Micromachined piezoelectric three-axis gyroscope and stacked lateral overlap transducer (slot) based three-axis accelerometer
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
G01P-015/125
G01P-015/18
G01C-025/00
G01C-019/5712
G01C-019/5747
G01P-015/08
출원번호
US-0930229
(2010-12-30)
등록번호
US-9021880
(2015-05-05)
발명자
/ 주소
Stephanou, Philip Jason
Acar, Cenk
Shenoy, Ravindra Vaman
Burns, David William
Black, Justin Phelps
Petersen, Kurt Edward
Ganapathi, Srinivasan Kodaganallur
출원인 / 주소
QUALCOMM MEMS Technologies, Inc.
대리인 / 주소
Weaver Austin Villeneuve & Sampson
인용정보
피인용 횟수 :
5인용 특허 :
53
초록▼
This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for making and using x-axis gyroscopes, y-axis gyroscopes, z-axis gyroscopes, two-axis accelerometers and three-axis accelerometers. Combining fabrication processes for such device
This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for making and using x-axis gyroscopes, y-axis gyroscopes, z-axis gyroscopes, two-axis accelerometers and three-axis accelerometers. Combining fabrication processes for such devices can enable the monolithic integration of six inertial sensing axes on a single substrate, such as a single glass substrate. Such devices may be included in a mobile device, such as a mobile display device.
대표청구항▼
1. An apparatus, comprising: a substrate extending substantially in a first plane;a first plurality of electrodes formed substantially along a first axis on the substrate;a second plurality of electrodes formed substantially along a second axis on the substrate;a first central anchor attached to the
1. An apparatus, comprising: a substrate extending substantially in a first plane;a first plurality of electrodes formed substantially along a first axis on the substrate;a second plurality of electrodes formed substantially along a second axis on the substrate;a first central anchor attached to the substrate;a frame attached to the first central anchor and extending substantially in a second plane, the frame being substantially constrained for motion along the second axis; anda first proof mass attached to the frame and extending substantially in the second plane, the first proof mass having a first plurality of slots extending along the first axis and a second plurality of slots extending along the second axis, the first proof mass being conductive and being substantially constrained for motion along the first axis and along the second axis,wherein a lateral movement of the first proof mass in response to an applied lateral acceleration along the first axis results in a first change in capacitance at the second plurality of electrodes,wherein a lateral movement of the first proof mass in response to an applied lateral acceleration along the second axis results in a second change in capacitance at the first plurality of electrodes, andwherein the first and second pluralities of electrodes are formed substantially in a third plane that is disposed between the first plane and the second plane, the third plane separated from the second plane by a gap. 2. The apparatus of claim 1, further including first flexures that couple the first proof mass to the frame, the first flexures allowing the first proof mass to move along the first axis without causing the frame to move along the first axis. 3. The apparatus of claim 1, further including second flexures that couple the frame to the first central anchor, the second flexures allowing the first proof mass and the frame to move together along the second axis. 4. The apparatus of claim 1, wherein the frame surrounds the first central anchor and the first proof mass surrounds the frame. 5. The apparatus of claim 1, wherein one or more slots extend only partially through the first proof mass. 6. The apparatus of claim 1, wherein at least one of the first proof mass and the frame is formed, at least in part, from metal. 7. The apparatus of claim 1, further comprising: an appended mass coupled to the first proof mass; anda third electrode and a fourth electrode on the substrate,wherein a capacitance between the appended mass and the third and fourth electrodes change in response to a normal acceleration applied to the first proof mass. 8. The apparatus of claim 1, further comprising: a second anchor formed on the substrate;a flexure attached to the second anchor, the flexure and the second anchor forming a pivot;a third electrode formed on the substrate;a fourth electrode formed on the substrate;a second proof mass having a first side proximate the third electrode and a second side proximate the fourth electrode, the second proof mass disposed adjacent the pivot, the second proof mass being coupled to and configured for rotation about the pivot, the rotation resulting in a third change in capacitance at the third electrode and a fourth change in capacitance at the fourth electrode. 9. The apparatus of claim 8, wherein a center of mass of the second proof mass is substantially offset from the pivot. 