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Optical to optical methods enhancing the sensitivity and resolution of ultraviolet, electron beam and ion beam devices

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G01B-009/02
  • G01R-031/265
  • G01R-015/24
  • G01R-031/311
출원번호 US-0109362 (2013-12-17)
등록번호 US-9366719 (2016-06-14)
발명자 / 주소
  • Pfaff, Paul L.
출원인 / 주소
  • ATTOFEMTO, INC.
대리인 / 주소
    Rondeau, Jr., George C.
인용정보 피인용 횟수 : 0  인용 특허 : 112

초록

In decreasing the electron beam duration required for increased time resolution, the average beam current decreases, degrading measurement sensitivity and limiting the spatial and time resolution of electron beam and ion beam devices. Optical to optical measurements using two imaging devices permits

대표청구항

1. An optical image detection method for enhancing time and spatial resolution in internal integrated circuit testing in at least one phase of evaluation and manufacture, using a first infrared or optical imaging device that is sensitive to an incident electron beam or ion beam or X-ray beam or ultr

이 특허에 인용된 특허 (112)

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