Ion implantation and annealing for thin film crystalline solar cells
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
H01L-031/18
H01L-021/265
H01L-031/0352
H01L-031/068
H01L-031/0224
출원번호
US-0483024
(2012-05-29)
등록번호
US-9318644
(2016-04-19)
발명자
/ 주소
Moslehi, Mehrdad M.
Rana, Virendra V.
Kapur, Pawan
출원인 / 주소
Solexel, Inc.
대리인 / 주소
Wood, John
인용정보
피인용 횟수 :
2인용 특허 :
92
초록▼
A back contact back junction thin-film solar cell is formed on a thin-film semiconductor solar cell. Preferably the thin film semiconductor material comprises crystalline silicon. Base regions, emitter regions, and front surface field regions are formed through ion implantation and annealing process
A back contact back junction thin-film solar cell is formed on a thin-film semiconductor solar cell. Preferably the thin film semiconductor material comprises crystalline silicon. Base regions, emitter regions, and front surface field regions are formed through ion implantation and annealing processes.
대표청구항▼
1. A method for making base regions in a thin-film crystalline silicon substrate, the method comprising: forming openings in a dielectric layer for base contacts on a thin-film crystalline silicon substrate, wherein said openings form a patterned dielectric layer;implanting ions of an dopant element
1. A method for making base regions in a thin-film crystalline silicon substrate, the method comprising: forming openings in a dielectric layer for base contacts on a thin-film crystalline silicon substrate, wherein said openings form a patterned dielectric layer;implanting ions of an dopant element in said thin-film crystalline silicon substrate within said patterned dielectric layer to selectively introduce said dopant element at said base contacts, said patterned dielectric used as an ion implantation mask;activating said implanted dopant element to form electrically active doped base contacts;forming emitter contacts on said thin-film crystalline silicon substrate; andforming metallization contacts on said emitter contacts and said base contacts. 2. The method of claim 1 wherein said dopant element comprises at least one element from the group of phosphorus, arsenic, antimony, and indium in conjunction with an n-doped epitaxial silicon substrate. 3. The method of claim 1, further comprising the step of forming a crystalline thin-film silicon substrate, the steps comprising: forming a porous sacrificial layer on and substantially conformal to the surface of a silicon template;subsequently depositing an epitaxial silicon layer on said sacrificial layer;performing a plurality of solar cell processing steps including said ion implantation process; andreleasing said epitaxial silicon layer from said silicon template through a mechanical release or epitaxial lift off process. 4. The method of claim 1, wherein said silicon substrate is an n-type silicon substrate and the base contact doping element is phosphorous (P), arsenic (As), or antimony (Sb). 5. The method of claim 1, wherein said silicon substrate is a p-type silicon substrate and the base contact doping element is boron, gallium, or aluminum. 6. The method of claim 1, wherein said opening for base contacts is performed using laser ablation. 7. The method of claim 6, wherein said laser ablation is pulsed pico-second laser ablation. 8. The method of claim 6, wherein said laser ablation is pulsed femto-second laser ablation. 9. The method of claim 1, wherein said activating said implanted dopant element is performed using furnace annealing. 10. The method of claim 1, wherein said activating said implanted dopant element is performed using laser annealing. 11. The method of claim 10, wherein said laser annealing is pulsed nanosecond laser annealing. 12. The method of claim 1, wherein the base and emitter contacts are patterned in parallel linear regions. 13. The method of claim 1, where the base and emitter contacts are formed as discrete islands. 14. The method of claim 1, wherein the percent of base opening can be in the range from about 0.5% to 10%. 15. The method of claim 1, where laser ablation is carried out using laser with wavelength being IR, green, or UV, or any wavelength between. 16. The method of claim 1, where the surface concentration of dopants in the base may be from 1×1019 to 1×1021/cm3, implanted at a depth of 0.1 to 5 μm. 17. A method for making a front surface field region in a thin-film crystalline silicon substrate, the method comprising: implanting dopant atoms on the front side of a thin-film crystalline silicon substrate, wherein the dopant element has a peak concentration in the range of 1E16 to 1E20 cm−3; andactivating said implanted ions using laser annealing using a continuous wave (CW) laser or a pulsed laser to form a front surface field on said thin-film crystalline silicon substrate. 18. The method of claim 17, wherein said dopant element comprises at least one element selected from the group of phosphorus, arsenic, antimony, and indium in conjunction with an n-doped epitaxial silicon substrate. 19. The method of claim 17, wherein said front surface field has a depth in the range of 10 angstroms to about 1 micron on the front side of said thin-film crystalline silicon substrate. 20. The method of claim 17, wherein said thin-film crystalline silicon substrate is passivated with a passivation layer deposited at a temperature less than 250° C. 21. The method of claim 20, wherein said passivation layer is chosen from the group consisting of SiN, amorphous silicon/SiN stack, oxide/SiN stack, or silicon oxynitride with and without an oxide underlayer, and silicon carbide. 22. The method of claim 20, wherein the passivation layer is deposited after the ion implantation and laser anneal. 23. The method of claim 20, wherein the ion implantation and anneal is carried out after the passivation layer is deposited. 24. The method of claim 17, wherein the peak concentration of the dopant element is at the interface of the silicon film and the said passivation layer. 25. The method of claims 17, wherein the incident angle of the laser beam is controlled based on a dielectric stack on the front surface of said substrate to prevent from heating the back plane as it undergoes full internal reflection. 26. The method of claim 17, wherein said laser has a wavelength less than or equal to 1064 nanometers. 27. The method of claim 17, wherein said dopant element comprises at least one element selected from the group of phosphorus, arsenic, antimony, and indium in conjunction with an n-doped silicon substrate. 28. A method for making selective emitter regions in a thin-film crystalline substrate, the method comprising: forming first openings in a parallel linear region pattern for emitter contacts on a thin-film crystalline silicon substrate;selectively implanting ions of an dopant element in said thin-film crystalline silicon substrate at said emitter contacts;activating said implanted ions to form doped emitter contacts; andforming metallization contacts on said emitter contacts and base contacts on said thin-film crystalline silicon substrate. 29. The method of claim 28, wherein said silicon substrate is an n-type silicon substrate and said emitter contact doping element is boron, gallium, or aluminum. 30. The method of claim 28, wherein said silicon substrate is a p-type silicon substrate and said emitter contact doping element is phosphorous (P), arsenic (As), indium (In), or antimony (Sb). 31. The method of claim 28, wherein said silicon substrate is a p-type silicon substrate and a base contact doping element is boron, gallium, or aluminum. 32. The method of claim 28, wherein the opening for emitter is performed using pulsed laser ablation. 33. The method of claim 28, wherein the implant activation is performed using furnace annealing. 34. The method of claim 28, wherein the implant activation is performed using laser annealing. 35. The method of claim 28, wherein said base and emitter contacts are discrete islands.
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