IPC분류정보
국가/구분 |
United States(US) Patent
등록
|
국제특허분류(IPC7판) |
|
출원번호 |
US-0889498
(2013-05-08)
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등록번호 |
US-9230839
(2016-01-05)
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우선권정보 |
TW-102110717 A (2013-03-26) |
발명자
/ 주소 |
|
출원인 / 주소 |
- Gudeng Precision Industrial Co., Ltd.
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대리인 / 주소 |
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인용정보 |
피인용 횟수 :
0 인용 특허 :
2 |
초록
▼
The present invention relates to a reticle pod having gas guiding apparatus. The gas guiding apparatus communicates with at least an inlet of the reticle pod and comprises a first outlet corresponding to a first gas flowing space of the reticle pod and a second outlet corresponding to a second gas f
The present invention relates to a reticle pod having gas guiding apparatus. The gas guiding apparatus communicates with at least an inlet of the reticle pod and comprises a first outlet corresponding to a first gas flowing space of the reticle pod and a second outlet corresponding to a second gas flowing space. When the inlet supplies a high-purity gas to the gas guiding apparatus, the high-purity gas will flows through the gas guiding apparatus, and flow to the first and second gas flowing spaces via the first and second outlets, respectively to distribute uniformly in the first and second gas flowing spaces. In addition, the cleaning efficiency on the reticle is improved; the contact between the reticle and air can be avoided for protecting the reticle. Thereby, the usage of the high-purity gas is reduced, and the filling efficiency of the high-purity gas is enhanced.
대표청구항
▼
1. A reticle pod having gas guiding apparatus, comprising: a base, having at least one inlet;a cover, disposed on said base, having an accommodating space between said cover and said base, said accommodating space accommodating a reticle, said reticle dividing said accommodating space into a first g
1. A reticle pod having gas guiding apparatus, comprising: a base, having at least one inlet;a cover, disposed on said base, having an accommodating space between said cover and said base, said accommodating space accommodating a reticle, said reticle dividing said accommodating space into a first gas flowing space and a second gas flowing space; andthe gas guiding apparatus, disposed at said base, having a first gas guiding channel, at least a second gas guiding channel, at least a third gas guiding channel, a first outlet, and a second outlet, said first gas guiding channel communicating with said at least one inlet, said at least second gas guiding channel and said at least third gas guiding channel communicating with said first gas guiding channel, said first outlet communication with said at least second gas guiding channel, said second outlet communicating with said at least third gas guiding channel, said first outlet corresponding to said first gas flowing space, and said second outlet corresponding to said second gas flowing space;wherein an area of an opening of said first outlet is smaller than an area of an opening of said second outlet, so that a flow rate of a high-purity gas into said first gas flowing space is identical to a flow rate of said high-purity gas into said second gas flowing space; wherein said gas guiding apparatus comprises:a guiding body, disposed at said base, and located above said at least one inlet; anda cap, disposed at said guiding body, and forming said first gas guiding channel, said at least second gas guiding channel, and said third gas guiding channel with said guiding body, and said first outlet and said second outlet disposed at said cap; wherein said guiding body comprises: a first body, disposed at said base, located above said at least one inlet, having at least one hole and a first accommodating trench, said at least one hole corresponding to said at least one inlet, and said first accommodating trench communicating with said at least one hole; anda second body, disposed at said first body, having a second accommodating trench, and said second accommodating trench communicating with said first accommodating trench; wherein said cap comprises: a first cap part, disposed at said first body, having a first groove corresponding to said first accommodating trench and said at least one hole, and forming said first gas guiding channel; anda second cap part, accommodated in said second accommodating trench, having at least a second groove and at least a third groove, said at least second groove and said as least third groove corresponding to said second accommodating trench, and forming said at least second gas guiding channel and said at least third gas guiding channel, respectively; wherein said first cap part has at least a supporting pillar located in said first groove and against a surface of a valve of said at least one inlet. 2. The reticle pod having gas guiding apparatus of claim 1, wherein said second accommodating trench of said second body has at least one supporting projective part therein, and said at least one supporting projective part corresponds to said second groove of said second cap part and supports said second cap part. 3. The reticle pod having gas guiding apparatus of claim 1, wherein said first outlet and second outlet are rectangular holes, respectively. 4. The reticle pod having gas guiding apparatus of claim 1, and further comprising at least a limiting member, comprising a base and a limiting blockade, said base disposed at said first body, and said limiting blockade disposed at said base and against the side of said reticle. 5. The reticle pod having gas guiding apparatus of claim 4, wherein a distance between said limiting blockade and a side of the base of said reticle pod adjacent to said limiting blockade is greater than a distance between said second cap part and said side. 6. The reticle pod having gas guiding apparatus of claim 1, wherein a thickness of said second cap part is smaller or equal to a height of said second accommodating trench, and a first surface of said second body is against one side of said reticle. 7. The reticle pod having gas guiding apparatus of claim 1, and further comprising a plurality of locking members, connected pivotally in a plurality of installation grooves of said cover, respectively, and each said locking member comprising: a rotating arm, having one end connected pivotally to a corresponding one of the plurality of installation grooves; anda locking part, connected to other end of said rotating arm, said rotating arm rotating according to said locking part, said locking part locking to a latch hole of said base, and a roller is embedded on a surface of said locking part contacting said latch hole. 8. The reticle pod having gas guiding apparatus of claim 7, wherein at least a guiding projective part is disposed on a surface of said latch hole contacting said roller, and a surface of said guiding projective part contacting said roller is sloped.
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