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Large area, atmospheric pressure plasma for downstream processing

국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • C23C-016/00
  • H01L-021/00
출원번호 US-0752001 (2013-01-28)
등록번호 US-8800485 (2014-08-12)
발명자 / 주소
  • Selwyn, Gary S.
출원인 / 주소
  • Apjet, Inc.
대리인 / 주소
    Freund, Samuel M.
인용정보 피인용 횟수 : 0  인용 특허 : 29

초록

An arcless, atmospheric-pressure plasma generating apparatus capable of producing a large-area, temperature-controlled, stable discharge at power densities between about 0.1 W/cm3 and about 200 W/cm3, while having an operating gas temperature of less than 50° C., for processing materials outside of

대표청구항

1. An atmospheric-pressure plasma discharge apparatus comprising in combination: a first electrode having a cylindrical inner surface and a first axis of symmetry;a plurality of parallel tubes forming a second cylindrical electrode interior to said first electrode and having a second axis of symmetr

이 특허에 인용된 특허 (29)

  1. Jariwala, Chetan P.; Eggleston, James D.; Yandrasits, Michael A.; Dams, Rudolf J., Alkylated fluorochemical oligomers and use thereof in the treatment of fibrous substrates.
  2. Jariwala,Chetan P.; Eggleston,James D.; Yandrasits,Michael A.; Dams,Rudolf; Coppens,Dirk M., Alkylated fluorochemical oligomers and use thereof in the treatment of fibrous substrates.
  3. Sando, Yoshikazu; Goto, Tokuju; Tanaka, Itsuo; Ishidoshiro, Hiroshi; Minakata, Matsuo, Apparatus for low-temperature plasma treatment of a textile product.
  4. Sando Yoshikazu (Wakayama JPX) Ishidoshiro Hiroshi (Wakayama JPX) Minakata Matsuo (Wakayama JPX) Goto Tokuju (Nara JPX), Apparatus for treating a textile product with the use of low-temperature plasma.
  5. Herrmann Hans W. ; Selwyn Gary S., Atmospheric-pressure plasma decontamination/sterilization chamber.
  6. Selwyn Gary S., Atmospheric-pressure plasma jet.
  7. Mikhael, Michael G.; Yializis, Angelo; Ellwanger, Richard E., Barrier coatings produced by atmospheric glow discharge.
  8. Lumb Douglas (Methuen MA) Rock Moshe (Andover MA), Composite sweatshirt fabric.
  9. Boye, Philippe, Composite textile material for protecting the human body against heat.
  10. Karl H. Schoenbach ; Wojciech W. Byszewski ; Frank E. Peterkin ; Amin N. Dharamsi, Discharge device having cathode with micro hollow array.
  11. Schoenbach Karl H. ; Byszewski Wojciech W. ; Peterkin Frank E. ; Dharamsi Amin N., Discharge device having cathode with micro hollow array.
  12. Ohta, Tatsuo; Nakano, Satoshi; Muramatsu, Yumi, Half mirror film producing method and optical element comprising a half mirror film.
  13. Fukuda,Kazuhiro; Kondo,Yoshikazu; Murakami,Takashi; Iwamaru,Shunichi; Muramatsu,Yumi; Tsuji,Toshio, Layer forming method, product comprising the layer, optical film, dielectric-coated electrode and plasma discharge apparatus.
  14. Kataoka Seiichi,JPX ; Yoshikawa Susumu,JPX, Method for modifying one surface of textile fabric or nonwoven fabric.
  15. Yoshikawa Masato (Kodaira JPX) Kusano Yukihiro (Tokorozawa JPX) Naito Kazuo (Kawasaki JPX) Okazaki Satiko (Tokyo JPX) Kogoma Masuhiro (Wako JPX), Method for producing golf balls.
  16. Maruyama Tohru (Sagamihara JPX) Abe Michio (Ohita JPX) Nomiyama Hiroaki (Sagamihara JPX) Okazaki Sachiko (No. 20-11 ; Takaido-Higashi 2-chome ; Suginami-ku ; Tokyo JPX) Kogoma Masuhiro (No. 843-15 ; , Method for producing medical materials.
  17. Kimbrell, William C., Method of producing textile substrates having improved durable water repellency and soil release.
  18. Yamazaki Shunpei (Tokyo JPX), Microwave enhanced CVD method for coating mechanical parts for improved wear resistance.
  19. Ohmi, Tadahiro; Hirayama, Masaki, Microwave plasma processing apparatus.
  20. D'Agostino, Riccardo; Corzani, Italo; Favia, Pietro; Lamendola, Ritalba; Palumbo, Gianfranco, Modulated plasma glow discharge treatments for making superhydrophobic substrates.
  21. Matsuda Akihisa,JPX ; Watabe Yoshimi,JPX ; Yamagishi Hideo,JPX ; Kondo Masataka,JPX ; Hayakawa Takashi,JPX, Plasma CVD apparatus suitable for manufacturing solar cell and the like.
  22. Denes Ferencz S. (Madison WI) Young Raymond A. (Madison WI) Sarmadi Abdolmajid (Madison WI) Shohet J. Leon (Madison WI), Polymeric thin layer materials.
  23. Kusano Yukihiro (No. 20-11 ; Takaidohigashi 2-chome Tokorozawa JPX) Yoshikawa Masato (No. 20-11 ; Takaidohigashi 2-chome Kodaira JPX) Naito Kazuo (No. 20-11 ; Takaidohigashi 2-chome Kawasaki JPX) Fuk, Surface treatment method.
  24. Kusano Yukihiro (20-11 ; Takaido Higashi 2-chome Tokorozawa JPX) Yoshikawa Masato (20-11 ; Takaido Higashi 2-chome Kodaira JPX) Tanuma Itsuo (20-11 ; Takaido Higashi 2-chome Sayama JPX) Fukuura Yukio, Surface treatment of fluoropolymer members and preparation of composite products therefrom.
  25. Anyon David S.,CAX ; So Kin,CAX, Textile fabric.
  26. Byles Michael N. (High Point NC), Textile fabric with opposed absorbent and non-absorbent layers and method of fabricating same.
  27. Spence Paul ; Lynch John, Treater systems and methods for generating moderate-to-high-pressure plasma discharges for treating materials and related treated materials.
  28. Callebert Franck (Lille FRX) Dupret Christian (La Madeleine FRX) Dessaux Odile (Lille FRX) Goudmand Pierre (Lille FRX), Treatment of textile fibers.
  29. Russell-Jones Gregory John,AUX ; Westwood Steven William,AUX, Vitamin B12 conjugates with gcsf, analogues thereof and pharmaceutical compositions.
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