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Apparatus for controlling gas distribution are provided. In some embodiments, apparatus for controlling gas distribution may include a first flow path from an inlet to a first outlet; a plurality of first orifices disposed within the first flow path; a plurality of first valves that control gas flow

Apparatus for controlling gas distribution are provided. In some embodiments, apparatus for controlling gas distribution may include a first flow path from an inlet to a first outlet; a plurality of first orifices disposed within the first flow path; a plurality of first valves that control gas flow through the plurality of first orifices to control a total gas flow at the first outlet; a second flow path from the inlet to a second outlet; a plurality of second orifices disposed along the second flow path; a plurality of second valves that control gas flow through respective ones of the plurality of second orifices to control a total gas flow at the second outlet; and a mounting block having the plurality of first valves and second valves coupled thereto, wherein at least a portion of the first flow path and the second flow path is disposed within the mounting block.

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1. An apparatus for controlling gas distribution, comprising: a first flow path from an inlet to a first outlet;a plurality of first orifices disposed within the first flow path;a plurality of first valves that selectively control gas flow through respective ones of the plurality of first orifices t

1. An apparatus for controlling gas distribution, comprising: a first flow path from an inlet to a first outlet;a plurality of first orifices disposed within the first flow path;a plurality of first valves that selectively control gas flow through respective ones of the plurality of first orifices to control a total gas flow at the first outlet of the first flow path, wherein ones of each of the plurality of first orifices are disposed along an inlet of each corresponding first valve, and wherein the first flow path is defined through the plurality of first valves to the first outlet, and wherein a first valve of the plurality of first valves is a two-way valve and a remainder of the plurality of first valves are three-way valves;a second flow path from the inlet to a second outlet;a plurality of second orifices disposed along the second flow path;a plurality of second valves that selectively control gas flow through respective ones of the plurality of second orifices to control a total gas flow at the second outlet of the second flow path; anda mounting block having the plurality of first valves and the plurality of second valves coupled to the mounting block, wherein at least a portion of the first flow path and at least a portion of the second flow path is disposed within the mounting block. 2. The apparatus of claim 1, wherein the first flow path and the second flow path are predominantly disposed within the mounting block. 3. The apparatus of claim 1, further comprising: a plurality of seals, wherein each one of the plurality of seals is disposed at an interface between one of the plurality of first valves and the mounting block or one of the plurality of second valves and the mounting block and wherein one of the plurality of first orifices or ones of the plurality of second orifices is disposed in each one of the plurality of seals. 4. The apparatus of claim 1, wherein at least one of the plurality of first orifices is disposed within a corresponding at least one of the plurality of first valves. 5. The apparatus of claim 1, further comprising: a plurality of inserts, each one of the plurality of inserts has an opening extending through the one of the plurality of inserts, wherein each one of the plurality of inserts has one of the plurality of first orifices or one of the plurality of second orifices disposed in the opening, and wherein each one of the plurality of inserts is respectively disposed in a flow opening of one of the plurality of first valves or a flow opening of one of the plurality of second valves. 6. The apparatus of claim 1, wherein at least one of the plurality of first orifices is disposed within the mounting block. 7. The apparatus of claim 1, further comprising: a plurality of inserts, each one of the plurality of inserts having an opening extending through the one of the plurality of inserts, wherein each one of the plurality of inserts has one of the plurality of first orifices or one of the plurality of second orifices disposed in the opening, and wherein each one of the plurality of inserts is respectively disposed in the mounting block. 8. The apparatus of claim 1, wherein each one of the plurality of first valves further comprises a first opening having one of the plurality of first orifices disposed in the first opening and wherein each one of the plurality of second valves further comprises a second opening having one of the plurality of second orifices disposed in the second opening. 9. The apparatus of claim 1, wherein the mounting block further comprises: a plurality of mounting blocks, wherein each one of the plurality of mounting blocks is coupled to one of the plurality of first valves or one of the plurality of second valves and wherein at least a portion of the first flow path or at least a portion of the second flow path is disposed within each of the plurality of mounting blocks. 10. The apparatus of claim 9, further comprising: a plurality of conduits coupling each of the plurality of mounting blocks to define the first flow path and the second flow path. 11. The apparatus of claim 1, wherein the mounting block further comprises: a plurality of first blocks, wherein each one of the plurality of first blocks is a component of the first flow path and is fluidly coupled to both the inlet and the first outlet, and wherein one of the plurality of first valves is coupled to each one of the plurality of first blocks; anda plurality of second blocks, wherein each one of the plurality of second blocks is a component of the second flow path and is fluidly coupled to both the inlet and the second outlet, and wherein in one of the plurality of second valves is coupled to each one of the plurality of second blocks. 12. The apparatus of claim 1, wherein the first outlet is coupled to a first gas delivery zone of a first process chamber and the second outlet is coupled to a second gas delivery zone of the first process chamber. 13. The apparatus of claim 12, wherein the first outlet is further coupled to a first gas delivery zone of a second process chamber and the second outlet is further coupled to a second gas delivery zone of the second process chamber. 14. The apparatus of claim 1, wherein the first outlet is coupled to a gas delivery zone of a first process chamber and the second outlet is coupled to a gas delivery zone of a second process chamber. 15. The apparatus of claim 1, wherein each one of the plurality of first valves and each one of the plurality of second valves is a pneumatic valve. 16. The apparatus of claim 15, further comprising: a plurality of electrical actuation devices, wherein each one of the plurality of electrical actuation devices is coupled to one of the plurality of first valves or one of the plurality of second valves for electrically actuating pneumatic control of the one of the plurality of first valves or the one of the plurality of second valves. 17. The apparatus of claim 16, further comprising: a controller to control the plurality of electrical actuation devices to selectively actuate ones of the plurality of first valves and ones of the plurality of second valves to provide a first desired flow rate through the first outlet and to provide a second desired flow rate through the second outlet. 18. An apparatus for controlling gas distribution, comprising: a mounting block having an inlet, a first outlet, and a second outlet, wherein the inlet is coupled through a first flow path to the first outlet and wherein the inlet is coupled through a second flow path to the second outlet, wherein the mounting block is formed by a plurality of blocks coupled together, and wherein the first and second flow paths are disposed at least partially within the mounting block;a plurality of first valves coupled to the mounting block along the first flow path and a plurality of second valves coupled to the mounting block along the second flow path;a plurality of seals, wherein each one of the plurality of seals is disposed between each one of the plurality of first valves and the mounting block or each one of the plurality of second valves and the mounting block;a plurality of first orifices disposed within the first flow path, wherein each one of the plurality of first valves selectively controls gas flow through a corresponding one of the plurality of first orifices to control a total gas flow at the first outlet, wherein ones of each of the plurality of first orifices are disposed along an inlet of each corresponding first valve, and wherein the first flow path is defined through the plurality of first valves to the first outlet, and wherein a first valve of the plurality of first valves is a two-way valve and a remainder of the plurality of first valves are three-way valves; anda plurality of second orifices disposed within the second flow path, wherein each one of the plurality of second valves selectively controls gas flow through a corresponding one of the plurality of second orifices to control a total gas flow at the second outlet. 19. The apparatus of claim 18, wherein each one of the plurality of first orifices is disposed within one of the plurality of seals, one of the plurality of first valves, or one of the plurality of blocks. 20. The apparatus of claim 18, wherein each one of the plurality of blocks is coupled to one of the plurality of first valves or one of the plurality of second valves and wherein at least a portion of the first flow path or at least a portion of the second flow path is disposed within each one of the plurality of blocks.