A vacuum network control system includes a plurality of nodes configured for control over operational processes of the system. The plural nodes are configured, in a network ring or other topology, as a selectable master node for controlling the operational processes. Control can be distributed among
A vacuum network control system includes a plurality of nodes configured for control over operational processes of the system. The plural nodes are configured, in a network ring or other topology, as a selectable master node for controlling the operational processes. Control can be distributed among, and passed between, each of the nodes. Each node on the network monitors adjacent network connectors to detect a fault in the network. In response to a detected fault, a disconnect is mapped to the fault, and the network topology is reconfigured for continued communication among the nodes and with external devices.
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1. A vacuum control network system having a plurality of nodes, the system comprising: a first node comprising a first cryopump and a first network communications interface; anda second node comprising a second network communications interface, the second node configured to control processes at the
1. A vacuum control network system having a plurality of nodes, the system comprising: a first node comprising a first cryopump and a first network communications interface; anda second node comprising a second network communications interface, the second node configured to control processes at the first cryopump;wherein the second node further comprises a second cryopump, and the first node is configured to control processes at the first and second cryopumps; andwherein each of the plurality of nodes in the network is configured to control processes at other nodes of the network and is selectable as a master. 2. The system of claim 1, further comprising a network host, the network host configured to select one of the first and second nodes as a master. 3. The system of claim 2, wherein the network host, upon detecting a failure at the master node, designates another of the first and second nodes as the master node. 4. The system of claim 1, wherein each of the plurality of nodes arbitrate with one another to select a master. 5. The system of claim 1, wherein a single node is selected as a master, the master being a supernode. 6. The system of claim 5, wherein, upon detecting a fault at the supernode, other nodes of the plurality of nodes arbitrate with one another to select a successive supernode. 7. The system of claim 1, wherein plural nodes are selectable as process masters. 8. The system of claim 7, wherein the first and second nodes are selected as process masters, the first node controlling a first set of processes associated with the first and second cryopumps, the second node controlling a second set processes associated with the first and second cryopumps, the first set including at least one process that is distinct from the second set. 9. The system of claim 8, wherein each of the first and second sets of processes includes one or more of: communications with a network host, network management, helium management, component monitoring and operational data collection, control of safety interlocks, cryopump regeneration, rough and purge stages, and controlling cryopump component interlocks. 10. The system of claim 8, further comprising a network host, the network host configured to assign processes to the first and second sets of processes. 11. The system of claim 8, wherein the first and second nodes are configured to communicate with one another to assign processes to the first and second sets of processes. 12. The system of claim 11, wherein said nodes communicate responsive to receiving, at one or both of the first and second nodes, a third set of processes to be distributed among the plurality of nodes. 13. The system of claim 12, wherein both the first and second nodes are configured to include capability to complete all processes of the third set. 14. The system of claim 12, further comprising a third node having a third network interface, the third set of processes being distributed among the plurality of nodes including the third node. 15. The system of claim 14, wherein the third node, upon detecting a failure of the first node, is configured to control at least one process of the first set of processes. 16. The system of claim 14, wherein the third node further comprises a compressor. 17. The system of claim 8, wherein the first node, upon detecting a failure of the second node, is configured to import at least one process of the second set into the first set to control the at least one process of the second set. 18. The system of claim 1, further comprising: network ring segments between node pairs forming a ring with the plurality of nodes; anda network controller configured to determine a fault at the network ring segments and control enabling and disabling of the network ring segments. 19. The system of claim 18, wherein the network controller is configured to disable one of the network ring segments independent of integrity of the network ring segment or associated node. 20. The system of claim 19, wherein the plurality of nodes are configured to communicate via a bus formed by the network ring segments that are enabled. 21. The system of claim 19, wherein the network controller, in response to receiving an error report indicating a faulty network ring segment, enables the disabled network ring segment and disables the faulty network ring segment.
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이 특허에 인용된 특허 (7)
Ying Jeffrey, Backup control mechanism in a distributed control network.
Walsh, Robert J.; Barbas, Steve N.; Friend, James F., Method and system for selecting a master controller in a redundant control plane having plural controllers.
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