IPC분류정보
국가/구분 |
United States(US) Patent
등록
|
국제특허분류(IPC7판) |
|
출원번호 |
US-0913579
(2006-04-28)
|
등록번호 |
US-8802191
(2014-08-12)
|
국제출원번호 |
PCT/EP2006/003967
(2006-04-28)
|
§371/§102 date |
20090918
(20090918)
|
국제공개번호 |
WO2006/117144
(2006-11-09)
|
발명자
/ 주소 |
- Zimmermann, Stefan
- Papp, Uwe
- Kreye, Heinrich
- Schmidt, Tobias
|
출원인 / 주소 |
|
대리인 / 주소 |
|
인용정보 |
피인용 횟수 :
1 인용 특허 :
106 |
초록
▼
Disclosed is a process for the reprocessing or production of a sputter target or an X-ray anode wherein a gas flow forms a gas/powder mixture with a powder of a material chosen from the group consisting of niobium, tantalum, tungsten, molybdenum, titanium, zirconium, mixtures of two or more thereof
Disclosed is a process for the reprocessing or production of a sputter target or an X-ray anode wherein a gas flow forms a gas/powder mixture with a powder of a material chosen from the group consisting of niobium, tantalum, tungsten, molybdenum, titanium, zirconium, mixtures of two or more thereof and alloys thereof with at least two thereof or with other metals, the powder has a particle size of 0.5 to 150 μm, wherein a supersonic speed is imparted to the gas flow and the jet of supersonic speed is directed on to the surface of the object to be reprocessed or produced.
대표청구항
▼
1. A method of applying coatings to a surface, the method comprising: cold-spraying a gas flow at supersonic speed onto a surface of an object, thereby forming a coating on the surface, the gas flow comprising a mixture of gas with a powder of a bulk material selected from the group consisting of: a
1. A method of applying coatings to a surface, the method comprising: cold-spraying a gas flow at supersonic speed onto a surface of an object, thereby forming a coating on the surface, the gas flow comprising a mixture of gas with a powder of a bulk material selected from the group consisting of: a) alloys, pseudo alloys, and powder mixtures of Nb, Ta, W, or Mo with (i) each other, or with Ti or Zr, or(ii) 2-30 wt. % of Co, Ni, Rh, Pd, Pt, Cu, Ag or Au; orb) binary alloys, binary pseudo alloys, and binary powder mixtures of 2-50 wt. % Nb, Ta, W, or Mo with each other or with Ti or Zr,wherein (i) the powder has a particle size of from 0.5 to 150 μm and an oxygen content of less than 1000 ppm, and (ii) the coating has a density of at least 97% of a density of the bulk material. 2. The method as claimed in claim 1, further comprising adding the powder to the gas in an amount such that a flow rate density of the particles of from 0.01 to 200 g/s cm2. 3. The method as claimed in claim 1, further comprising adding the powder to the gas in an amount such that a flow rate density of the particles of from 0.05 g/s cm2 to 17 g/s cm2. 4. The method as claimed in claim 1, wherein the spraying comprises the steps of: providing a spraying orifice adjacent the surface;providing the powder to the spraying orifice under pressure;providing the gas under pressure to the spraying orifice to establish a static pressure at the spraying orifice, thereby forming the gas flow, wherein the gas comprises an inert gas; andlocating the spraying orifice in a region of low ambient pressure which is less than 1 atmosphere and which is substantially less than the static pressure at the spraying orifice to provide substantial acceleration of the gas flow. 5. The method as claimed in claim 1, wherein the cold spraying is performed with a cold spray gun and the surface and the cold spray gun are located within a vacuum chamber at a pressure below 80 kPa. 6. The method as claimed in claim 1, wherein a speed of the powder in the gas flow is supersonic to 2000 m/s. 7. The method as claimed in claim 1, wherein the spraying is performed with a cold spray gun and the surface and the cold spray gun are located within a vacuum chamber at a pressure between 2 and 10 kPa and the speed of the powder in the gas flow is supersonic to 1200 m/s. 8. The method as claimed in claim 1, wherein the coating has a particle size of from 5 to 150 μm. 9. The method as claimed in claim 1, wherein the powder has gaseous impurities of from 200 to 2500 ppm, based on weight. 