Disclosed herein are polysilsesquioxane based anti-reflective coating (ARC) compositions, methods of preparation, and methods of deposition on a substrate. In embodiments, the polysilsesquioxane of this disclosure is prepared in a two-step process of acid catalyzed hydrolysis of organoalkoxysilane f
Disclosed herein are polysilsesquioxane based anti-reflective coating (ARC) compositions, methods of preparation, and methods of deposition on a substrate. In embodiments, the polysilsesquioxane of this disclosure is prepared in a two-step process of acid catalyzed hydrolysis of organoalkoxysilane followed by addition of tetralkoxysilane that generates silicone polymers with 40 mol % silanol based on Si-NMR. These high silanol siloxane polymers are stable and have a long shelf-life in the polar organic solvents at room temperature. Also disclosed are low refractive index ARC made from these compositions with and without additives such as porogens, templates, Si—OH condensation catalyst and/or nanofillers. Also disclosed are methods and apparatus for applying coatings to flat substrates including substrate pre-treatment processes, coating processes including flow coating and roll coating, and coating curing processes including skin-curing using hot-air knives. Also disclosed are coating compositions and formulations for highly tunable, durable, highly abrasion-resistant functionalized anti-reflective coatings.
대표청구항▼
1. A siloxane polymer solution composition, comprising: (i) a siloxane polymer A formed from an acid hydrolyzed alkoxysilane, an acid hydrolyzed organosilane, and optionally an acid hydrolyzed organofluorosilane, wherein the acid hydrolyzed organosilane and the optional acid hydrolyzed organofluoros
1. A siloxane polymer solution composition, comprising: (i) a siloxane polymer A formed from an acid hydrolyzed alkoxysilane, an acid hydrolyzed organosilane, and optionally an acid hydrolyzed organofluorosilane, wherein the acid hydrolyzed organosilane and the optional acid hydrolyzed organofluorosilane are each separately prepared before combining, wherein the siloxane polymer A has the following formula:[RSi(OH)2O0.5]a[RSiO1.5]b[RSi(OH)O]c[R′Si(OH)2O0.5]m[R′SiO1.5]n[R′Si(OH)O]p[SiO2]w[Si(OH)O1.5]x[Si(OH)2O]y[Si(OH)3O0.5]z, where R is selected from the group consisting of independently methyl or optionally substituted or unsubstituted C2 to C10 alkyl group, a substituted or unsubstituted C3 to C20 cycloalkyl group, a substituted or unsubstituted C1 to C10 hydroxyalkyl group, a substituted or unsubstituted C6 to C20 aryl group, a substituted or unsubstituted C2 to C20 heteroaryl group, a substituted or unsubstituted C2 to C10 alkenyl group, a substituted or unsubstituted carboxyl group, a substituted or unsubstituted (meth)acryl group a substituted or unsubstituted glycidylether group, or a combination thereof, R′ is selected from the group consisting of a fluorine substituted C3 alkyl group or optionally C4 to C10 alkyl group, a fluorine substituted C3 to C20 cycloalkyl group, a fluorine substituted C1 to C10 hydroxyalkyl group, a fluorine substituted aryl group, a fluorine substituted C2 to C20 heteroaryl group, a fluorine substituted C2 to C10 alkenyl group, a fluorine substituted carboxyl group, a substituted or unsubstituted (meth)acryl group, a fluorine substituted glycidylether group, or a combination thereof, 0
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