[미국특허]
Electromechanical transducer and method for manufacturing the same
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
H01L-041/22
H01L-041/09
출원번호
US-0054106
(2009-04-27)
등록번호
US-8810113
(2014-08-19)
우선권정보
KR-10-2008-0070084 (2008-07-18)
국제출원번호
PCT/KR2009/002182
(2009-04-27)
§371/§102 date
20110114
(20110114)
국제공개번호
WO2010/008133
(2010-01-21)
발명자
/ 주소
Han, Jae Hung
Kang, Lae Hyong
Lee, Jong Won
Chung, Sang Joon
출원인 / 주소
Agency for Defense Development
대리인 / 주소
Pearne & Gordon LLP
인용정보
피인용 횟수 :
10인용 특허 :
7
초록▼
Disclosed is an electromechanical transducer and the method for manufacturing the same, which can detect or control deformation and vibration of a structure and flow of fluids by applying controlling forces. The electromechanical transducer of the present invention comprises a base substrate to whic
Disclosed is an electromechanical transducer and the method for manufacturing the same, which can detect or control deformation and vibration of a structure and flow of fluids by applying controlling forces. The electromechanical transducer of the present invention comprises a base substrate to which initial stress is applied; an electro-active material layer attached on the base substrate; and electrodes installed on the top and bottom side of the electro-active material layer for actuating the electro-active material layer, the base substrate and the electro-active material layer which is deformed when initial stress is removed from the base substrate so that the base substrate and the electro-active material layer have curvatures.
대표청구항▼
1. A method of manufacturing an electromechanical transducer comprising the steps of: applying an initial in-plane stress along a plane of a base substrate (12);installing electrodes (11a, 11b) on the top and bottom side of an electro-active material layer (11) for actuating the electro-active mater
1. A method of manufacturing an electromechanical transducer comprising the steps of: applying an initial in-plane stress along a plane of a base substrate (12);installing electrodes (11a, 11b) on the top and bottom side of an electro-active material layer (11) for actuating the electro-active material layer;attaching the electro-active material layer (11) to the base substrate (12) with an adhesive; andremoving the initial in-plane stress from the base substrate (12) so that the base substrate (12) and the electro-active material layer (11) deform to have curvatures. 2. The method of claim 1, wherein the base substrate (12) is made from one material chosen from the group consisting of metal, glass, plastic, composite material, ceramic, piezoelectric material and shape memory alloy. 3. The method of claim 1, wherein the electro-active material layer (11) is made from one material chosen from the group consisting of piezoelectric ceramic, piezoelectric film, piezoelectric fiber, electro-active polymer, ferroelectric material, shape memory alloy, and electrostrictive material. 4. The method of claim 1, further comprising the step of: laminating the manufactured electromechanical transducers with at least another electromechanical transducer to form a multi-layer electromechanical transducer system. 5. The method of claim 1, further comprising the step of: constructing a sound device which produces sound pressure comprising the manufactured electromechanical transducer. 6. A method of manufacturing an electromechanical transducer comprising the steps of: applying an initial in-plane stress along a plane of a base substrate (12);installing electrodes (11a, 11b) on the top and bottom side of the electro-active material layer (11) for actuating the electro-active material layer;attaching the electro-active material layer (11) to the base substrate (12) with an adhesive; andremoving the initial in-plane stress from the base substrate (12) so that the base substrate (12) and the electro-active material layer (11) deform to have curvatures, whereinthe thickness ratio (ξ) of the base substrate (12) and electro-active material layer (11) is determined by the following equation: ξ=1η where ξ is the ratio (tm/tp) between the thickness (tm) of the base substrate (12) and the thickness (tp) of electro-active material layer (11), and η is the ratio (sp/sm) between the elastic coefficient (1/sm) of the base substrate (12) and the elastic coefficient (1/sp) of the electro-active material layer (11). 7. The method of claim 6, wherein the base substrate (12) is made from one material chosen from the group consisting of metal, glass, plastic, composite material, ceramic, piezoelectric material and shape memory alloy. 8. The method of claim 6, wherein the electro-active material layer (11) is made from one material chosen from the group consisting of piezoelectric ceramic, piezoelectric film, piezoelectric fiber, electro-active polymer, ferroelectric material, shape memory alloy, and electrostrictive material. 9. The method of claim 6, further comprising the step of: laminating the manufactured electromechanical transducer with at least another electromechanical transducer to form a multi-layer electromechanical transducer system. 10. The method of claim 6, further comprising the step of: constructing a sound device which produces sound pressure comprising the manufactured electromechanical transducer.
Hellbaum Richard F. (Hampton VA) Bryant Robert G. (Poquoson VA) Fox Robert L. (Hayes VA), Thin layer composite unimorph ferroelectric driver and sensor.
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