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Methods and apparatus for material processing using dual source cyclonic plasma reactor 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • C03B-019/10
  • C03B-003/00
  • H01J-037/32
  • C03B-003/02
  • H05H-001/24
  • H05H-001/46
출원번호 US-0230846 (2014-03-31)
등록번호 US-9284210 (2016-03-15)
발명자 / 주소
  • Boughton, Daniel Robert
출원인 / 주소
  • CORNING INCORPORATED
대리인 / 주소
    Barron, Jason A.
인용정보 피인용 횟수 : 4  인용 특허 : 45

초록

Methods and apparatus provide for: feeding glass batch material into a plasma containment vessel; directing one or more sources of plasma gas into an inner volume of the plasma containment vessel in such a way that the plasma gas swirls in a cyclonic fashion within the plasma containment vessel; and

대표청구항

1. An apparatus, comprising: a plasma containment vessel having at least one wall member defining an inner volume having a central axis, an inlet end, and an opposing outlet end;an inlet structure disposed at the inlet end of the plasma containment vessel and including: (i) a material inlet for rece

이 특허에 인용된 특허 (45)

  1. Kholodenko, Arnold; Husain, Anwar, Apparatus for an optimized plasma chamber grounded electrode assembly.
  2. Liang Dong C. (Vancouver CAX) Blades Michael W. (Surrey CAX), Atmospheric pressure capacitively coupled plasma atomizer for atomic absorption and source for atomic emission spectrosc.
  3. Hwang, Soon Mo; Kim, Young Suk; Doh, Cheal Jin, Cyclonic plasma pyrolysis/vitrification system.
  4. Gutsol, Alexander F.; Fridman, Alexander; Polevich, Anatoly; Gallagher, Michael J., Cyclonic reactor with non-equilibrium gliding discharge and plasma process for reforming of solid hydrocarbons.
  5. Hiroji Hanawa ; Yan Ye ; Kenneth S Collins ; Kartik Ramaswamy ; Andrew Nguyen ; Tsutomu Tanaka, Externally excited multiple torroidal plasma source.
  6. Hanawa,Hiroji; Collins,Kenneth S; Ramaswamy,Kartik; Nguyen,Andrew; Tanaka,Tsutomu; Ye,Yan, Externally excited torroidal plasma source.
  7. Hiroji Hanawa ; Yan Ye ; Kenneth S Collins ; Kartik Ramaswamy ; Andrew Nguyen ; Tsutomu Tanaka, Externally excited torroidal plasma source.
  8. Hiroji Hanawa ; Yan Ye ; Kenneth S Collins ; Kartik Ramaswamy ; Andrew Nguyen ; Tsutomu Tanaka, Externally excited torroidal plasma source using a gas distribution plate.
  9. Hanawa, Hiroji; Ye, Yan; Collins, Kenneth S.; Ramaswamy, Kartik; Nguyen, Andrew; Tanaka, Tsutomu, Externally excited torroidal plasma source with a gas distribution plate.
  10. Collins, Kenneth S.; Hanawa, Hiroji; Ye, Yan; Ramaswamy, Kartik; Nguyen, Andrew; Barnes, Michael S.; Nguyen, Huong Thanh, Externally excited torroidal plasma source with magnetic control of ion distribution.
  11. Maydan, Dan; Thakur, Randir P. S.; Collins, Kenneth S.; Al-Bayati, Amir; Hanawa, Hiroji; Ramaswamy, Kartik; Gallo, Biagio; Nguyen, Andrew, Fabrication of silicon-on-insulator structure using plasma immersion ion implantation.
  12. Buchberger, Jr.,Douglas A.; Hoffman,Daniel J.; Ramaswamy,Kartik; Nguyen,Andrew; Hanawa,Hiorji; Collins,Kenneth S.; Al Bayati,Amir, Gasless high voltage high contact force wafer contact-cooling electrostatic chuck.