10. The apparatus of claim 1, further comprising: a first drive frame;a second central anchor;a plurality of first drive beams disposed on opposing sides of the second central anchor, the first drive beams connecting the first drive frame to the second central anchor, each of the first drive beams including a piezoelectric layer and configured to cause the first drive frame to oscillate torsionally in a plane of the first drive beams;a second proof mass; anda plurality of first sense beams including a layer of piezoelectric sense electrodes, the first sense beams configured for connecting the first drive frame to the second proof mass, the first sense beams being configured to bend in a sense plane substantially perpendicular to the plane of the first drive beams in response to an applied angular rotation, causing a piezoelectric charge in the sense electrodes. 11. The apparatus of claim 10, wherein the plurality of first drive beams is further configured to constrain the first drive frame to rotate substantially in the plane of the first drive beams. 12. The apparatus of claim 10, wherein the plurality of first drive beams includes a first pair of first drive beams disposed on a first side of the second central anchor and a second pair of first drive beams disposed on an opposing side of the second central anchor. 13. The apparatus of claim 10, wherein the first drive frame is disposed within the second proof mass. 14. The apparatus of claim 10, wherein the first sense beams are configured to bend in the sense plane in response to sense motion of the second proof mass. 15. The apparatus of claim 10, wherein the first sense beams are tapered sense beams having a width that decreases with increasing distance from the second central anchor. 16. The apparatus of claim 1, further comprising: a first sense frame;a second proof mass disposed outside the first sense frame;a pair of anchors;a plurality of first drive beams disposed on opposing sides of the first sense frame and between the pair of anchors, the first drive beams connecting the first sense frame to the second proof mass, each of the first drive beams including a piezoelectric layer and configured to cause drive motions of the second proof mass, the drive motions being torsional oscillations substantially in a first plane of the first drive beams; anda plurality of first sense beams connecting the first sense frame to the pair of anchors, each of the first sense beams including a layer of piezoelectric sense electrodes configured to produce a piezoelectric charge in response to an angular rotation applied to the apparatus,wherein the first sense frame is substantially decoupled from the drive motions of the second proof mass. 17. The apparatus of claim 16, wherein the second proof mass and the first sense frame oscillate together torsionally out of the first plane, in response to the applied angular rotation, when the apparatus is operating in a sense mode. 18. The apparatus of claim 16, wherein the first sense beams are tapered sense beams. 19. The apparatus of claim 16, further including linkage beams configured to increase a transfer of a second proof mass sense motion to the first sense frame when the apparatus is operating in a sense mode. 20. The apparatus of claim 16, wherein the first sense frame includes tapering portions that are wider at a first end near a second anchor and narrower at a second end away from the second anchor. 21. The apparatus of claim 16, wherein the first drive beams are compliant to in-plane stresses applied in the first plane but stiff to out-of-plane stresses. 22. The apparatus of claim 16, wherein at least one of the second proof mass and the first sense frame are formed, at least in part, from plated metal. 23. The apparatus of claim 16, wherein the first drive beams are configured to generate drive oscillations via a differential piezoelectric drive. 24. The apparatus of claim 20, further including linkage beams configured to increase a transfer of a second proof mass sense motion to the first sense frame when the apparatus is in a sense mode, wherein the linkage beams are connected to the first sense frame near the second end of the tapering portions. 