mirror film.
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Fukuda,Kazuhiro; Kondo,Yoshikazu; Murakami,Takashi; Iwamaru,Shunichi; Muramatsu,Yumi; Tsuji,Toshio, Layer forming method, product comprising the layer, optical film, dielectric-coated electrode and plasma discharge apparatus.
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Kataoka Seiichi,JPX ; Yoshikawa Susumu,JPX, Method for modifying one surface of textile fabric or nonwoven fabric.
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Yoshikawa Masato (Kodaira JPX) Kusano Yukihiro (Tokorozawa JPX) Naito Kazuo (Kawasaki JPX) Okazaki Satiko (Tokyo JPX) Kogoma Masuhiro (Wako JPX), Method for producing golf balls.
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Maruyama Tohru (Sagamihara JPX) Abe Michio (Ohita JPX) Nomiyama Hiroaki (Sagamihara JPX) Okazaki Sachiko (No. 20-11 ; Takaido-Higashi 2-chome ; Suginami-ku ; Tokyo JPX) Kogoma Masuhiro (No. 843-15 ; , Method for producing medical materials.
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Kimbrell, William C., Method of producing textile substrates having improved durable water repellency and soil release.
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Yamazaki Shunpei (Tokyo JPX), Microwave enhanced CVD method for coating mechanical parts for improved wear resistance.
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Ohmi, Tadahiro; Hirayama, Masaki, Microwave plasma processing apparatus.
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D'Agostino, Riccardo; Corzani, Italo; Favia, Pietro; Lamendola, Ritalba; Palumbo, Gianfranco, Modulated plasma glow discharge treatments for making superhydrophobic substrates.
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Matsuda Akihisa,JPX ; Watabe Yoshimi,JPX ; Yamagishi Hideo,JPX ; Kondo Masataka,JPX ; Hayakawa Takashi,JPX, Plasma CVD apparatus suitable for manufacturing solar cell and the like.
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Denes Ferencz S. (Madison WI) Young Raymond A. (Madison WI) Sarmadi Abdolmajid (Madison WI) Shohet J. Leon (Madison WI), Polymeric thin layer materials.
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Kusano Yukihiro (No. 20-11 ; Takaidohigashi 2-chome Tokorozawa JPX) Yoshikawa Masato (No. 20-11 ; Takaidohigashi 2-chome Kodaira JPX) Naito Kazuo (No. 20-11 ; Takaidohigashi 2-chome Kawasaki JPX) Fuk, Surface treatment method.
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Kusano Yukihiro (20-11 ; Takaido Higashi 2-chome Tokorozawa JPX) Yoshikawa Masato (20-11 ; Takaido Higashi 2-chome Kodaira JPX) Tanuma Itsuo (20-11 ; Takaido Higashi 2-chome Sayama JPX) Fukuura Yukio, Surface treatment of fluoropolymer members and preparation of composite products therefrom.
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Anyon David S.,CAX ; So Kin,CAX, Textile fabric.
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Byles Michael N. (High Point NC), Textile fabric with opposed absorbent and non-absorbent layers and method of fabricating same.
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Spence Paul ; Lynch John, Treater systems and methods for generating moderate-to-high-pressure plasma discharges for treating materials and related treated materials.
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Callebert Franck (Lille FRX) Dupret Christian (La Madeleine FRX) Dessaux Odile (Lille FRX) Goudmand Pierre (Lille FRX), Treatment of textile fibers.
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Russell-Jones Gregory John,AUX ; Westwood Steven William,AUX, Vitamin B12 conjugates with gcsf, analogues thereof and pharmaceutical compositions.
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A	생활필수품
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A62B-1/08	.. 윈치 또는 풀리에 제동기구가 있는 것

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[미국특허] Large area, atmospheric pressure plasma for downstream processing 원문보기