  13. Weide Carl Vander, Graphite rotary tube furnace.
  14. Hanawa,Hiroji; Ramaswamy,Kartik; Collins,Kenneth S.; Al Bayati,Amir; Gallo,Biagio; Nguyen,Andrew, Low temperature CVD process with selected stress of the CVD layer on CMOS devices.
  15. Roth John Reece, Method and apparatus for cleaning surfaces with a glow discharge plasma at one atmosphere of pressure.
  16. Roth John Reece (Knoxville TN), Method and apparatus for covering bodies with a uniform glow discharge plasma and applications thereof.
  17. Roth John R. (Knoxville TN) Tsai Peter P. (Knoxville TN), Method and apparatus for glow discharge plasma treatment of polymer materials at atmospheric pressure.
  18. Roth John R. (Knoxville TN) Tsai Peter P. (Knoxville TN) Wadsworth Larry C. (Knoxville TN) Liu Chaoya (Knoxville TN) Spence Paul D. (Knoxville TN), Method and apparatus for glow discharge plasma treatment of polymer materials at atmospheric pressure.
  19. Al Bayati,Amir; Roberts,Rick J.; Collins,Kenneth S.; MacWilliams,Ken; Hanawa,Hiroji; Ramaswamy,Kartik; Gallo,Biagio; Nguyen,Andrew, Method for ion implanting insulator material to reduce dielectric constant.
  20. Foret, Todd, Method for treating liquids with wave energy from an electrical arc.
  21. Hiroji Hanawa ; Yan Ye ; Kenneth S Collins ; Kartik Ramaswamy ; Andrew Nguyen ; Tsutomu Tanaka, Method of processing a workpiece using an externally excited torroidal plasma source.
  22. Hanawa,Hiroji; Ramaswamy,Kartik; Collins,Kenneth S.; Nguyen,Andrew; Monroy,Gonzalo Antonio, Method to drive spatially separate resonant structure with spatially distinct plasma secondaries using a single generator and switching elements.
  23. Boulos, Maher; Jurewicz, Jerzy, Multi-coil induction plasma torch for solid state power supply.
  24. Roth John R. (Knoxville TN) Tsai Peter P. (Knoxville TN) Liu Chaoyu (Knoxville TN) Laroussi Mounir (Knoxville TN) Spence Paul D. (Knoxville TN), One atmosphere, uniform glow discharge plasma.
  25. Collins,Kenneth S.; Hanawa,Hiroji; Ramaswamy,Kartik; Nguyen,Andrew; Al Bayati,Amir; Gallo,Biagio; Monroy,Gonzalo Antonio, Plasma immersion ion implantation apparatus including a plasma source having low dissociation and low minimum plasma voltage.
  26. Collins,Kenneth S.; Hanawa,Hiroji; Ramaswamy,Kartik; Nguyen,Andrew; Al Bayati,Amir; Gallo,Biagio, Plasma immersion ion implantation process.
  27. Collins,Kenneth S.; Hanawa,Hiroji; Ramaswamy,Kartik; Nguyen,Andrew; Al Bayati,Amir; Gallo,Biagio, Plasma immersion ion implantation process.
  28. Collins,Kenneth S.; Hanawa,Hiroji; Ramaswamy,Kartik; Nguyen,Andrew; Al Bayati,Amir; Gallo,Biagio, Plasma immersion ion implantation process.
  29. Collins,Kenneth S.; Hanawa,Hiroji; Ramaswamy,Kartik; Nguyen,Andrew; Al Bayati,Amir; Gallo,Biagio; Monroy,Gonzalo Antonio, Plasma immersion ion implantation process using a capacitively couple plasma source having low dissociation and low minimum plasma voltage.
  30. Collins,Kenneth S.; Hanawa,Hiroji; Ramaswamy,Kartik; Nguyen,Andrew; Al Bayati,Amir; Gallo,Biagio; Monroy,Gonzalo Antonio, Plasma immersion ion implantation process using a capacitively coupled plasma source having low dissociation and low minimum plasma voltage.
