[특허]Piezoelectric microactuator with restraining layer for control of bending

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	G11B-005/48
출원번호	US-0800645 (2015-07-15)
등록번호	US-9390739 (2016-07-12)
발명자 / 주소	Zhang, Long Hahn, Peter Ee, Kuen Chee
출원인 / 주소	MAGNECOMP CORPORATION
대리인 / 주소	Intellectual Property Law Offices of Joel Voelzke, APC
인용정보	피인용 횟수 : 4 인용 특허 : 50

초록 ▼

A PZT microactuator such as for use in a hard disk drive has a restraining layer bonded on its side that is opposite the side on which the PZT will be mounted. The restraining layer comprises a stiff and resilient material such as stainless steel. The restraining layer can cover all of the top of th

A PZT microactuator such as for use in a hard disk drive has a restraining layer bonded on its side that is opposite the side on which the PZT will be mounted. The restraining layer comprises a stiff and resilient material such as stainless steel. The restraining layer can cover all of the top of the PZT, or most of the top of the PZT with an electrical connection being made to the PZT where it is not covered by the restraining layer. The restraining layer reduces bending of the PZT as mounted and hence increases effective stroke length, or reverses the sign of the bending which increases the effective stroke length of the PZT even further.

대표청구항 ▼

1. A piezoelectric microactuator comprising: a piezoelectric material;opposite first and second faces of the piezoelectric microactuator; anda restraining layer having a Young's modulus of greater than 50 GPa bonded to the second face of the piezoelectric microactuator by an adhesive without any add

1. A piezoelectric microactuator comprising: a piezoelectric material;opposite first and second faces of the piezoelectric microactuator; anda restraining layer having a Young's modulus of greater than 50 GPa bonded to the second face of the piezoelectric microactuator by an adhesive without any additional layer therebetween having a stiffness that is substantially less than the stiffness of the restraining layer, the restraining layer altering the bending behavior of the piezoelectric microactuator so as to increase the effective stroke length of the piezoelectric microactuator compared to what the stroke length of the piezoelectric microactuator would be in the absence of the restraining layer. 2. The piezoelectric microactuator of claim 1 wherein the restraining layer is bonded to the second face of the piezoelectric microactuator by said adhesive without any additional layer therebetween having a Young's modulus that is less than 50 GPa. 3. The piezoelectric microactuator of claim 1 wherein the restraining layer is bonded to the second face of the piezoelectric microactuator by said adhesive without any additional layer therebetween of a material having a Young's modulus that is less than 20 GPa. 4. The dual stage actuated suspension of claim 1 wherein the restraining layer has a Young's modulus of greater than 100 GPa. 5. The piezoelectric microactuator of claim 1 wherein the restraining layer comprises stainless steel. 6. The piezoelectric microactuator of claim 1 wherein the restraining layer comprises a ceramic material. 7. A piezoelectric microactuator comprising: a piezoelectric material;opposite first and second faces of the piezoelectric microactuator; anda restraining layer bonded to the second face of the piezoelectric microactuator, the restraining layer comprising the same material as said piezoelectric material but being unpoled, the restraining layer altering the bending behavior of the piezoelectric microactuator so as to increase the effective stroke length of the piezoelectric microactuator compared to what the stroke length of the piezoelectric microactuator would be in the absence of the restraining layer. 8. The piezoelectric microactuator of claim 7 wherein the restraining layer has a Young's modulus of greater than 100 GPa and the restraining layer is bonded directly to the second face of the piezoelectric microactuator by epoxy adhesive without any organic material between the epoxy adhesive and the restraining layer. 9. The piezoelectric microactuator of claim 7 wherein when the piezoelectric microactuator is activated so as to cause it to expand, the piezoelectric microactuator bends such that the second face assumes a concave shape. 10. The piezoelectric microactuator of claim 7 wherein when the piezoelectric microactuator is activated so as to cause it to contract, the piezoelectric microactuator bends such that the second face assumes a convex shape. 11. The piezoelectric microactuator of claim 7 wherein the piezoelectric material has a first portion that is covered by the restraining layer and a second portion that is not covered by the restraining layer. 12. The piezoelectric microactuator of claim 7 wherein the piezoelectric material has a first portion that is covered by the restraining layer and a second portion that is not covered by the restraining layer, and an electrical connection to the piezoelectric material is disposed on the uncovered second portion and electrically bonded thereto. 13. The piezoelectric microactuator of claim 12 wherein the electrical connection on the uncovered first portion rises to a height that is no higher than the restraining layer. 14. A piezoelectric microactuator comprising: a linear piezoelectric element having a top face and a bottom face;a material having a Young's modulus of greater than 50 GPA affixed to the top face of the piezoelectric element;wherein:when the piezoelectric element is actuated by a voltage that causes the piezoelectric element to expand, the piezoelectric element bends in a direction that causes the top face to become more concave; andwhen the piezoelectric element is actuated by a voltage that causes the piezoelectric element to contract, the piezoelectric element bends in a direction that causes the top face to become more convex. 15. The piezoelectric microactuator of claim 14 wherein: when the piezoelectric element is actuated by a voltage that causes the piezoelectric element to expand, the piezoelectric element bends in a direction that causes the top face to become net concave in shape; andwhen the piezoelectric element is actuated by a voltage that causes the piezoelectric element to contract, the piezoelectric element bends in a direction that causes the top face to become net convex in shape. 16. A piezoelectric microactuator assembly comprising: a thin film PZT material, the PZT material having a first side and an opposite second side;a stiff material bonded directly to the second side of the PZT material by epoxy adhesive, the stiff material covering at least 50% of the PZT material;wherein the PZT material has a first portion that is covered by the stiff material and a second portion that is not covered by the stiff material, andwherein the stiff material comprises an insulating material and the insulating material has an electrically conductive via therethrough. 17. The piezoelectric microactuator of claim 16 wherein the stiff material comprises stainless steel. 18. The piezoelectric microactuator of claim 16 wherein the stiff material is an insulating material. 19. The piezoelectric microactuator of claim 18 wherein the stiff material comprises silicon. 20. The piezoelectric microactuator of claim 18 further comprising an electrical connection to the PZT material disposed on the uncovered second portion and electrically bonded thereto. 21. A piezoelectric microactuator comprising: a piezoelectric material, the piezoelectric microactuator having opposite first and second faces; anda restraining layer bonded to the second face of the piezoelectric microactuator, the restraining layer being smaller than the second face leaving a portion of the second face uncovered by the restraining layer;wherein the restraining layer and its bonding comprises at least one of: a stainless steel layer bonded directly to the second face of the piezoelectric microactuator by epoxy adhesive; andan unactivated piezoelectric layer affixed to the piezoelectric material, the unactivated piezoelectric layer exhibiting less than 10% as much piezoelectric behavior as the piezoelectric material when the microactuator is activated by application of a voltage thereto;wherein the restraining layer alters the bending behavior of the piezoelectric microactuator so as to increase the effective stroke length of the piezoelectric microactuator compared to what the stroke length of the piezoelectric microactuator would be in the absence of the restraining layer. 22. The piezoelectric microactuator of claim 21 further comprising: an electrical connection to the piezoelectric material physically and electrically bonded to the uncovered portion of the piezoelectric microactuator's second face.

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