10. The method as claimed in claim 1, wherein the coating has a particle size of from 10 to 50 μm and the powder has an oxygen content of less than 500 ppm. 11. The method as claimed in claim 1, wherein the powder has an oxygen content of less than 100 ppm. 12. The method as claimed in claim 1, wherein the coating has an oxygen content of less than 1000 ppm. 13. The method as claimed in claim 1, wherein the coating has an oxygen content of less than 100 ppm. 14. The method as claimed in claim 1, wherein the coating has a content of gaseous impurities that differs by no more than 50% from a content of gaseous impurities of the powder. 15. The method as claimed in claim 1, wherein the coating has a content of gaseous impurities that differs by no more than 20% from a content of gaseous impurities of the powder. 16. The method as claimed in claim 1, wherein the coating has an oxygen content that differs by no more than 5% from an oxygen content of the powder. 17. The method as claimed in claim 1, wherein the coating has a content of gaseous impurities that differs by no more than 10% from a content of gaseous impurities of the powder. 18. The method as claimed in claim 1, wherein the coating has a content of gaseous impurities that differs by no more than 1% from a content of gaseous impurities of the powder and wherein the coating has an oxygen content that differs by no more than 1% from an oxygen content of the starting powder. 19. The method as claimed in claim 1, wherein an oxygen content of the coating is no more than 100 ppm. 20. The method as claimed in claim 1, wherein a thickness of the coating is from 10 μm to 10 mm. 21. The method as claimed in claim 1, wherein the powder is an alloy having from 94 to 99 wt. % molybdenum, from 1 to 6 wt. %, niobium, and from 0.05 to 1 wt. % zirconium. 22. The method as claimed in claim 1, wherein the powder is an alloy having from 95 to 97 wt. % molybdenum, from 2 to 4 wt. %, niobium, and from 0.05 to 0.02 wt. % zirconium. 23. The method as claimed in claim 1, wherein the powder is an alloy, pseudo alloy, or powder mixture of a refractory metal selected from the group consisting of niobium, tantalum, tungsten, and molybdenum with a metal selected from the group consisting of titanium, cobalt, nickel, rhodium, palladium, platinum, copper, silver, and gold. 24. The method as claimed in claim 1, wherein the powder consists essentially of a tungsten-rhenium alloy. 25. The method as claimed in claim 1, wherein the powder consists essentially of a mixture of a titanium powder with (i) a tungsten powder or (ii) a molybdenum powder. 26. The method as claimed in claim 1, wherein the powder comprises 2-30 wt. % of cobalt, nickel, rhodium, palladium, platinum, copper, silver, or gold. 27. The method as claimed in claim 1, wherein the powder comprises 2-50 wt. % of titanium. 28. A method of applying coatings to a surface, the method comprising: cold-spraying a gas flow at supersonic speed onto a surface of an object, thereby forming a coating on the surface, the gas flow comprising a mixture of gas with a powder of a bulk material selected from the group consisting of: a) alloys, pseudo alloys, and powder mixtures of Nb, Ta, W, or Mo with (i) each other, or with Ti or Zr, or(ii) 2-30 wt. % of Co, Ni, Rh, Pd, Pt, Cu, Ag or Au; orb) binary alloys, binary pseudo alloys, and binary powder mixtures of 2-50 wt. % Nb, Ta, W, or Mo with each other or with Ti or Zr, wherein (i) the powder has a particle size of from 0.5 to 150 μm and an oxygen content of less than 1000 ppm, (ii) the coating has a density of at least 97% of a density of the bulk material, and (iii) cold-sprayed layers are formed/produced with deposition rates of more than 90%.
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