초록 ▼

A photoresist delivery system includes a photoresist pump, a photoresist reservoir coupled to the photoresist pump, and a photoresist container. A control valve is between the photoresist reservoir and the photoresist container and is movable from a closed position to an open position upon engagemen

A photoresist delivery system includes a photoresist pump, a photoresist reservoir coupled to the photoresist pump, and a photoresist container. A control valve is between the photoresist reservoir and the photoresist container and is movable from a closed position to an open position upon engagement of the photoresist container with the photoresist reservoir to replenish photoresist therein.

대표청구항 ▼

1. A photoresist delivery system comprising: at least one photoresist pump;a photoresist reservoir coupled to said at least one photoresist pump;a photoresist container; anda control valve between said photoresist reservoir and said photoresist container and being movable from a closed position to a

1. A photoresist delivery system comprising: at least one photoresist pump;a photoresist reservoir coupled to said at least one photoresist pump;a photoresist container; anda control valve between said photoresist reservoir and said photoresist container and being movable from a closed position to an open position upon engagement of said photoresist container with said photoresist reservoir to replenish photoresist therein, with the photoresist in said photoresist container being gravity fed into said photoresist reservoir;said photoresist reservoir comprising a control valve receiving assembly having a recessed opening to receive said control valve, with the recessed opening being defined by side walls and a bottom surface coupled thereto, with said sides walls including at least one air hole adjacent said control valve so that when a level of the photoresist therein covers the at least one air hole, then the photoresist is no longer gravity fed into said photoresist reservoir. 2. The photoresist delivery system according to claim 1, wherein said control valve is coupled to said photoresist container, and wherein said photoresist container is placed in an inverted position when said control valve engages said photoresist reservoir. 3. The photoresist delivery system according to claim 1, wherein said bottom surface of the recessed opening comprises a pin extending outwardly therefrom; and wherein said control valve comprises a plug that is moveable from the closed position to the open position upon engagement with said pin. 4. The photoresist delivery system according to claim 3, wherein the bottom surface of the recessed opening is configured as a strainer. 5. The photoresist delivery system according to claim 3, wherein said plug is spring biased in a normally closed position, and includes an opening therein for receiving a tip of said pin. 6. The photoresist delivery system according to claim 1, wherein the recessed opening and said control valve are circularly shaped. 7. The photoresist delivery system according to claim 1, further comprising photoresist tubing extending from said control valve receiving assembly into said photoresist reservoir. 8. The photoresist delivery system according to claim 1, further comprising a photoresist level monitor coupled to said photoresist reservoir. 9. The photoresist delivery system according to claim 1, further comprising a photoresist container loader configured to receive said photoresist container in a non-inverted position, and to place said photoresist container in an inverted position for said control valve to engage said photoresist reservoir. 10. A photoresist delivery system comprising: at least one photoresist pump;a photoresist reservoir coupled to said at least one photoresist pump, and comprising a control valve receiving assembly having a recessed opening, the recessed opening being defined by side walls and a bottom surface coupled thereto, with said sides walls including at least one air hole and with said bottom surface comprising a pin extending outwardly therefrom;a photoresist container; anda control valve between said photoresist reservoir and said photoresist container, and comprising a plug movable from a closed position to an open position upon engagement with said pin to replenish photoresist in said photoresist reservoir, with the photoresist in said photoresist container being gravity fed into said photoresist reservoir until a level of the photoresist therein covers the at least one air hole. 11. The photoresist delivery system according to claim 10, wherein said control valve is coupled to said photoresist container, and wherein said photoresist container is placed in an inverted position when said plug engages said pin. 12. The photoresist delivery system according to claim 10, wherein the bottom surface of the recessed opening is configured as a strainer. 13. The photoresist delivery system according to claim 10, wherein said plug is spring biased in a normally closed position, and includes an opening therein for receiving a tip of said pin. 14. The photoresist delivery system according to claim 10, further comprising photoresist tubing extending from said control valve receiving assembly into said photoresist reservoir. 15. The photoresist delivery system according to claim 10, further comprising at least one photoresist level monitor coupled to said photoresist reservoir. 16. The photoresist delivery system according to claim 10, further comprising a photoresist container loader configured to receive said photoresist container in a non-inverted position, and to place said photoresist container in an inverted position for said control valve to engage said photoresist reservoir.