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A substrate processing system for processing an essentially vertically oriented substrate is described. The system includes a first processing chamber having a first processing region to deposit a first layer comprising a first material, a second processing chamber having a second processing region

A substrate processing system for processing an essentially vertically oriented substrate is described. The system includes a first processing chamber having a first processing region to deposit a first layer comprising a first material, a second processing chamber having a second processing region to deposit a second layer over the first layer, the second layer comprising a second material, a third processing chamber having a third processing region to deposit a layer comprising the second material, a transfer chamber providing essentially linear transport paths with the first, second, and third chambers, respectively, and a chamber comprising a first and a second transportation track, wherein at least one of the first and second transportation tracks forms an essentially linear transportation path with the first processing chamber, wherein the first chamber is adapted to receive the substrate from the transfer chamber, and to deposit a further layer comprising the first material.

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1. A substrate processing system for processing an essentially vertically-oriented substrate, comprising: a first processing chamber having a first processing region and being adapted to deposit a first layer comprising a first material, wherein the first process chamber comprises a first and a seco

1. A substrate processing system for processing an essentially vertically-oriented substrate, comprising: a first processing chamber having a first processing region and being adapted to deposit a first layer comprising a first material, wherein the first process chamber comprises a first and a second transportation track;a second processing chamber having a second processing region and being adapted to deposit a second layer over the first layer, the second layer comprising a second material;a third processing chamber having a third processing region and being adapted to deposit a layer comprising the second material;a transfer chamber providing linear transport paths with the first, the second, and the third chambers, respectively;a further chamber comprising further portions of the first and the second transportation track, wherein the further portions of the first and the second transportation track in the further chamber and the first and second transportation track in the first process chamber form linear transportation paths; andat least one lateral displacement mechanism configured for lateral displacement of the substrate from the first transportation track to the second transportation track and vice versa, wherein the at least one lateral displacement mechanism is configured for the lateral displacement along a direction perpendicular to the transportation paths, and wherein the at least one lateral displacement mechanism is provided in the further chamber or the first processing chamber, andwherein the first processing chamber is adapted to receive the substrate from the transfer chamber, and to deposit a further layer comprising the first material. 2. The system according to claim 1, wherein the transfer chamber is a rotation module. 3. The system according to claim 1, wherein the system comprises an inline processing system portion. 4. The system according to claim 1, further comprising: at least one load lock chamber comprising yet further portions of each of the first and the second transportation track, wherein the yet further portions are provided in extension of the first and second transportation track in the further chamber. 5. The system according to claim 1, further comprising: at least one yet further chamber having a further processing region and being adapted to deposit a further layer comprising a third material, wherein the at least one yet further chamber is connected to the transfer chamber. 6. The system according to claim 5, wherein the at least one yet further chamber comprises at least two yet further chambers, each being adapted to deposit the layer comprising the third material. 7. The system according to claim 1, wherein the first material is selected from the group consisting of: molybdenum, molybdenum-alloys, platinum, platinum-alloys, gold, gold-alloys, titanium, titanium-alloys, silver, and silver alloys. 8. The system according to claim 1, wherein the further chamber comprises a third transportation track. 9. The system according to claim 1, wherein the first transportation track comprises a plurality of guiding elements for guiding in a transport direction, wherein the second transportation track comprises a plurality of guiding elements for guiding in the transport direction, and wherein the guiding elements of the first transportation track and the second transportation track are adapted for a first and second guiding position respectively such that the guiding positions are displaced in a direction perpendicular to the transport direction. 10. The system according to claim 9, wherein the guiding elements of the first transportation track and the guiding elements of the second transportation track are provided along the transportation direction alternately. 11. The system of claim 7, wherein the first material is molybdenum, a molybdenum-alloy, titanium, or a titanium-alloy. 12. The system according to claim 2, wherein the transfer chamber is a vacuum rotation module for rotating the substrate under a pressure below 10 mbar. 13. The system according to claim 3, wherein the system is a hybrid system between an inline-processing system and a cluster processing system. 14. The system according to claim 1, wherein the at least one lateral displacement mechanism includes a first group of first transportation elements for moving along either the first or the second transportation path and configured for a linear movement in the direction perpendicular to the transportation paths from the first transportation track to the second transportation track and vice versa, and a second group of second transportation elements, which are offset from the first transportation elements, for moving along either the first or the second transportation path and configured for a linear movement in the direction perpendicular to the transportation paths. 15. The system according to claim 14, wherein the first transportation elements of the first group include first transportation rollers and the second transportation elements of the second group include second transportation rollers, wherein the first transportation elements are rotatable around first rotation axes and the second transportation elements are rotatable around second rotation axes. 16. The system according to claim 15, wherein each of the first transportation elements of the first group has a first bearing element and each of the second transportation elements of the second group has a second bearing element, wherein the first bearing elements and the second bearing elements are configured for providing the rotation around the first rotation axes and the second rotation axes, respectively. 17. The system according to claim 16, wherein the first bearing elements and the second bearing elements provide the linear movement in the direction perpendicular to the transportation paths along the first rotation axis and the second rotation axis, respectively. 18. The system according to claim 15, wherein the first transportation rollers of the first transportation elements of the first group is configured to be moved from the first transportation track to the second transportation track and vice versa by the linear movement of the first transportation elements of the first group. 19. The system according to claim 14, wherein the first transportation elements of the first group and the second transportation elements of the second group can each be moved synchronously for moving the substrate from the first transportation track to the second transportation track and vice versa. 20. The system according to claim 15, wherein the second transportation rollers are offset with respect to the first transportation rollers. 21. The system according to claim 1, wherein at least one of the first process chamber, the second process chamber and the third process chamber is provided with multiple carrier tracks.