Semiconductor device and manufacturing method thereof
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
H01L-029/04
H01L-027/12
G02F-001/1345
G02F-001/1362
G02F-001/1368
H01L-021/67
H01L-029/66
출원번호
US-0082659
(2013-11-18)
등록번호
US-9059045
(2015-06-16)
우선권정보
JP-2000-064227 (2000-03-08)
발명자
/ 주소
Yamazaki, Shunpei
Kuwabara, Hideaki
Arai, Yasuyuki
출원인 / 주소
Semiconductor Energy Laboratory Co., Ltd.
대리인 / 주소
Robinson, Eric J.
인용정보
피인용 횟수 :
2인용 특허 :
267
초록▼
A TFT is manufactured using at least five photomasks in a conventional liquid crystal display device, and therefore the manufacturing cost is high. By performing the formation of the pixel electrode 127, the source region 123 and the drain region 124 by using three photomasks in three photolithograp
A TFT is manufactured using at least five photomasks in a conventional liquid crystal display device, and therefore the manufacturing cost is high. By performing the formation of the pixel electrode 127, the source region 123 and the drain region 124 by using three photomasks in three photolithography steps, a liquid crystal display device prepared with a pixel TFT portion, having a reverse stagger type n-channel TFT, and a storage capacitor can be realized, FIG. 2.
대표청구항▼
1. A display device comprising: a thin film transistor over a substrate, the thin film transistor comprising a gate electrode over the substrate, a gate insulating film over the gate electrode;a capacitor wiring line over the substrate, wherein the capacitor wiring line comprises a same material as
1. A display device comprising: a thin film transistor over a substrate, the thin film transistor comprising a gate electrode over the substrate, a gate insulating film over the gate electrode;a capacitor wiring line over the substrate, wherein the capacitor wiring line comprises a same material as the gate electrode;a first insulating film over the capacitor wiring line;a first conductive layer over the first insulating film and electrically connected to a drain of the thin film transistor wherein a capacitor is formed between the capacitor wiring line and the first conductive layer with at least the first insulating film interposed therebetween;a second insulating film comprising a resin over the thin film transistor and the first conductive layer wherein at least a portion of the second insulating film has a roughened upper surface;a pixel electrode including a reflective conductive film over the second insulating film and electrically connected to the first conductive layer through a hole in the second insulating film wherein at least a portion of the reflective conductive film has a rough surface due to the roughened upper surface of the second insulating film. 2. The display device according to claim 1, further comprising: a terminal portion over the substrate, the terminal portion comprising: a second conductive layer over the substrate, the second conductive layer comprising a same material as the gate electrode of the thin film transistor; anda third conductive layer over and in electrical contact with the second conductive layer; anda flexible printed circuit in electrical contact with the terminal portion. 3. The display device according to claim 1, wherein the pixel electrode is in contact with the first conductive layer through a second hole in the second insulating film. 4. The display device according to claim 1, wherein the thin film transistor comprises a silicon film including a channel formation region. 5. The display device according to claim 1, further comprising a liquid crystal material adjacent to the pixel electrode. 6. The display device according to claim 1, wherein the first conductive layer is electrically connected to the drain of the thin film transistor through the pixel electrode. 7. The display device according to claim 1, wherein the reflective conductive film directly contacts the first conductive layer. 8. A display device comprising: a thin film transistor over a substrate, the thin film transistor comprising a gate electrode over the substrate, a gate insulating film over the gate electrode;a capacitor wiring line over the substrate, wherein the capacitor wiring line comprises a same material as the gate electrode;a first insulating film over the capacitor wiring line;a first conductive layer over the first insulating film and electrically connected to a drain of the thin film transistor, wherein a capacitor is formed between the capacitor wiring line and the first conductive layer with at least the first insulating film interposed therebetween;a second insulating film comprising a resin over the thin film transistor and the first conductive layer wherein at least a portion of the second insulating film has a roughened upper surface; anda pixel electrode including a reflective conductive film over the second insulating film and electrically connected to the first conductive layer through a hole in the second insulating film wherein at least a portion of the reflective conductive film has a rough surface due to the roughened upper surface of the second insulating film,wherein the capacitor wiring line and the gate electrode are formed by patterning a first conductive film. 9. The display device according to claim 8, further comprising: a terminal portion over the substrate, the terminal portion comprising: a second conductive layer over the substrate, the second conductive layer comprising a same material as the gate electrode of the thin film transistor; anda third conductive layer over and in electrical contact with the second conductive layer; anda flexible printed circuit in electrical contact with the terminal portion. 10. The display device according to claim 8, wherein the pixel electrode is in contact with the first conductive layer through a second hole in the second insulating film. 11. The display device according to claim 8, wherein the thin film transistor comprises a silicon film including a channel formation region. 12. The display device according to claim 8, further comprising a liquid crystal material adjacent to the pixel electrode. 13. The display device according to claim 8, wherein the first conductive layer is electrically connected to the drain of the thin film transistor through the pixel electrode. 14. The display device according to claim 8, wherein the reflective conductive film directly contacts the first conductive layer. 15. A display device comprising: a thin film transistor over a substrate, the thin film transistor comprising a gate electrode over the substrate, a gate insulating film over the gate electrode;a gate wiring over the substrate, wherein the gate electrode is electrically connected to the gate wiring;a capacitor wiring line over the substrate, wherein the capacitor wiring line extends in parallel with the gate wiring and overlaps with the gate wiring;a first insulating film over the capacitor wiring line;a first conductive layer over the first insulating film and electrically connected to a drain of the thin film transistor wherein a capacitor is formed between the capacitor wiring line and the first conductive layer with at least the first insulating film interposed therebetween;a second insulating film comprising a resin over the thin film transistor and the first conductive layer wherein at least a portion of the second insulating film has a roughened upper surface;a pixel electrode including a reflective conductive film over the second insulating film and electrically connected to the first conductive layer through a hole in the second insulating film wherein at least a portion of the reflective conductive film has a rough surface due to the roughened upper surface of the second insulating film. 16. The display device according to claim 15, further comprising: a terminal portion over the substrate, the terminal portion comprising: a second conductive layer over the substrate, the second conductive layer comprising a same material as the gate electrode of the thin film transistor; anda third conductive layer over and in electrical contact with the second conductive layer; anda flexible printed circuit in electrical contact with the terminal portion. 17. The display device according to claim 15, wherein the pixel electrode is in contact with the first conductive layer through a second hole in the second insulating film. 18. The display device according to claim 15, wherein the thin film transistor comprises a silicon film including a channel formation region. 19. The display device according to claim 15, further comprising a liquid crystal material adjacent to the pixel electrode. 20. The display device according to claim 15, wherein the first conductive layer is electrically connected to the drain of the thin film transistor through the pixel electrode.
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