  31. Collins, Kenneth S.; Hanawa, Hiroji; Ramaswamy, Kartik; Nguyen, Andrew; Al-Bayati, Amir; Gallo, Biagio; Monroy, Gonzalo Antonio, Plasma immersion ion implantation process using a plasma source having low dissociation and low minimum plasma voltage.
  32. Collins,Kenneth S.; Hanawa,Hiroji; Ramaswamy,Kartik; Nguyen,Andrew; Al Bayati,Amir; Gallo,Biagio; Monroy,Gonzalo Antonio, Plasma immersion ion implantation process using an inductively coupled plasma source having low dissociation and low minimum plasma voltage.
  33. Collins,Kenneth S.; Hanawa,Hiroji; Ramaswamy,Kartik; Nguyen,Andrew; Al Bayati,Amir; Gallo,Biagio; Monroy,Gonzalo Antonio, Plasma immersion ion implantation system including a plasma source having low dissociation and low minimum plasma voltage.
  34. Paterson,Alexander; Todorow,Valentin N.; Panagopoulos,Theodoros; Hatcher,Brian K.; Katz,Dan; Hammond, IV,Edward P.; Holland,John P.; Matyushkin,Alexander, Plasma reactor apparatus with independent capacitive and toroidal plasma sources.
  35. Foret, Todd, Plasma whirl reactor apparatus and methods of use.
  36. Foret, Todd, Plasma whirl reactor apparatus and methods of use.
  37. Foret, Todd L., Plasma whirl reactor apparatus and methods of use.
  38. Gotovchikov Vitaly T.,RUX ; Ivanov Alexander V.,RUX ; Filippov Eugene A.,RUX, Processing of solid mixed waste containing radioactive and hazardous materials.
  39. Hiroji Hanawa ; Yan Ye ; Kenneth S Collins ; Kartik Ramaswamy ; Andrew Nguyen ; Tsutomu Tanaka, Reactor chamber for an externally excited torroidal plasma source with a gas distribution plate.
  40. Jegou Claude,FRX ; Kassabji Fayez,FRX ; Renaux Charley,FRX, Rotary melting furnace.
  41. Al Bayati,Amir; Collins,Kenneth S.; Hanawa,Hiroji; Ramaswamy,Kartik; Gallo,Biagio; Nguyen,Andrew, Semiconductor on insulator vertical transistor fabrication and doping process.
  42. Al-Bayati, Amir; Collins, Kenneth S.; Hanawa, Hiroji; Ramaswamy, Kartik; Gallo, Biagio; Nguyen, Andrew, Semiconductor on insulator vertical transistor fabrication and doping process.
  43. Al Bayati,Amir; Collins,Kenneth S.; Hanawa,Hiroji; Ramaswamy,Kartik; Gallo,Biagio; Nguyen,Andrew, Silicon-on-insulator wafer transfer method using surface activation plasma immersion ion implantation for wafer-to-wafer adhesion enhancement.
  44. Foret, Todd, Treatment of fluids with wave energy from a carbon arc.
  45. Hanawa,Hiroji; Ramaswamy,Kartik; Collins,Kenneth S.; Al Bayati,Amir; Gallo,Biagio; Nguyen,Andrew, Very low temperature CVD process with independently variable conformality, stress and composition of the CVD layer.

이 특허를 인용한 특허 (4)

  1. Boughton, Daniel Robert; Jarvis, Scott Michael, Method and apparatus for adding thermal energy to a glass melt.
  2. Boughton, Daniel Robert, Methods and apparatus for material processing using atmospheric thermal plasma reactor.
  3. Boughton, Daniel Robert, Methods and apparatus for material processing using atmospheric thermal plasma reactor.
  4. Boughton, Daniel Robert, Methods and apparatus for material processing using plasma thermal source.
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