초록 ▼

An apparatus that uses a combination of mechanical contact bearings and air bearings is disclosed. The apparatus includes a fixed seal housing, attached to a process chamber and a floating seal cartridge, which is disposed in proximity to the fixed seal housing. A shaft is disposed with an aperture

An apparatus that uses a combination of mechanical contact bearings and air bearings is disclosed. The apparatus includes a fixed seal housing, attached to a process chamber and a floating seal cartridge, which is disposed in proximity to the fixed seal housing. A shaft is disposed with an aperture in the process chamber, the central opening in the fixed seal housing and the second central opening in the floating seal cartridge. A first air bearing is created between the shaft and the floating seal cartridge in the second central opening. A second air bearing is created between the floating seal cartridge and the fixed seal housing. In this way, the floating seal cartridge is free to move with the shaft radially, while still maintaining a seal between the process chamber and the external environment.

대표청구항 ▼

1. An apparatus for moving a payload within a process chamber, comprising: a shaft passing through an aperture in a wall of the process chamber;a mechanical contact bearing to support the shaft, disposed outside the process chamber;a fixed seal housing, having a first central opening through which t

1. An apparatus for moving a payload within a process chamber, comprising: a shaft passing through an aperture in a wall of the process chamber;a mechanical contact bearing to support the shaft, disposed outside the process chamber;a fixed seal housing, having a first central opening through which the shaft passes, an upper surface affixed to an outer surface of the wall, and a lower surface;a floating seal cartridge, having a second central opening through which the shaft passes, an upper surface disposed proximate to the lower surface of the fixed seal housing wherein the space therebetween defines an interface, and a lower surface, the floating seal cartridge comprising a cartridge air channel, disposed in the floating seal cartridge, in communication with a source of pressurized air and terminating at the second central opening; andone or more cartridge vacuum channels, disposed in the floating seal cartridge, and terminating at the second central opening, wherein a first air bearing is created between the floating seal cartridge and the fixed seal housing at the interface and a second air bearing is created between the floating seal cartridge and the shaft at the second central opening. 2. The apparatus of claim 1, wherein the fixed seal housing comprises: a housing pressurized air port for connection to a source of pressurized air;a housing differential vacuum pumping port for connection to a pump;a housing air channel in communication with the pressurized air port and terminating at the lower surface to deliver pressurized air; andone or more housing vacuum channels in communication with the housing differential vacuum pumping port and terminating at the lower surface to evacuate pressurized air from the interface. 3. The apparatus of claim 2, wherein the cartridge air channel is in communication with the upper surface of the floating seal cartridge to deliver pressurized air from the interface to the second central opening; and the cartridge vacuum channels evacuate pressurized air from the second central opening and deliver the pressurized air to the interface. 4. The apparatus of claim 2, wherein the floating seal cartridge comprises: one or more cartridge pressurized air ports disposed on an outer surface for connection to a source of pressurized air, where the cartridge air channel is in communication with the cartridge pressurized air ports; andone or more cartridge differential vacuum pumping ports disposed on an outer surface for connection to a pump, where the cartridge vacuum channels deliver pressurized air from the second central opening to the cartridge differential vacuum pumping ports. 5. The apparatus of claim 1, wherein the floating seal cartridge comprises: one or more cartridge pressurized air ports disposed on an outer surface for connection to a source of pressurized air;one or more cartridge differential vacuum pumping ports disposed on an outer surface for connection to a pump;wherein the cartridge air channel is in communication with the cartridge pressurized air port;a second cartridge air channel is in communication with the cartridge pressurized air ports and the upper surface to deliver pressurized air; andwherein the cartridge vacuum channels are in communication with the second central opening, the upper surface and the cartridge differential vacuum pumping ports to evacuate pressurized air. 6. The apparatus of claim 1, further comprising a second fixed surface, having an upper surface and a central opening through which the shaft passes, disposed such that the upper surface is proximate to the lower surface of the floating seal cartridge, the gap therebetween defining a second interface, wherein an air bearing is created in the second interface. 7. The apparatus of claim 1, wherein the first air bearing and the second air bearing each comprise differentially pumped non-contact seals. 8. The apparatus of claim 7, wherein the cartridge vacuum channels comprise a vent port, a rough vacuum port and a high vacuum port. 9. A method of allowing a shaft to penetrate an aperture in a process chamber while maintaining a pressure differential between the process chamber and the exterior environment comprising: disposing a fixed seal housing against the process chamber, the fixed seal housing comprising a first central opening aligned with the aperture;disposing a floating seal cartridge beneath the fixed seal housing, where the space between the fixed seal housing and the floating seal cartridge defines an interface, wherein the floating seal cartridge comprises a second central opening;disposing the shaft through the second central opening, the first central opening and the aperture; andcreating a first air bearing between the floating seal cartridge and the shaft in the second central opening and a second air bearing between the floating seal cartridge and the fixed seal housing at the interface. 10. The method of claim 9, wherein the first air bearing and the second air bearing comprise differentially pumped non-contact seals. 11. An apparatus for moving a payload within a process chamber, comprising: a shaft passing through an aperture in a wall of the process chamber;a mechanical contact bearing to support the shaft, disposed outside the process chamber;a fixed seal housing, having a first central opening through which the shaft passes, an upper surface affixed to an outer surface of the wall, and a lower surface, the fixed seal housing comprising a housing pressurized air port for connection to a source of pressurized air;a housing differential vacuum pumping port for connection to a pump;one or more housing air channels in communication with the housing pressurized air port and terminating at the lower surface to deliver pressurized air; andone or more housing vacuum channels in communication with the housing differential vacuum pumping port and terminating at the lower surface to evacuate pressurized air;a floating seal cartridge, having a second central opening through which the shaft passes, an upper surface disposed proximate to the lower surface of the fixed seal housing wherein the space therebetween defines an interface, and a lower surface, the floating seal cartridge comprising one or more cartridge air channels, disposed in the floating seal cartridge, connecting the upper surface of the floating seal cartridge to the second central opening, such that pressurized air from the interface is supplied to the second central opening; andone or more cartridge vacuum channels, disposed in the floating seal cartridge, connecting the interface and the second central opening, wherein pressurized air is evacuated from the second central opening and delivered to the interface;wherein a first air bearing is created between the floating seal cartridge and the fixed seal housing at the interface and a second air bearing is created between the floating seal cartridge and the shaft at the second central opening. 12. The apparatus of claim 11, wherein the first air bearing and the second air bearing each comprise differentially pumped non-contact seals. 13. The apparatus of claim 12, wherein the housing vacuum channels and the cartridge vacuum channels comprise a vent port, a rough vacuum port and a high vacuum port. 14. The apparatus of claim 11, further comprising a second fixed surface, having an upper surface and a central opening through which the shaft passes, disposed such that the upper surface is proximate to the lower surface of the floating seal cartridge, the gap therebetween defining a second interface, wherein an air bearing is created in the second interface.