25. The apparatus of claim 1, further comprising: a second anchor;a sense frame disposed around the second anchor;a plurality of sense beams, each of the sense beams including a layer of piezoelectric sense electrodes, the sense beams configured for connecting the sense frame to the second anchor;a drive frame disposed around and coupled to the sense frame, the drive frame including a first side and a second side;a plurality of piezoelectric drive beams disposed on opposing sides of the sense frame, the drive beams configured to drive the first side of the drive frame in a first direction along a third axis substantially in the plane of the drive frame, the drive beams being further configured to drive the second side of the drive frame in a second and opposing direction along the third axis;a drive frame suspension configured to substantially restrict a drive motion of the drive frame to that of a substantially linear displacement along the third axis; anda sense frame suspension configured to be compliant to rotation around a fourth axis orthogonal to the third axis, the sense frame suspension configured to resist translational motion along the first axis. 26. The apparatus of claim 25, wherein the sense frame is substantially decoupled from drive motions of the drive frame. 27. The apparatus of claim 25, wherein the drive frame suspension includes a plurality of flexures configured for coupling the sense frame to the drive frame. 28. The apparatus of claim 25, wherein the plurality of sense beams includes a first pair of sense beams extending from a first side of the second anchor along the first axis and a second pair of sense beams extending from a second side of the second anchor along a second axis substantially perpendicular to the third axis, the second side of the second anchor being adjacent to the first side of the second anchor. 29. The apparatus of any one of claim 1, 8, 10, 16 or 25, wherein the apparatus includes at least one of an accelerometer and a gyroscope, further comprising: a display;a processor that is configured to communicate with the display and at least one of the accelerometer and the gyroscope, the processor being configured to process image data; anda memory device that is configured to communicate with the processor. 30. The apparatus of claim 29, further comprising: a driver circuit configured to send at least one signal to the display; anda controller configured to send at least a portion of the image data to the driver circuit. 31. The apparatus of claim 29, further comprising: an image source module configured to send the image data to the processor. 32. The apparatus of claim 31, wherein the image source module includes at least one of a receiver, transceiver, and transmitter. 33. The apparatus of claim 29, further comprising: an input device configured to receive input data and to communicate the input data to the processor. 34. The apparatus of claim 29, wherein the processor is configured to process and analyze at least one of accelerometer data received from the accelerometer and gyroscope data received from the gyroscope. 35. The apparatus of claim 34, wherein the processor is configured to control a state of the display according to at least one of accelerometer data received from the accelerometer and gyroscope data received from the gyroscope. 36. The apparatus of claim 34, wherein the apparatus comprises a mobile device, wherein the processor is configured to determine whether the accelerometer data indicate that the mobile device has been dropped. 37. The apparatus of claim 36, wherein the processor is configured to control the display to prevent damage when the accelerometer data indicate the mobile device has been dropped. 38. The apparatus of claim 35, wherein the processor is configured to control the display of a game according to at least one of the accelerometer data and the gyroscope data. 39. The apparatus of claim 36, wherein the processor is further configured to save the accelerometer data in memory when the accelerometer data indicate that the mobile device has been dropped. 40. The apparatus of claim 36, further including a network interface, wherein the processor is further configured to obtain time data from a time server via the network interface, and wherein the processor is further configured to save time data associated with the accelerometer data when the accelerometer data indicate that the mobile device has been dropped. 41. An apparatus, comprising: a substrate extending substantially in a first plane;a first plurality of electrodes formed substantially along a first axis on the substrate;a second plurality of electrodes formed substantially along a second axis on the substrate;a first central anchor attached to the substrate;a frame attached to the first central anchor and extending substantially in a second plane, the frame being substantially constrained for motion along the second axis; andfirst proof mass means for responding to an applied lateral acceleration along the first axis by causing in a first change in capacitance at the second plurality of electrodes, and for responding to an applied lateral acceleration along the second axis by causing in a second change in capacitance at the first plurality of electrodes, the first proof mass means being formed of conductive material, attached to the frame and extending substantially in the second plane, the first proof mass means having a first plurality of slots extending along the first axis and a second plurality of slots extending along the