High pressure apparatus and method for nitride crystal growth
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
C30B-007/10
C30B-029/40
B01J-003/00
B01J-003/04
B01J-003/06
B30B-011/00
출원번호
US-0343563
(2012-01-04)
등록번호
US-8986447
(2015-03-24)
발명자
/ 주소
D'Evelyn, Mark P.
출원인 / 주소
Soraa, Inc.
대리인 / 주소
Kilpatrick Townsend & Stockton LLP
인용정보
피인용 횟수 :
0인용 특허 :
105
초록▼
A high pressure apparatus and related methods for processing supercritical fluids. In a specific embodiment, the present apparatus includes a capsule, a heater, at least one ceramic ring but can be multiple rings, optionally, with one or more scribe marks and/or cracks present. In a specific embodim
A high pressure apparatus and related methods for processing supercritical fluids. In a specific embodiment, the present apparatus includes a capsule, a heater, at least one ceramic ring but can be multiple rings, optionally, with one or more scribe marks and/or cracks present. In a specific embodiment, the apparatus optionally has a metal sleeve containing each ceramic ring. The apparatus also has a high-strength enclosure, end flanges with associated insulation, and a power control system. In a specific embodiment, the apparatus is capable of accessing pressures and temperatures of 0.2-2 GPa and 400-1200° C., respectively.
대표청구항▼
1. An apparatus for crystal growth comprising: a cylindrical capsule region for containing a cylindrical capsule within which a crystal is to be grown under elevated pressure and temperature, the cylindrical capsule region having a length and ends;an annular heating member enclosing the length of th
1. An apparatus for crystal growth comprising: a cylindrical capsule region for containing a cylindrical capsule within which a crystal is to be grown under elevated pressure and temperature, the cylindrical capsule region having a length and ends;an annular heating member enclosing the length of the cylindrical capsule region for heating the contents of the cylindrical capsule to an elevated temperature to create an elevated pressure within the capsule;at least one annular ceramic member disposed around the annular heating member, wherein the at least one annular ceramic member comprises one or more of a rare earth metal oxide, zirconium oxide, hafnium oxide, magnesium oxide, calcium oxide, aluminum oxide, yttrium oxide, sialon (Si—Al—O—N), silicon nitride, silicon oxynitride, garnets, cristobalite, and mullite; andan enclosure disposed around all of the at least one annular ceramic members. 2. Apparatus as in claim 1 wherein the annular heating member is substantially rigid. 3. Apparatus as in claim 1 wherein the annular heating member is disposed in contact with the cylindrical capsule. 4. Apparatus as in claim 1 wherein the annular heating member is disposed in contact with the at least one annular ceramic member. 5. Apparatus as in claim 1 further comprising a cylindrical sleeve surrounding at least one annular ceramic member. 6. Apparatus as in claim 5 wherein the cylindrical sleeve applies compressive force to the at least one annular ceramic member. 7. Apparatus as in claim 5 wherein the cylindrical sleeve comprises a material selected from steel, iron, nickel, and alloys thereof. 8. Apparatus as in claim 1 wherein the enclosure comprises a material selected from a group consisting of steel, zirconium, titanium, Monel, Inconel, Hastelloy, Udimet 50, Stellite, Rene 41, and Rene 88. 9. Apparatus as in claim 1 wherein the inner diameter is between about two inches and about fifty inches. 10. An apparatus for crystal growth comprising: a cylindrical capsule region for containing a cylindrical capsule within which a crystal is to be grown under elevated pressure and temperature, the cylindrical capsule region having a length and ends;an annular heating member enclosing the length of the cylindrical capsule region for heating the contents of the cylindrical capsule to an elevated temperature to create an elevated pressure within the capsule;at least two stacked annular ceramic or cermet or metal members disposed around the annular heating member, wherein each of the at least two annular ceramic or cermet or metal members are made of a material having a compressive strength of about 0.5 GPa and greater; andan enclosure disposed around all of the at least two annular ceramic members. 11. Apparatus as in claim 10 wherein the annular heating member is substantially rigid. 12. Apparatus as in claim 10 wherein the annular heating member is disposed in contact with the cylindrical capsule. 13. Apparatus as in claim 10 wherein the annular heating member is disposed in contact with the at least two annular ceramic or cermet or metal members. 14. Apparatus as in claim 10 further comprising a cylindrical sleeve surrounding each of the at least two annular ceramic or cermet or metal members. 15. Apparatus as in claim 14 wherein the cylindrical sleeve applies compressive force to the at least two annular ceramic or cermet or metal members. 16. Apparatus as in claim 14 wherein the cylindrical sleeve comprises a material selected from steel, iron, nickel, and alloys thereof. 17. Apparatus as in claim 10 wherein the enclosure comprises a material selected from a group consisting of steel, zirconium, titanium, Monel, Inconel, Hastelloy, Udimet 500, Stellite, Rene 41, and Rene 88. 18. Apparatus as in claim 10 wherein the inner diameter is between about two inches and about fifty inches. 19. A method of crystal growth comprising: providing an apparatus for crystal growth which includes: a cylindrical capsule within which a crystal is to be grown under elevated pressure and temperature, the cylindrical capsule region having a length and ends;an annular heating member enclosing the length of the cylindrical capsule for heating the contents of the cylindrical capsule to an elevated temperature to create an elevated pressure within the capsule;at least one annular ceramic member disposed around the annular heating member, each of the at least one annular ceramic members comprising one or more of a rare earth metal oxide, zirconium oxide, hafnium oxide, magnesium oxide, calcium oxide, aluminum oxide, yttrium oxide, sialon (Si—Al—O—N), silicon nitride, silicon oxynitride, garnets, cristobalite, and mullite; andan enclosure disposed around all of the at least one annular ceramic membersplacing solvent in the capsule;heating the capsule using the heating member to cause an increase in temperature within the capsule to greater than 200 degrees Celsius to cause the solvent to be superheated; andslidably removing the capsule from the heating member after completing the crystal growth. 20. The method of claim 19 further comprising forming a crystalline material from the superheated solvent.
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