초록 ▼

Substrate carrier can have drainage area leading the liquid away from the substrates, so that liquid droplet can be channeled away from the substrate area. The drainage area can include tilted lines and surfaces toward the ground away from the substrates. The carrier can further have drainage area l

Substrate carrier can have drainage area leading the liquid away from the substrates, so that liquid droplet can be channeled away from the substrate area. The drainage area can include tilted lines and surfaces toward the ground away from the substrates. The carrier can further have drainage area leading the liquid to an end of the carrier, which then can be channeled to the ground without being free fall to the ground.

대표청구항 ▼

1. A carrier for supporting one or more substrates, the carrier comprising: at least one first structure, wherein the first structure comprises a rod,wherein the cross-section of the rod comprises at least one of a quasi-square shape and an elliptical shape,wherein the rod comprises plastic re-enfor

1. A carrier for supporting one or more substrates, the carrier comprising: at least one first structure, wherein the first structure comprises a rod,wherein the cross-section of the rod comprises at least one of a quasi-square shape and an elliptical shape,wherein the rod comprises plastic re-enforced with a metal core;at least one second structure, wherein the second structure is secured to the first structure,wherein the second structure is partially protruded to a space for separating two adjacent substrates, andwherein the second structure comprises surfaces tilting away from the substrates so that liquid droplets are drained by gravitation force away from the space. 2. A carrier as in claim 1 wherein the protruded portion of the second structure comprises a pyramid or a cone shape. 3. A carrier as in claim 2 wherein the pyramid comprises an edge at the bottommost section. 4. A carrier as in claim 2 wherein the pyramid or the cone shape comprise an apex pointing upward from the first structure. 5. A carrier as in claim 1 wherein the first structure comprises a slanted angle. 6. A carrier as in claim 1 wherein the first structure comprises an L shape having one side partially covering a side of the carrier and one side partially covering the bottom of the carrier. 7. A carrier as in claim 1 wherein the first structure is disposed at a side of the carrier, and the carrier further comprises a bottom structure for supporting the substrates at the bottom of the carrier.