second axis, the first proof mass means being substantially constrained for motion along the first axis and along the second axis, wherein the first and second pluralities of electrodes are formed substantially in a third plane that is disposed between the first plane and the second plane, the third plane separated from the second plane by a gap. 42. The apparatus of claim 41, further comprising: a second anchor formed on the substrate;a flexure attached to the second anchor, the flexure and the second anchor forming a pivot;third electrodes formed on the substrate;fourth electrodes formed on the substrate;second proof mass means for rotation about the pivot, the rotation resulting in a third change in capacitance at the third electrode and a fourth change in capacitance at the fourth electrode, the second proof mass means having a first side proximate the third electrode and a second side proximate the fourth electrode. 43. The apparatus of claim 41, further comprising: a first drive frame;a second central anchor;a plurality of first drive beam means for connecting the first drive frame to the second central anchor, the first drive beam means disposed on opposing sides of the second central anchor, each the first drive beam means including a piezoelectric layer and configured to cause the first drive frame to oscillate torsionally in a plane of the first drive beam means;a proof mass; anda plurality of first sense beam means for bending in a sense plane substantially perpendicular to a plane of the first drive beam means in response to an applied angular rotation, the proof mass including a layer of piezoelectric sense electrodes, wherein the bending causes a piezoelectric charge in the sense electrodes. 44. The apparatus of claim 41, further comprising: a first sense frame;a proof mass disposed outside the first sense frame;a pair of anchors;second drive beam means for connecting the first sense frame to the proof mass and for causing drive motions of the proof mass, the drive motions being torsional oscillations substantially in a first plane of the second drive beam means, the second drive beam means disposed on opposing sides of the first sense frame and between the pair of anchors; anda plurality of second sense beam means for connecting the first sense frame to the pair of anchors and for producing a piezoelectric charge in response to an angular rotation applied to the apparatus,wherein the first sense frame is substantially decoupled from the drive motions of the proof mass. 45. The apparatus of claim 41, further comprising: a second anchor;a sense frame disposed around the second anchor;sense beam means for connecting the sense frame to the second anchor;a drive frame disposed around and coupled to the sense frame, the drive frame including a first side and a second side;drive beam means for driving the first side of the drive frame in a first direction along a third axis substantially in the plane of the drive frame and for driving the second side of the drive frame in a second and opposing direction along the third axis, the drive beam means disposed on opposing sides of the sense frame;drive frame suspension means for substantially restricting a drive motion of the drive frame to that of a substantially linear displacement along the third axis; andsense frame suspension means for resisting translational motion along the first axis and for being compliant to rotation around a fourth axis orthogonal to the third axis.
Meyer Hans U. (42 ; rue de Lausanne 1110 Morges CHX), Capacitive position sensor including a scale with integral topographical features which effect the mutual capacitance be.
Clark William A. ; Juneau Thor N. ; Lemkin Mark A. ; Roessig Allen W., Dual-mass vibratory rate gyroscope with suppressed translational acceleration response and quadrature-error correction capability.
Oppermann Klaus (Eichenallee 31 D-1000 Berlin DEX), Force sensor for electrical measuring of forces, torques, acceleration pressures and mechanical stresses.
Johnson, Burgess R.; Glenn, Max C.; Platt, William P.; Arch, David K.; Weber, Mark W., Methods and systems for simultaneously fabricating multi-frequency MEMS devices.
Neukermans Armand P. (3510 Arbutus Ave. Palo Alto CA 94303) Slater Timothy G. (San Francisco CA), Monolithic silicon rate-gyro with integrated sensors.
Ouchi,Satoshi; Nozoe,Toshiyuki; Nomura,Koji; Tajika,Hirofumi, Thin-film micromechanical resonator, thin-film micromechanical resonator gyro, and navigation system and automobile using the resonator gyro.
Acar,Cenk; Shkel,Andrei M., Torsional nonresonant z-axis micromachined gyroscope with non-resonant actuation to measure the angular rotation of an object.
Haritonidis Joseph H. (Cambridge MA) Howe Roger T. (Belmont MA) Schmidt Martin A. (Brookline MA) Senturia Stephen D. (Boston MA), Turbulent shear force microsensor.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.