Hochscule Regensburg, University of Applied Science
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초록▼
The invention relates to a measuring apparatus comprising an apparatus for forming a liquid optical waveguide having a substrate (1) having an at least partially curved closed microchannel (2) having a low-refractive coating (13), whereby there is formed in the substrate (1) at least one feed line (
The invention relates to a measuring apparatus comprising an apparatus for forming a liquid optical waveguide having a substrate (1) having an at least partially curved closed microchannel (2) having a low-refractive coating (13), whereby there is formed in the substrate (1) at least one feed line (6) for supplying liquid, and whereby there is provided at least at one end of the closed microchannel (2) an apparatus for coupling light axially into the closed microchannel and/or for coupling light axially out of the closed microchannel (2), further comprising a light source (4), a light detector (5), and a first liquid pump (9) which supplies a sample liquid (7) to the closed microchannel (2) via the at least one feed line (6, 6a).
대표청구항▼
1. A measuring apparatus comprising: an apparatus for forming a liquid optical waveguide comprising a silicon wafer as a substrate (1) having an isotropically etched, spiral-shaped microchannel (2) which is provided with a coating (13) that is low-refractive in comparison with an aqueous solution, a
1. A measuring apparatus comprising: an apparatus for forming a liquid optical waveguide comprising a silicon wafer as a substrate (1) having an isotropically etched, spiral-shaped microchannel (2) which is provided with a coating (13) that is low-refractive in comparison with an aqueous solution, and which is covered with a cover plate (12) for forming a closed microchannel (2), whereby the cover plate (12) is provided with a further low-refractive coating (13) at least above the microchannel (2), whereby there is formed in the substrate (1) at least one feed line (6) which permits a supplying of liquid into the closed microchannel (2) and/or a removing of liquid from the closed microchannel (2), whereby a respective feed line (6) is preferably formed at the ends of the microchannel (2), and whereby there is provided at least at one end of the closed microchannel (2), preferably at both ends of the microchannel (2), an apparatus for coupling light axially into the closed microchannel and/or for coupling light axially out of the closed microchannel (2), as well asa light source (4) which is adapted to penetrate the closed microchannel (2) with light,a light detector (5), anda first liquid pump (9) which supplies a sample liquid (7) to the closed microchannel (2) via the at least one feed line (6, 6a). 2. The measuring apparatus according to claim 1, characterized in that the measuring apparatus is adapted to provide a continuous liquid stream within the microchannel. 3. The measuring apparatus according to claim 1 or 2, characterized in that the apparatus for forming a liquid optical waveguide for axially coupling light in and/or out is configured as a receiving means for an optical waveguide (6) which permits a coupling in and/or coupling out via the optical waveguide (6), whereby the receiving means is preferably configured as an axial, straight continuation of the microchannel within the substrate (1). 4. The measuring apparatus of claim 1, characterized in that the cover plate (12) is light-transmissive, preferably consists of quartz glass and is particularly preferably provided with a coating (17) that is anti-reflective in the UV and VIS spectral ranges. 5. The measuring apparatus of claim 1, characterized in that a micromixer (10) and/or a micropump (9) is formed in the at least one feed line (6). 6. The measuring apparatus according to claim 5, further comprising: a second liquid pump (9) which supplies a detection liquid (8) to the closed microchannel (2) via a micromixer (10). 7. The measuring apparatus according to any of claims 1, 2, 4, 5, or 6, further comprising: a first optical waveguide (3) which is adapted to couple light of the light source (4) axially into the closed microchannel (2) at a first end of the closed microchannel (2), whereby the light source (4) is preferably adapted to emit monochromatic, visible light, and/ora second optical waveguide (3) which is adapted to couple light axially out of the closed microchannel (2) at a second end of the closed microchannel (2) and to feed it to the light detector (11). 8. A measuring method for the measuring apparatus of claims 1, 2, 4, 5, or 6, the measuring method, comprising the steps of: supplying sample liquid (7) and preferably detection liquid (8) into the closed microchannel (2),transversally penetrating the closed microchannel (2) with light of the light source (4), which is preferably configured as an excitation light source,axially coupling light out of the closed microchannel (2),detecting the coupled-out light in the light detector (11). 9. A measuring method for the measuring apparatus of claims 1, 2, 4, 5, or 6, the measuring method, comprising the steps of: supplying sample liquid (7) and preferably detection liquid (8) into the closed microchannel (2),coupling light of the light source (4) axially into the closed microchannel (2) at one end of the closed microchannel (2),coupling transmitted light axially out of the closed microchannel (2) at another end of the closed microchannel (2),detecting the transmitted light in the light detector (11). 10. The measuring method of claim 8, characterized in that a continuous liquid stream is provided within the microchannel. 11. An apparatus for forming a liquid optical waveguide comprising a silicon wafer as a substrate (1) having an isotropically etched, spiral-shaped microchannel (2) which is provided with a coating (13) that is low-refractive in comparison with an aqueous solution, and which is covered with a cover plate (12) for forming a closed microchannel (2), whereby the cover plate (12) is provided with a further low-refractive coating (13) at least above the microchannel (2). 12. The apparatus according to claim 11, characterized in that there is formed in the substrate (1) at least one feed line (6) which permits a supplying of liquid into the closed microchannel (2) and/or a removing of liquid from the closed microchannel (2), whereby a respective feed line (6) is preferably formed at the ends of the microchannel (2). 13. The apparatus of claims 11 or 12, characterized in that at least at one end of the closed microchannel (2), preferably at both ends of the microchannel (2), there is provided an apparatus for coupling light axially into the closed microchannel and/or for coupling light axially out of the closed microchannel (2). 14. The apparatus according to claim 13, characterized in that the apparatus for coupling light axially in and/or out is configured as a receiving means for an optical waveguide (6), which permits a coupling in and/or out via the optical waveguide (6), whereby the receiving means is preferably configured as an axial, straight continuation of the microchannel within the substrate (1). 15. The apparatus of claims 11 or 12, characterized in that the cover plate (12) is light-transmissive, preferably consists of quartz glass and is particularly preferably provided with a coating (17) that is anti-reflective in the UV and VIS spectral ranges. 16. The apparatus of claim 12, characterized in that a micromixer (10) and/or a micropump (9) is formed in the at least one feed line (6).
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이 특허에 인용된 특허 (4)
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