Article storage facility and article storage method
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
H01L-021/677
A47B-081/00
H01L-021/673
출원번호
US-0310282
(2014-06-20)
등록번호
US-9364086
(2016-06-14)
우선권정보
JP-2013-134266 (2013-06-26)
발명자
/ 주소
Takahara, Masahiro
Ueda, Toshihito
출원인 / 주소
Daifuku Co., Ltd.
대리인 / 주소
The Webb Law Firm
인용정보
피인용 횟수 :
1인용 특허 :
11
초록▼
Proper article storage management is made possible in the article storage facility which stores articles in containers and in an inactive gas environment. The article storage facility includes a storage rack having storage sections, a transport portion which transports containers to the storage sect
Proper article storage management is made possible in the article storage facility which stores articles in containers and in an inactive gas environment. The article storage facility includes a storage rack having storage sections, a transport portion which transports containers to the storage sections, gas supplying portions each of which supplies inactive gas to the container stored in the storage section, and a display. The display displays display sections such that the arrangement of the display sections corresponds to the arrangement of the storage sections in the storage rack and displays a supply state of inactive gas in each of the display sections.
대표청구항▼
1. An article storage facility comprising: a storage rack having a plurality of storage sections arranged with regularity;a transport portion which carries in airtight containers to the storage sections and carries out the airtight containers from the storage sections;gas supplying portions which su
1. An article storage facility comprising: a storage rack having a plurality of storage sections arranged with regularity;a transport portion which carries in airtight containers to the storage sections and carries out the airtight containers from the storage sections;gas supplying portions which supply inactive gas to respective ones of the containers stored in the storage sections, in accordance with a supply pattern defined in advance;a display which displays an operation state of a system of the article storage facility, the operation state including an operation state of the transport portion and operation states of the gas supplying portions;wherein the display displays a plurality of display sections such that an arrangement of the display sections corresponds to an arrangement of the plurality of the storage sections in the storage rack, and also displays, in each of the plurality of display sections, a supply state of the inactive gas to the container stored in a corresponding one of the storage sections. 2. The article storage facility as defined in claim 1, wherein the display displays, as a kind of the gas supply state, purge progress which represents a proportion of the amount of the inactive gas that has been supplied to the container with respect to an internal volume of the container. 3. The article storage facility as defined in claim 2, wherein when the container is carried into the storage section by the transport portion, the display displays the purge progress for the container. 4. The article storage facility as defined in claim 1, wherein the supply pattern includes a plurality of supply phases that are defined such that a combination of a supplying timing of the inactive gas and a target flow rate is different for a different supply phase, andwherein the display indicates, as a kind of the supply state, which one of the supply phases the container is subjected to at the time by means of different colors depending on the supply phase. 5. The article storage facility as defined in claim 4, wherein the gas supplying portion is configured to be able to supply the inactive gas to clean a gas supply nozzle which fits into a gas supply opening provided to the container, in a predetermined period before the container is carried into the storage section by the transport portion, andwherein the display indicates, as a kind of the supply state, the fact that the inactive gas is being supplied to clean the gas supply nozzle by means of a color that is different from the colors representing respective ones of the plurality of supply phases. 6. The article storage facility as defined in claim 1, further comprising: a load presence period acquiring portion which acquires a load presence period which is an elapsed time after the container is carried into the storage section,wherein, if the load presence period for a given container exceeds a standard load presence period defined in advance, the display further displays warning information indicating that the standard load presence period has been exceeded, in the display section corresponding to the storage section in which the container is stored. 7. The article storage facility as defined in claim 1, further comprising: an identifying information acquiring portion which acquires identifying information of the containers stored in the storage sections,wherein, if the identifying information acquiring portion is unable to acquire identifying information for a given container, the display further displays warning information indicating that the identifying information is not acquired, in the display section corresponding to the storage section in which the container is stored. 8. An article storage method utilizing an article storage facility, the article storage facility includinga storage rack having a plurality of storage sections arranged with regularity;a transport portion which carries in airtight containers to the storage sections and carries out the airtight containers from the storage sections;gas supplying portions which supply inactive gas to respective ones of the containers stored in the storage sections, in accordance with a supply pattern defined in advance;a display which displays an operation state of a system of the article storage facility, the operation state including an operation state of the transport portion and operation states of the gas supplying portions;the article storage method comprising the following step that is performed by the display:a supply state displaying step of displaying a plurality of display sections such that an arrangement of the display sections corresponds to an arrangement of the plurality of the storage sections in the storage rack, and also displaying, in each of the plurality of display sections, a supply state of the inactive gas to the container stored in a corresponding one of the storage sections. 9. The article storage method as defined in claim 8, wherein in the supply state displaying step, as a kind of the gas supply state, purge progress is displayed, the purge progress representing a proportion of the amount of the inactive gas that has been supplied to the container with respect to an internal volume of the container. 10. The article storage method as defined in claim 9, wherein in the supply state displaying step, when the container is carried into the storage section by the transport portion, the purge progress for the container is displayed. 11. The article storage method as defined in claim 8, wherein the supply pattern includes a plurality of supply phases that are defined such that a combination of a supplying timing of the inactive gas and a target flow rate is different for a different supply phase,wherein, in the supply state displaying step, the supply phase that the container is subjected to at the time is indicated, as a kind of the supply state, by means of different colors depending on the supply phase. 12. The article storage method as defined in claim 11, wherein the gas supplying portion is configured to be able to supply the inactive gas to clean a gas supply nozzle which fits into a gas supply opening provided to the container, in a predetermined period before the container is carried into the storage section by the transport portion,wherein, in the supply state displaying step, the fact that the inactive gas is being supplied to clean the gas supply nozzle is indicated, as a kind of the supply state, by means of a color that is different from the colors representing respective ones of the plurality of supply phases. 13. The article storage method as defined in claim 8, wherein the article storage facility further includes a load presence period acquiring portion which acquires a load presence period which is an elapsed time after the container is carried into the storage section,and the steps performed by the display further comprising the following step:a step of further displaying warning information indicating that a standard load presence period has been exceeded, in the display section corresponding to the storage section in which the container is stored, if the load presence period for a given container exceeds the standard load presence period defined in advance. 14. The article storage method as defined in claim 8, wherein the article storage facility further includes an identifying information acquiring portion which acquires identifying information of the containers stored in the storage sections,and the steps performed by the display further comprising the following step:a step of further displaying warning information indicating that the identifying information is not acquired, in the display section corresponding to the storage section in which the container is stored, if the identifying information acquiring portion is unable to acquire identifying information for a given container.
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이 특허에 인용된 특허 (11)
Murata, Masanao; Maetaki, Susumu, Container transport system and measurement container.
Fosnight, William J.; Waite, Stephanie; Miner, Stephen B.; Robinson, John, Wafer carrier purge apparatuses, automated mechanical handling systems including the same, and methods of handling a wafer carrier during integrated circuit fabrication.
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